Abstract: An electrostatic chuck suppresses the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck by the interposition of a guard ring that floats close to the self-bias potential induced by the plasma on the wafer, thereby capacitively dividing the voltage between the wafer and the closest electrode.

Abstract: A computerized electronic hand prosthesis apparatus and method utilizing input, feedback, control, and operating systems configurable to provide precise control and gripping forces corresponding to the particular capabilities and requirements of an individual wearer. An articulated prosthesis is capable of exerting a mechanical gripping force and contains a programmable microcomputer. Electrodes on the prosthesis contact muscles of the remnant portion of a limb and produce an electric command signal responsive to the myoelectric signal created by the wearer contracting and relaxing the muscles in the remnant portion. A drive motor in the prosthesis causes the prosthesis to exert a mechanical gripping force responsive and proportional to the electric command signal. Force sensors in the digits of the prosthesis detect the force exerted and produce an electric sensor signal responsive and proportional thereto.

Abstract: A spa control system which calculates the time required to heat the water in the spa system to a desired temperature. From that information, the heating rate of the spa system can be determined, and the heating element of the spa system can be activated at the proper time to raise the temperature of the water to a selected temperature by a desired time. The spa system also monitors information which might show errors in the operation of the spa system such as a blockage in the flow of water over the heating element in the spa system.

Abstract: An electrostatic chuck 8 assembly includes, from top to bottom: a top multilayer ceramic insulating layer 10; an electrostatic pattern layer 12 having a conductive electrostatic pattern 16 disposed on a multilayer ceramic substrate; a multilayer ceramic support layer 20; and, a heat sink base 30 having a backside cooling channels machined therein. Layers 12, 12 and 20 are bonded together using multilayer ceramic techniques and the heatsink base 30 is brazed to the bottom of the multilayer ceramic support layer 20.

Abstract: An electrostatic chuck 40 assembly includes, from top to bottom: a top isolation layer 42; an electrostatic pattern layer 44 comprised of an electrically conductive electrostatic pattern 46 disposed on a substrate 45; a heating layer 50 comprised of an electrically conductive heating pattern 54 disposed on a substrate 52; a support 60; and, a heat sink base 70 having backside cooling and insulating channels 78, 80 provided therein.

Abstract: An electrostatic chuck is provided with an electrode split into two sections. The separate sections are joined through a tapered joint and bonded using epoxy. An insulator electrically separates the two sections and covers the top of the joined sections to form a clamping surface. The geometry of the electrode forms three annular regions, dividing the clamping surface into two equal areas distributed symmetrically. Moreover, the split-ring electrostatic chuck just described is fabricated by forming the two, separate electrodes; coating the separate electrodes with an insulator; joining the electrodes; machining the joint, top surface of the electrodes to form a single, co-planar, flat, smooth surface; and applying an insulator to that top surface.

Abstract: An electrostatic chuck is provided with an electrode split into two sections. The separate sections are joined through a tapered joint and bonded using epoxy. An insulator electrically separates the two sections and covers the top of the joined sections to form a clamping surface. The geometry of the electrode forms three annular regions, dividing the clamping surface into two equal areas distributed symmetrically. Moreover, the split-ring electrostatic chuck just described is fabricated by forming the two, separate electrodes; coating the separate electrodes with an insulator; joining the electrodes; machining the joint, top surface of the electrodes to form a single, co-planar, flat, smooth surface; and applying an insulator to that top surface.

Abstract: A vibratory linear motor system employs a comb-shaped electromagnet to excite transverse mechanical oscillations of a relatively thin, spring-like beam. The electromagnet establishes an approximate standing wave on the beam for which brakes mounted on either side of the beam provide independently established boundary conditions and produce rectified linear motion thereof. The brakes may be electromagnetically, magnetostrictively, or piezoelectrically actuated. An electronic control provides modulated currents to the exciter electromagnet and the brakes in order to control the rectified linear motion of the beam.

Abstract: A material tester which allows for material characterization under hydrodmic loading including very high rates of loading such as found in ballistic applications, and which includes various interchangeable fittings to allow the tester to simultaneously subject a test specimen to (1) radial compression and axial tension, or (2) radial compression and axial compression, or (3) radial compression and axial shearing stress.

Abstract: A chip registration mechanism may form a part of a carrier for retaining in position a plurality of integrated circuit chips in row and column fashion having identification codes on one surface thereof, such that the chip codes may be read and cooperate with a tray having multiple cells, with each cell receiving an individual integrated circuit chip, or function to position a single chip relative to a reference surface for processing. A chip registration base member includes a pedestal projecting upwardly from a base member within a cavity having transverse dimensions oversized relative to the chip and defining at least one lateral reference surface. A lid extends across the top of the member partially defines the cavity above the chip with the chip resting on the top of the pedestal.

Abstract: The dynamic axis of a sphere, e.g. golf ball, is located by spinning the sphere at high speed while it is supported on a low friction-bearing surface, thus allowing the desired stable axis to align itself with the spin axis. Markings indicative of the location of the stable axis are applied to the sphere. The spinning operation also indicates the degree of existing eccentricities in the sphere.

Abstract: A rotor for a self-starting permanent magnet AC motor is comprised of a permanent magnet disk mounted on a shaft of non-magnetic material. The magnet has a direction of magnetization parallel to the axis of the shaft resulting in two poles, one on each face of the magnet. Two disks of current carrying material are mounted on the shaft on either side of the magnet to act as starting coils. Pole pieces are mounted on the shaft and surround the starting disks. Claw-like projections spaced about and extending from the periphery of the pole pieces extend inwardly over the periphery of the magnet and starting disks. The claw-like projections from each pole piece are interlaced forming rotor poles of alternating polarity.

Abstract: Amorphous metal ribbon and thin conventional magnetic material is fully cut through by an electron beam and has no or minimal bead on the edge. The ribbon is bent around a roller while under the electron beam and centrifugal force removes molten metal from the cut. An alternative method is to partially cut through and mechanically deform the material to break the thinned section metal bridges remaining below the cut. Motor laminations so cut have negligible increase in thickness and stack compactly.

Abstract: A lamp ballast has a pair of adjacent gapped "O" magnetic cores made of nested, almost complete loops of amorphous metal strip with the gaps in the loops shaped and arranged under the secondary coil to simulate any type of restricted cross section for shaping the lamp current. A long slender reactor has a similar configuration in which the gaps are staggered; a different embodiment has a long central core of compressed amorphous metal flake and a helical overwrap of ribbon. An alloy of iron, boron, and silicon with a high B.sub.r /B.sub.s ratio is preferred for these inductive devices.

Abstract: A rapid method of cutting thin amorphous metal sheet material is to use a focused heat source such as a laser beam or electron beam to heat local regions of the material above the crystallization temperature and form brittle crystalline lines along which the material fractures when it is mechanically deformed as by passage through a set of rollers. The material is not melted and does not form burrs. A higher packing factor is possible for motor and transformer laminations.

Abstract: Apparatus for removing and installing hot refractory bricks, particularly in the checkerwork structures of the regenerators employed in glass melting furnaces, the apparatus having a manually operable, selectively actuatable claw mechanism mounted on one end of an elongated support member for gripping and moving the bricks individually at a remote location. The claw mechanism is operated by a power cylinder mounted on the other end of the elongated support member, the cylinder being manually controlled by an operator who also manipulates the support member to move a grasped brick to a desired position. A cooling medium, such as air or the like, may be employed for cooling the claw mechanism.

Abstract: A lamp ballast has a pair of adjacent gapped "O" magnetic cores made of nested, almost complete loops of amorphous metal strip with the gaps in the loops shaped and arranged under the secondary coil to simulate any type of restricted cross section for shaping the lamp current. A long slender reactor has a similar configuration in which the gaps are staggered; a different embodiment has a long central core of compressed amorphous metal flake and a helical overwrap of ribbon. An alloy of iron, boron, and silicon with a high B.sub.r /B.sub.s ratio is preferred for these inductive devices.

Abstract: A rotor is fabricated of a plurality of strips of thin amorphous metal wound side by side into adjacent coils about an axis, the flat sides of the strips being parallel to the axis. The rotor material is annealed to increase its coercive force to a value which may be up to 100 oersteds, rendering the rotor useful in a hysteresis type motor.

Abstract: A hard magnetic article made by casting a magnetically soft amorphous metal ribbon and shaping it to the form and size of the desired permanent magnet article, and then heat treating the resulting soft magnetic body and thereby converting the metal of the ribbon to the hard magnetic state.

Abstract: The secondary winding of a current transformer is driven by a high frequency AC source to excite the core to alternating, uniformly equal positive and negative peaks of current excitation. An inductance sensor alternately senses the secondary winding inductances at corresponding points adjacent the positive and negative peaks of the flux wave generated in the core. Any difference in these inductances is a function of low frequency primary current and is utilized to develop a current flowing through a tertiary core winding to equalize these inductances. This tertiary winding current thus becomes a precise measure of the primary current.