Abstract: An exposure apparatus and a method to measure a beam position and assigning an address using the same are disclosed. The exposure apparatus includes a Digital Micromirror Device (DMD) having a plurality of micromirrors, each micromirror to modulate light projected from a light source and project a modulated DMD beam onto an exposed surface, a measurement mask to measure positions of the DMD beams projected onto the exposed surface, a sensor to detect light intensities of the DMD beams measured by the measurement mask, and a controller to determine the positions of the DMD beams according to the detected light intensities.

Abstract: A method to compress exposure data may include converting image data into a plurality of exposure data, generating new exposure data by combining part of the plurality of exposure data or by excluding part of the plurality of exposure data, and compressing the new exposure data. An exposure apparatus may include a conversion unit that converts image data into a plurality of exposure data, a control unit that generates new exposure data by combining part of the plurality of exposure data or by excluding part of the plurality of exposure data, and a compression unit that compresses the new exposure data.

Abstract: An exposure apparatus may include: a stage configured to move a substrate; an optical unit configured to generate and project a plurality of laser beams; and a control unit configured to measure straightness of the stage by controlling the projection of the laser beams to an exposed surface of the substrate while moving the stage. A method to measure straightness of a stage in an exposure apparatus may include: placing a substrate on the stage; moving the stage and substrate; generating a plurality of laser beams; projecting the laser beams to the substrate on the stage; and measuring the straightness of the stage by projecting the laser beams to an exposed surface of the substrate.

Abstract: A method of measuring a position error of a beam of an exposure apparatus and an exposure apparatus using the same are provided. An exposure apparatus using a digital micromirror device (DMD) element instead of a mask measures a radiation amount of a beam that passes through each pinhole using a mask including a pinhole, and when the radiation amount is less than a reference value, it is determined that an exposure beam has a position error. By using the exposure apparatus and a method of measuring a position error of a beam, a measurement time period is reduced, and a position error of a beam is simply and accurately determined.

Abstract: An origin of a reference coordinate system is assigned to one of a plurality of center points, and center point coordinates according to the reference coordinate system are assigned to remaining center points, so that reference marks successively correspond to center points of a plurality of microscopes fixed to a base. Beam position detection marks disposed between the reference marks with exposure points of exposure heads fixed to the base are crossed to assign beam coordinates according to the reference coordinate system to the exposure points. Thus, alignment may be easily and accurately performed, and is effective for increasingly larger apparatuses.

Abstract: An LCD glass cassette to store glasses to be mounted on an LCD. The LCD glass cassette has: a side frame and a rear frame, respectively having a side supporter and a rear supporter to respectively support and supporting a side edge and a rear edge of the glass; and a front frame with a front supporter supporting a front edge of the glass. Thus, there is provided the LCD glass cassette capable of effectively preventing bending of LCD glass while the glass is stored.

Abstract: A non-contact feeder system to supply an induced current to an electrical load includes at least three feeding cables arranged approximately parallel with one another along a moving direction of the electrical load; a plurality of AC power supplies to supply AC currents to the feeding cables; pick-up parts to supply an induced current, induced from a magnetic field formed by the AC current flowing through each of the feeding cables, to the electrical load and to be movable along the feeding cables without contacting the feeding cables as the electrical load moves; and a controller to control the plurality of AC power supplies, so that phases of the AC currents supplied from the AC power supplies are the same, and directions of the AC currents flowing through the feeding cables positioned adjacent to one another are reverse with respect to one another. Thus, the space to mount components in the non-contact feeder system is decreased and the induced current is improved.

Abstract: A non-contact feeder system to supply an induced current to an electrical load includes at least three feeding cables arranged approximately parallel with one another along a moving direction of the electrical load; a plurality of AC power supplies to supply AC currents to the feeding cables; pick-up parts to supply an induced current, induced from a magnetic field formed by the AC current flowing through each of the feeding cables, to the electrical load and to be movable along the feeding cables without contacting the feeding cables as the electrical load moves; and a controller to control the plurality of AC power supplies, so that phases of the AC currents supplied from the AC power supplies are the same, and directions of the AC currents flowing through the feeding cables positioned adjacent to one another are reverse with respect to one another. Thus, the space to mount components in the non-contact feeder system is decreased and the induced current is improved.

Abstract: An LCD glass cassette to store glasses to be mounted on an LCD. The LCD glass cassette has: a side frame and a rear frame, respectively having a side supporter and a rear supporter to respectively support and supporting a side edge and a rear edge of the glass; and a front frame with a front supporter supporting a front edge of the glass. Thus, there is provided the LCD glass cassette capable of effectively preventing bending of LCD glass while the glass is stored.