Abstract: A gas mixing system for a semiconductor wafer processing chamber is described. The mixing system may include a gas mixing chamber concentrically aligned with a gas transport tube that extends to a blocker plate. The gas mixing chamber and the transport tube are separated by a porous barrier that increases a duration of gas mixing in the gas mixing chamber before processes gases migrate into the transport tube. The system may also include a gas mixing insert having a top section with a first diameter and a second section with a second diameter smaller than the first diameter and concentrically aligned with the top section. The processes gases enter the top section of the insert and follow channels through the second section that cause the gases to mix and swirl in the gas mixing chamber. The second section extends into the gas mixing chamber while still leaving space for the mixing and swirling around the sidewalls and bottom of the mixing chamber.

Abstract: Embodiments of a vacuum chuck having an axisymmetrical and/or more uniform thermal profile are provided herein. In some embodiments, a vacuum chuck includes a body having a support surface for supporting a substrate thereupon; a plurality of axisymmetrically arranged grooves formed in the support surface, at least some of the grooves intersecting; and a plurality of chucking holes formed through the body and within the grooves, the chucking holes for fluidly coupling the grooves to a vacuum source during operation, wherein the chucking holes are disposed in non-intersecting portions of the grooves.

Abstract: A realtime power mask trigger generator for an instrument that acquires data in response to a trigger signal integrates power amplitudes over a defined bandwidth within a frequency spectrum for an input signal to produce an average signal power, and compares the average signal power with a specified reference power level for the defined bandwidth. Violation of the reference power level by the average signal power generates the trigger signal for acquiring data from the input signal about the trigger event by the instrument. The frequency spectrum may be divided into more than one defined frequency bandwidth, and each defined frequency bandwidth may have its own specified reference power level. The defined frequency bandwidths and associated reference power levels define a realtime power mask trigger.

Abstract: A modulation domain trigger generator demodulates a modulated input signal to a to extract information content, and a trigger is generated from the extracted information content in response to specified trigger criteria. The modulation domain trigger generator may be combined with a plurality of different types of trigger generators, including frequency domain and time domain trigger generators, to process the input signal in response to different trigger criteria to produce more than one trigger. The different trigger outputs may be combined to produce an acquisition trigger to acquire data surrounding an anomalous or identifiable event within the input signal.

Abstract: A realtime power mask trigger generator for an instrument that acquires data in response to a trigger signal integrates power amplitudes over a defined bandwidth within a frequency spectrum for an input signal to produce an average signal power, and compares the average signal power with a specified reference power level for the defined bandwidth. Violation of the reference power level by the average signal power generates the trigger signal for acquiring data from the input signal about the trigger event by the instrument. The frequency spectrum may be divided into more than one defined frequency bandwidth, and each defined frequency bandwidth may have its own specified reference power level. The defined frequency bandwidths and associated reference power levels define a realtime power mask trigger.

Abstract: A digital phosphor spectrum analyzer (DPSA) uses a fast rasterization and decay process to emulate the look and feel of an analog phosphor display while improving the ratio of waveform acquisition to non-acquisition time. Multiple acquisitions of complex digital data for an input signal being analyzed across a frequency span are accumulated in a raster memory at a waveform update rate to produce a composite waveform. A decay function is applied to the composite waveform to produce a display waveform. The display waveform is viewed on a display device at a display update rate, resulting in the ability to see otherwise unobservable frequency characteristics of the input signal.