Patents by Inventor Dongmin Chen

Dongmin Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication of a reflective spatial light modulator
    Publication number: 20040159631
    Abstract: Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support posts, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry.
    Type: Application
    Filed: January 13, 2004
    Publication date: August 19, 2004
    Inventors: Shaoher X. Pan, Xiao Yang, Dongmin Chen
  • Architecture of a reflective spatial light modulator
    Publication number: 20040145795
    Abstract: A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.
    Type: Application
    Filed: January 13, 2004
    Publication date: July 29, 2004
    Inventors: Shaoher X. Pan, Xiao Yang, Dongmin Chen, Shoucheng Zhang
  • Reflective spatial light modulator
    Publication number: 20040145822
    Abstract: A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.
    Type: Application
    Filed: January 13, 2004
    Publication date: July 29, 2004
    Inventors: Shaoher X. Pan, Xiao Yang, Dongmin Chen, Shoucheng Zhang