Abstract: A plasma reactor has a dual frequency plasma RF bias power supply furnishing RF bias power comprising first and second frequency components, f(1), f(2), respectively, and an RF power path having an input end coupled to the plasma RF bias power supply and an output end coupled to the wafer support pedestal, and sensor circuits providing measurement signals representing first and second frequency components of a measured voltage and first and second frequency components of a measured current near the input end of the RF power path. The reactor further includes a processor for providing first and second frequency components of a wafer voltage signal as, respectively, a first sum of the first frequency components of the measured voltage and measured current multiplied by first and second coefficients respectively, and a second sum of the second frequency components of the measured voltage and measured current multiplied by third and fourth coefficients, respectively. A processor produces a D.C.

Abstract: This invention relates to a method of preparing nanoparticle coated crystals comprising the steps of providing a mixture comprising nanoparticles and a solution of a crystal forming material; and coprecipitating the nanoparticles and the crystal forming material such that crystals are formed, a surface or surfaces of which are at least partially coated with nanoparticles. The invention also relates to nanoparticle coated crystals, a surface or surfaces of which are at least partially coated with nanoparticles wherein the crystal and nanoparticle coating are formed in a single self-assembly step.

Abstract: A plasma reactor operable over a very wide process window of pressure, source power and bias power includes a resonant circuit consisting of an overhead electrode having a first impedance, a wafer support pedestal having a second impedance and a bulk plasma having a third impedance and generally lying in a process zone between the overhead electrode and the wafer support pedestal, the magnitudes of the impedances of the overhead electrode and the wafer support pedestal being within an order of magnitude of one another, the resonant circuit having a resonant frequency determined by the first, second and third impedances.

Abstract: An improved design for sealed air and coolant passthrough couplings which ensures maximum protection against contamination in a chemical warfare environment. The couplings include an air line bulkhead assembly, a liquid passthrough coupling, and an air inlet assembly all of which resist penetrating chemical warfare agents such as Sarin. The air line bulkhead assembly permits breathable air to be passed from outside to the inside of a chemical protective suit without compromising the chemical integrity of the suit. The liquid coolant passthrough permits liquid coolant to be supplied from an external source to the wearer of the chemical protective suit without breaching the integrity of the chemical protective barrier. The liquid coolant passthrough assembly enables a cold reservoir and pumping unit to be mounted on the exterior of chemical protective clothing to facilitate replenishment of the cold source (ice or phase change material), and this can result in longer mission stay times.

Abstract: A continuous ribbon of annealed amorphous magnetic core material (4) is removed from a supply spool (14) and wound into an annular cavity (6) defined by a rotating bobbin (8) within a partially assembled toroidal transformer (10). An appropriate tension on the material entering the annular cavity is created by providing a magnet (35) along a guide surface (20) between the supply spool and the annular cavity to create a drag force on the material. Slack in the material between the guide surface and the entrance gap is eliminated by lightly biasing (40) a portion of the guide surface against the core material. The amorphous magnetic core material is preferably subjected to a stress relief annealing operation in the same spiral orientation and with the same inner and outer diameters as the material will assume as the core of the toroidal transformer. To accomplish this the annealed core material is backwound from its annealing spool (44) onto the supply spool and then is wound into the bobbin.