Abstract: Provided are a substrate processing apparatus and method capable of improving line edge roughness (LER). The substrate processing apparatus comprises a plasma generating space disposed between an electrode and an ion blocker, a processing space disposed under the ion blocker and for processing a substrate, a first gas supply module for providing a first gas for generating plasma to the plasma generating space, and a second gas supply module for providing an unexcited second gas to the processing space, wherein the first gas is a hydrogen-containing gas, the second gas includes a nitrogen-containing gas, and the substrate includes a photoresist pattern including carbon.

Abstract: A cylindrical secondary battery includes: an electrode assembly including a positive electrode plate having a positive electrode multi-tab, a separator, and a negative electrode plate having a negative electrode multi-tab, the positive electrode plate, the separator, and the negative electrode plate being laminated and wound; a cylindrical can accommodating the electrode assembly; a cap plate coupled at an upper end of the cylindrical can and being electrically connected to the negative electrode multi-tab; and a positive electrode terminal protruding upwardly through the cap plate and being electrically connected to the positive electrode multi-tab.

Abstract: A cylindrical secondary battery includes: a cylindrical can having a circular bottom portion, a side portion extending from the bottom portion, a beading part concavely formed inwardly at one end of the side portion, and a crimping part formed by bending a distal end of the side portion; an electrode assembly in the can; and a cap assembly sealing the can. The cap assembly includes a gasket for insulation from the can, and an upper portion of the gasket in a direction away from the electrode assembly has a smaller thickness than a lower portion of the gasket.

Abstract: According to one aspect of the present invention, a method of treating a substrate within a chamber includes performing a unit cycle at least one time, in which the unit cycle includes a substrate treatment step of supplying a reaction gas in which radicals constituting plasma of a first treatment gas are mixed with a second treatment gas onto the substrate, wherein the substrate includes a first thin film, and a second thin film having a lower reactivity to the reaction gas than the first thin film.

Abstract: An exemplary embodiment of the present invention provides a substrate treating apparatus, including: a chamber having an inner space; a shower head for partitioning the inner space into an upper first zone and a lower second zone, and formed with a plurality of through holes; a support unit for supporting a substrate in the second zone; a gas supply unit for supplying gas to the first zone; a plasma source for forming a plasma in the first zone by exciting the gas; and an adsorption plate coupled to the shower head, in which a surface of the adsorption plate is provided with a material that adsorbs radicals contained in the plasma.

Abstract: A substrate processing apparatus using plasma capable of efficiently controlling the selectivity ratio of a silicon layer and an oxide layer is provided. The substrate processing apparatus comprises a first space disposed between an electrode and an ion blocker; a second space disposed between the ion blocker and a shower head; a processing space under the shower head for processing a substrate; a first supply hole for providing a first gas for generating plasma to the first space; a second supply hole for providing a second gas to be mixed with an effluent of the plasma to the second space; and a first coating layer formed on a first surface of the shower head facing the second space, not formed on a second surface of the shower head facing the processing space, and containing nickel.

Abstract: A secondary battery is provided in which a first electrode (negative electrode) terminal and a second electrode (positive electrode) terminal may be concurrently (e.g., simultaneously) implemented in a cap assembly. A secondary battery includes: a case including a beading part and a crimping part; an electrode assembly physically coupled to the case and including a first electrode plate and a second electrode plate, the first electrode plate being electrically connected to the case; a first insulating gasket between the beading part and the crimping part; a cap plate coupled between the beading part and the crimping part through the first insulating gasket; a second insulating gasket extending through and coupled to the cap plate; and a rivet terminal extending through and physically coupled to the second insulating gasket, wherein the rivet terminal is electrically connected to the second electrode plate of the electrode assembly.

Abstract: A substrate treating method includes a temperature stabilizing step for stabilizing a temperature of the substrate to a process temperature in a treating space for treating a substrate, a pressure stabilizing step for stabilizing a pressure of a plasma space for generating a plasma and a pressure of the treating space to a process, the plasma space fluid communicating with the treating space, and a treating step for generating the plasma at the plasma space and treating the substrate using the plasma.

Abstract: A substrate treating apparatus configuring an individual LL for each PM and a semiconductor manufacturing facility including the same are provided. The semiconductor manufacturing facility comprises an index module including a first transfer robot and for carrying out and transferring a substrate mounted on a container using the first transfer robot, a transfer module including a second transfer robot and for relaying the substrate transferred by the index module using the second transfer robot, a buffer chamber for heating the substrate relayed by the transfer module, and a process chamber for treating the substrate heated by the buffer chamber, wherein the buffer chamber heats the substrate while the substrate waits before being loaded into the process chamber.

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having an inner space; a plate separating the inner space into a first space which is above and a second space which is below and having a plurality of through holes; a first gas supply unit configured to supply a first gas to the first space; a plasma source for generating a plasma at the first space or the second space; and a monitoring unit installed at the plate and configured to monitor a characteristic of the plasma generated at the first space or the second space.

Abstract: The present disclosure relates to probes for analyzing a chemical composition, and related methods of analyzing a chemical composition and of manufacturing probes for analyzing a chemical composition. A benefit of the disclosed probes and methods can include luminescent chemical sensor arrays for rapid, accurate, portable and economical qualitative and quantitative analysis of a broad range of chemical compositions. A benefit of the methods disclosed herein can include the rapid, simple, and accurate analysis of trace chemicals present in chemical compositions.

Abstract: Proposed is a method of processing micro-holes formed in an upper mold used for adsorbing, transferring, and laminating a thin structure. The micro-holes drilled by setting n mono-layers in a thickness direction of the upper mold, applying the femtosecond pulsed laser beam onto a second mono-layer in a given pattern, processing the micro-holes at a thickness of the next mono-layer in a 2D manner, and sequentially applying the femtosecond pulsed laser beam to the mono-layers while lowering a focus of the laser in units of 1 /n. The femtosecond pulsed laser beam is applied along inner surfaces of the micro-holes, thereby adjusting a dimension of a diameter of each of the micro-holes to be processed, and improving surface roughness of each of the inner surfaces of the micro-holes. Surroundings of an inlet-side edge are chamfered or rounded to prevent generation of the burrs and damage to the thin film sheet.

Abstract: Disclosed are an outer ring for an oil pump having an increased number and size of open pores in a surface of a molded article and a method for manufacturing the outer ring.

Abstract: A method for fabricating a semiconductor device includes: forming a dielectric layer over a substrate; forming a hole-shaped partial via in the dielectric layer; forming a line-shaped trench that partially overlaps with the partial via and has a greater line width than a line width of the partial via in the dielectric layer; forming a hole-shaped via that has a smaller line width than the line width of the partial via and penetrates the dielectric layer on a lower surface of the partial via; and gap-filling the via, the partial via and the trench with a conductive material, wherein a lower surface of the trench is positioned at a higher level than the lower surface of the partial via.

Abstract: A negative electrode for a lithium secondary battery, in which a LiF layer comprising amorphous LiF in an amount of 30 mol % or more is formed on a negative electrode active material layer comprising a carbon-based active material, a lithium secondary battery comprising the same, and a preparation method thereof.

Abstract: A negative electrode active material, including: a graphite core; a first carbon coating layer on the graphite core; and a second carbon coating layer on the first carbon coating layer, wherein a crystallinity of the second carbon coating layer is lower than a crystallinity of the first carbon coating layer, or the second carbon coating layer includes hard carbon and the first carbon coating layer includes soft carbon. A negative electrode including the negative electrode active material and a lithium secondary battery including the same are also disclosed.

Abstract: A negative electrode and a secondary battery including the negative electrode, the negative electrode includes a negative electrode active material layer, the negative electrode active material layer includes a negative electrode active material, the negative electrode active material includes a carbon-based negative electrode active material particles. Each carbon-based negative electrode active material particle includes a core comprising a plurality of flake artificial graphite primary particles; natural graphite present on the core; and an amorphous carbon-based material, wherein the natural graphite is present in the carbon-based negative electrode active material particles in an amount of 10 wt % to 30 wt %, and the carbon-based negative electrode active material particles have a sphericity of 0.78 to 0.83.

Abstract: A method for preparing a spheronized carbonaceous negative electrode active material, including the steps of: mixing microgranular scaly graphite with macrogranular scaly graphite, wherein the macrogranular scaly graphite has a larger average particle diameter than the microgranular scaly graphite, to form a mixture, and spheronizing the mixture to prepare spheronized granulated particles; carrying out carbon coating of the spheronized granulated particles; and disintegrating the carbon-coated spheronized granulated particles.

Abstract: Disclosed is an apparatus for opening and closing sample storage containers, including: a housing 110 having an external appearance provided such that a handle 130 held by a user is exposed; a driving device 180 for generating driving force to rotate a rotation shaft; a key 150 fitted and coupled to a lid 1 of at least one sample storage container and configured to be rotated by the driving force; and an ejector 160 for pressing the lid 1 when the handle 130 is pressed, so that the key 150 is disengaged from the lid 1.

Abstract: The present invention relates to an anti-inflammatory composition and a composition for treatment of an inflammatory disease, both comprising a composite plant extract and, more particularly, to an anti-inflammatory composition comprising a composite plant extract including a Perilla frutescens extract and an Atractylodes macrocephala Koidzumi extract; a preparation method thereof; and a pharmaceutical composition comprising the composite extract for treatment of an inflammatory disease.