Abstract: A microwave resonator magnetic field measuring device (1) for measuring alternating magnetic fields, with a base plate (11) having at least one supporting/bearing/clamping point (111), at least one mechanical oscillator (12+13) formed as a microwave resonator in the form of a cantilever (13) having at least one magnetostrictive layer (12), the latter being connected and mounted at at least one point to the base plate (11) in the at least one supporting/bearing/clamping point (111), at least one input coupling means (161) for microwaves and at least one output coupling means (162) for microwaves, wherein the base plate (11) and the mechanical oscillator (12+13) formed as a microwave resonator are at least partly electrically conductive and electrically conductively connected to one another. Also, a magnetic field measuring method having a magnetic field measuring device according to the invention.

Abstract: A force measuring plate having a planar regular arrangement of force measuring cells. A force measuring cell is formed in a hole in the force measuring plate, in which hole precisely one planar element which is secured by springs in a self-supporting fashion is arranged and is oriented so as to run parallel to the force measuring plate. Each spring is connected in a materially joined fashion at a first end to the edge of a hole and at a second end to the edge of a planar element. The force measuring plate, the springs and the planar elements are formed from the same material. Each planar element can be elastically deflected in three spatial directions under the effect of a force. There is a linear relationship between the deflection and the force. In addition, the invention relates to a device for determining forces in the piconewton to nanonewton ranges.

Abstract: A force measuring disc having a planar regular arrangement of force measuring cells. A force measuring cell is formed in a hole in the force measuring disc, in which hole precisely one planar element which is secured by springs in a self-supporting fashion is arranged and is oriented so as to run parallel to the force measuring disc. Each spring is connected in a materially joined fashion at a first end to the edge of a hole and at a second end to the edge of a planar element. The force measuring disc, the springs and the planar elements are formed from the same material. Each planar element can be elastically deflected in three spatial directions under the effect of a force. There is a linear relationship between the deflection and the force. In addition, the invention relates to a device for determining forces in the piconewton to nanonewton ranges.

Abstract: A layer having individual elements made of an elastic material, with the length thereof exceeding the diameter thereof, which are secured on a carrier at a distance to one another, wherein the elements can be moved towards and away from one another, the elements can contact when moving towards one another, the outer surfaces of the elements provided with a surface modification, and the surface modification containing substances that can form reversible, non-covalent bonds. Also, a method for producing the layer, and the use of the layer.

Abstract: A magnetic field sensor element with a piezo electric substrate having predetermined shear wave velocity VS, two pairs of interdigital electrodes, arranged on the substrate on the ends of a delay section, having a period length p of at least 10 micrometers, a non-magnetic, electrically non-conductive guide layer arranged on the substrate along the delay section, and a magnetostrictive functional layer arranged on the guide layer, wherein the shear wave velocity in the guide layer is smaller than VS, wherein a) the substrate is oriented to generate and propagate mechanical shear waves upon applying a temporally periodic, electrical voltage to at least one interdigital electrode pair in the range of frequency VS/p and, wherein b) the thickness of the guide layer equals at least 10% and at most 30% of the period length p of the interdigital electrodes.

Abstract: A microwave resonator magnetic field measuring device (1) for measuring alternating magnetic fields, with a base plate (11) having at least one supporting/bearing/clamping point (111), at least one mechanical oscillator (12+13) formed as a microwave resonator in the form of a cantilever (13) having at least one magnetostrictive layer (12), the latter being connected and mounted at at least one point to the base plate (11) in the at least one supporting/bearing/clamping point (111), at least one input coupling means (161) for microwaves and at least one output coupling means (162) for microwaves, wherein the base plate (11) and the mechanical oscillator (12+13) formed as a microwave resonator are at least partly electrically conductive and electrically conductively connected to one another. Also, a magnetic field measuring method having a magnetic field measuring device according to the invention.

Abstract: A magnetic field measuring method using a magnetoelectric composite element as an oscillator, in which a time-dependent measurement magnetic field acts on the magnetostrictive phase of the composite element, and an electrical measurement voltage is tapped off across the piezoelectric phase of the composite element and is used to infer the measurement magnetic field. At least one dielectric phase is connected to the magnetostrictive phase of the composite element by a material bond. When an electrical voltage is applied, the dielectric phase exhibits a change in length, the magnitude of which depends in a non-linear manner on the magnitude of the voltage, and a temporally periodic electrical modulation voltage is applied to the dielectric phase.

Abstract: A magnetic field sensor element with a piezo electric substrate having predetermined shear wave velocity VS, two pairs of interdigital electrodes, arranged on the substrate on the ends of a delay section, having a period length p of at least 10 micrometers, a non-magnetic, electrically non-conductive guide layer arranged on the substrate along the delay section, and a magnetostrictive functional layer arranged on the guide layer, wherein the shear wave velocity in the guide layer is smaller than VS, wherein a) the substrate is oriented to generate and propagate mechanical shear waves upon applying a temporally periodic, electrical voltage to at least one interdigital electrode pair in the range of frequency VS/p and, wherein b) the thickness of the guide layer equals at least 10% and at at most 30% of the period length p of the interdigital electrodes.

Abstract: A layer having individual elements made of an elastic material, with the length thereof exceeding the diameter thereof, which are secured on a carrier at a distance to one another, wherein the elements can be moved towards and away from one another, the elements can contact when moving towards one another, the outer surfaces of the elements provided with a surface modification, and the surface modification containing substances that can form reversible, non-covalent bonds. Also, a method for producing the layer, and the use of the layer.

Abstract: A magnetic field measuring method using a magnetoelectric composite element as an oscillator, in which a time-dependent measurement magnetic field acts on the magnetostrictive phase of the composite element, and an electrical measurement voltage is tapped off across the piezoelectric phase of the composite element and is used to infer the measurement magnetic field. At least one dielectric phase is connected to the magnetostrictive phase of the composite element by a material bond. When an electrical voltage is applied, the dielectric phase exhibits a change in length, the magnitude of which depends in a non-linear manner on the magnitude of the voltage, and a temporally periodic electrical modulation voltage is applied to the dielectric phase.

Abstract: Magnetoelectric sensors that can be manufactured using known methods of thin film technology and output an ME voltage that is many times higher for a predetermined magnetic field than the known cantilever-beam sensor. The design that is termed separator ME sensor is characterized by the arrangement of a thick dielectric layer (14) between the ferroelectric (10) and the magnetostrictive phases (12), and by an electrode arrangement (18) applied on one side of the ferroelectric (10) and that is engineered to tap the ME voltage along the extent of the layer. Advantageously, it can be manufactured easily by coating conventional dielectric substrates (14) on the front and rear with one each of the functional layers (10, 12).

Abstract: A method for measuring a time-variant magnetic field using a magnetoelectric sensor having mechanical resonant frequency fR, wherein the magnetic field has at least one component having harmonic time dependence with the measuring signal amplitude to be determined Hmess0 and the measuring signal frequency to be determined fmess in a known frequency interval fmin<fmess<fmax. The method includes: a. superimposing the magnetic field with a modulation magnetic field having harmonic time dependence with the known modulation amplitude Hmess0 and a selectable modulation frequency on the sensor, b. varying (wobbling) the modulation frequency over a complementary frequency interval determined by the known interval limits fmin, fmax and the resonant frequency of the sensor, c. measuring the sensor signal for each selected modulation frequency, d. searching for the at least one modulation frequency fmod, which results in a sensor signal in the mechanical resonance of the sensor, e.

Abstract: Magnetoelectric sensors that can be manufactured using known methods of thin film technology and output an ME voltage that is many times higher for a predetermined magnetic field than the known cantilever-beam sensor. The design that is termed separator ME sensor is characterised by the arrangement of a thick dielectric layer (14) between the ferroelectric (10) and the magnetostrictive phases (12), and by an electrode arrangement (18) applied on one side of the ferroelectric (10) and that is engineered to tap the ME voltage along the extent of the layer. Advantageously, it can be manufactured easily by coating conventional dielectric substrates (14) on the front and rear with one each of the functional layers (10, 12).

Abstract: A method for producing a medical functional element having a self-supporting lattice structure which has interconnected webs. The method applies a first layer to the substrate layer, the first layer is structured by an etching process, the structured first layer is under-cut of a wet chemical etching process acting on the substrate layer, the substrate layer is removed in order to form the self-supporting lattice structure, a web constructional layer is applied to the first layer. The method is distinguished by the forming the first web attachment layer which has a smaller layer thickness than the web constructional layer and is intimately bonded to the web constructional layer in such a way that the web attachment layer, together with the web constructional layer, forms the webs of the self-supporting lattice structure.

Abstract: A magnetostrictive layer system is suggested comprising at least one layer sequence comprising an anti-ferromagnetic, (AFM), layer and a magnetostrictive, ferromagnetic, FM, layer arranged directly thereon, wherein the layer sequence has an associated exchange bias, EB, field, the EB-induced degree of magnetization of the FM layer in the absence of an external magnetic field being within a range between 85% and 100%, and the angle ?opt, which is enclosed by the EB field direction and the magnetostriction direction, that has the maximum piezomagnetic coefficient in the absence of an external magnetic field, within a plane parallel to the AFM layer and the FM layer lies within a range between 10° and 80°.

Abstract: A method for measuring a time-variant magnetic field using a magnetoelectric sensor having mechanical resonant frequency fR, wherein the magnetic field has at least one component having harmonic time dependence with the measuring signal amplitude to be determined Hmess0 and the measuring signal frequency to be determined fmess in a known frequency interval fmin<fmess<fmax. The method includes: a. superimposing the magnetic field with a modulation magnetic field having harmonic time dependence with the known modulation amplitude Hmess0 and a selectable modulation frequency on the sensor, b. varying (wobbling) the modulation frequency over a complementary frequency interval determined by the known interval limits fmin, fmax and the resonant frequency of the sensor, c. measuring the sensor signal for each selected modulation frequency, d. searching for the at least one modulation frequency fmod, which results in a sensor signal in the mechanical resonance of the sensor, e.

Abstract: A method for the production of a structured metal layer (7) made from an alloy composed of titanium and nickel includes the following process steps: a sacrificial layer composite (3) is provided, which comprises a second sacrificial layer (2) applied onto a first sacrificial layer (1), the first sacrificial layer (1) is subjected for the purpose of structuring to a wet-chemical etching process in such a manner that undercutting of the sacrificial layer (1) occurs, a metal layer (7) of the alloy is applied indirectly or directly to the structured sacrificial layer composite (3). The first sacrificial layer (1) is at a greater distance from the metal layer (7). The second sacrificial layer (2) facing the metal layer (7) to be deposited is subjected to a dry etching process prior to wet-chemical etching of the first sacrificial layer (1) so that the second sacrificial layer (2) is provided with a structure that corresponds to the desired structure of the metal layer (7).

Abstract: A method is provided for applying a cover layer (9) to a net structure (4) to be used for medical purposes, in particular a thrombosis filter. The net structure (4) is applied to a planar substrate (1) that covers openings (5) of the net structure on one side, wherein the openings (5) across the uncovered side are filled with a sacrificial material (7), in particular copper. The net structure (4) is lifted from the substrate (1). A cover layer (9) is deposited on the surface previously covered by the substrate, and the sacrificial material (7) is removed.

Abstract: A method for producing a medical functional element having a self-supporting lattice structure which has interconnected webs. The method applies a first layer to the substrate layer, the first layer is structured by an etching process, the structured first layer is under-cut of a wet chemical etching process acting on the substrate layer, the substrate layer is removed in order to form the self-supporting lattice structure, a web constructional layer is applied to the first layer. The method is distinguished by the forming the first web attachment layer which has a smaller layer thickness than the web constructional layer and is intimately bonded to the web constructional layer in such a way that the web attachment layer, together with the web constructional layer, forms the webs of the self-supporting lattice structure.

Abstract: A method is provided for applying a cover layer (9) to a net structure (4) to be used for medical purposes, in particular a thrombosis filter. The net structure (4) is applied to a planar substrate (1) that covers openings (5) of the net structure on one side, wherein the openings (5) across the uncovered side are filled with a sacrificial material (7), in particular copper. The net structure (4) is lifted from the substrate (1). A cover layer (9) is deposited on the surface previously covered by the substrate, and the sacrificial material (7) is removed.