Patents by Inventor Edward Yi Chang

Edward Yi Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130049070
    Abstract: A structure of high electron mobility transistor growth on Si substrate and the method thereof, in particular used for the semiconductor device manufacturing in the semiconductor industry. The UHVCVD system was used in the related invention to grow a Ge film on Si substrate then grow the high electron mobility transistor on the Ge film for the reduction of buffer layer thickness and cost. The function of the Ge film is preventing the formation of silicon oxide when growing III-V MHEMT structure in MOCVD system on Si substrate. The reason of using MHEMT in the invention is that the metamorphic buffer layer in MHEMT structure could block the penetration of dislocation which is formed because of the very large lattice mismatch (4.2%) between Ge and Si substrate.
    Type: Application
    Filed: July 30, 2012
    Publication date: February 28, 2013
    Inventors: Edward YI CHANG, Shih-Hsuan Tang, Yueh-Chin Lin
  • Publication number: 20120305991
    Abstract: A manufacturing method of a device having series-connected HEMTs is presented. Transistors are formed on a substrate and integratedly serial-connected as an integrated device by interconnection wires. Therefore, the voltage of the device is the sum of the voltages across each transistors so that the device can have high breakdown voltage.
    Type: Application
    Filed: August 14, 2012
    Publication date: December 6, 2012
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: EDWARD YI CHANG, HENG-TUNG HSU
  • Publication number: 20120298991
    Abstract: The present invention provides a method for forming a multilayer substrate having a gallium nitride layer, wherein a mesh layer having a plurality of openings is formed on a substrate, and a buffer layer, three aluminum gallium nitride layers with different aluminum concentrations and a gallium nitride layer are formed in sequence on the substrate in the openings. The three aluminum gallium nitride layers with different aluminum concentrations are capable of releasing stress, decreasing cracks on the surface of the gallium nitride layer and controlling interior defects, such that the present invention provides a gallium nitride layer with larger area, greater thickness, no cracks and high quality for facilitating the formation of high performance electronic components in comparison with the prior art. The present invention further provides a multilayer substrate having a gallium nitride layer.
    Type: Application
    Filed: August 9, 2012
    Publication date: November 29, 2012
    Applicant: National Chiao Tung University
    Inventors: Edward Yi Chang, Yu-Lin Hsiao, Jung-Chi Lu
  • Publication number: 20120238064
    Abstract: This invention discloses an enhancement-mode high-electron-mobility transistor and the manufacturing method thereof. The transistor comprises an epitaxial buffer layer on a substrate, a source and drain formed in the buffer layer, a PN-junction stack formed on the buffer layer and located between the source and drain, and a gate formed on the PN-junction stack, wherein the PN-junction stack is composed of alternating layers of a P-type semiconductor and an N-type semiconductor.
    Type: Application
    Filed: June 4, 2012
    Publication date: September 20, 2012
    Applicant: National Chiao Tung University
    Inventors: EDWARD YI CHANG, Chia-Hua Chang, Yueh-Chin Lin
  • Patent number: 8263425
    Abstract: The present invention provides a method for forming a multilayer substrate having a gallium nitride layer, wherein a mesh layer having a plurality of openings is formed on a substrate, and a buffer layer, three aluminum gallium nitride layers with different aluminum concentrations and a gallium nitride layer are formed in sequence on the substrate in the openings. The three aluminum gallium nitride layers with different aluminum concentrations are capable of releasing stress, decreasing cracks on the surface of the gallium nitride layer and controlling interior defects, such that the present invention provides a gallium nitride layer with larger area, greater thickness, no cracks and high quality for facilitating the formation of high performance electronic components in comparison with the prior art. The present invention further provides a multilayer substrate having a gallium nitride layer.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: September 11, 2012
    Assignee: National Chiao Tung University
    Inventors: Edward Yi Chang, Yu-Lin Hsiao, Jung-Chi Lu
  • Patent number: 8258606
    Abstract: A high frequency flip chip package substrate of a polymer is a one-layer structure packaged by a high frequency flip chip package process to overcome the shortcomings of a conventional two-layer structure packaged by the high frequency flip chip package process. The conventional structure not only incurs additional insertion loss and return loss in its high frequency characteristic, but also brings out a reliability issue. Thus, the manufacturing process of a ceramic substrate in the conventional structure still has the disadvantages of a poor yield rate and a high cost.
    Type: Grant
    Filed: April 13, 2011
    Date of Patent: September 4, 2012
    Inventors: Edward-yi Chang, Li-Han Hsu, Chee-Way Oh, Wei-Cheng Wu, Chin-te Wang
  • Publication number: 20120147640
    Abstract: A power circuit is applicable to a Direct Current (DC) to DC converter. The power circuit includes a gate driver circuit and a High Electron Mobility Transistor (HEMT). The gate driver circuit functions as a Sigmoid (S) function and controls a gate and a source of the HEMT with a cross voltage of the sigmoid (S) type function. Accordingly, an overall characteristic curve of the HEMT and the gate driver circuit is like a characteristic curve of a single rectifier diode, so as to achieve a rectifying, freewheeling, or reversing effect. In addition, since an energy loss is low when the HEMT is conducted, the energy loss of the whole power circuit is much less than that of a conventional diode.
    Type: Application
    Filed: January 26, 2011
    Publication date: June 14, 2012
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Edward Yi Chang, Shyr Long Jeng, Ming Tsan Peng
  • Patent number: 8169276
    Abstract: A vertical transmission structure for high frequency transmission lines includes a conductive axial core and a conductive structure surrounding the conductive axial core. The vertical transmission structure is applied to a high-frequency flip chip package for reducing the possibility of underfill from coming in contact with the conductive axial core.
    Type: Grant
    Filed: February 8, 2011
    Date of Patent: May 1, 2012
    Assignee: National Chiao Tung University
    Inventors: Edward Yi Chang, Wei-Cheng Wu, Ruey-Bing Hwang, Li-Han Hsu
  • Patent number: 8169002
    Abstract: A high electron mobility transistor includes a substrate, a buffer layer, a channel layer, a spacer layer, a schottky layer and a cap layer. The buffer layer is formed on the substrate. The channel layer is formed on the buffer layer, in which the channel layer comprises a superlattice structure formed with a plurality of indium gallium arsenide thin films alternately stacked with a plurality of indium arsenide thin films. The spacer layer is formed on the channel layer. The schottky layer is formed on the spacer layer. The cap layer is formed on the schottky layer.
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: May 1, 2012
    Assignee: National Chiao Tung University
    Inventors: Edward Yi Chang, Chien-I Kuo, Heng-Tung Hsu
  • Publication number: 20120098037
    Abstract: A manufacturing method of a device having series-connected HEMTs is presented. Transistors are formed on a substrate and integratedly serial-connected as an integrated device by interconnection wires. Therefore, the voltage of the device is the sum of the voltages across each transistors so that the device can have high breakdown voltage.
    Type: Application
    Filed: November 29, 2010
    Publication date: April 26, 2012
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: EDWARD YI CHANG, HENG-TUNG HSU
  • Publication number: 20120097968
    Abstract: The present invention provides a method for forming a multilayer substrate having a gallium nitride layer, wherein a mesh layer having a plurality of openings is formed on a substrate, and a buffer layer, three aluminum gallium nitride layers with different aluminum concentrations and a gallium nitride layer are formed in sequence on the substrate in the openings. The three aluminum gallium nitride layers with different aluminum concentrations are capable of releasing stress, decreasing cracks on the surface of the gallium nitride layer and controlling interior defects, such that the present invention provides a gallium nitride layer with larger area, greater thickness, no cracks and high quality for facilitating the formation of high performance electronic components in comparison with the prior art. The present invention further provides a multilayer substrate having a gallium nitride layer.
    Type: Application
    Filed: December 22, 2010
    Publication date: April 26, 2012
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: Edward Yi Chang, Yu-Lin Hsiao, Jung-Chi Lu
  • Publication number: 20120080760
    Abstract: The present invention discloses a dielectric structure, a transistor and a manufacturing method thereof with praseodymium oxide. The transistor with praseodymium oxide comprises at least a III-V substrate, a gate dielectric layer and a gate. The gate dielectric layer is disposed on the III-V substrate, and the gate is disposed on the gate dielectric layer, and the gate dielectric layer is praseodymium oxide (PrxOy), which has a high dielectric constant and a high band gap. By using the praseodymium oxide (Pr6O11) as the material of the gate dielectric layer in the present invention, the leakage current could be inhibited, and the equivalent oxide thickness (EOT) of the device with the III-V substrate could be further lowered.
    Type: Application
    Filed: December 13, 2010
    Publication date: April 5, 2012
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: Edward-Yi Chang, Yueh-Chin Lin
  • Publication number: 20120032279
    Abstract: A barrier layer, hafnium oxide layer, between a III-V semiconductor layer and an lanthanum oxide layer is used to prevent interaction between the III-V semiconductor layer and the lanthanum oxide layer. Meanwhile, the high dielectric constant of the lanthanum oxide can be used to increase the capacitance of the semiconductor device.
    Type: Application
    Filed: August 3, 2010
    Publication date: February 9, 2012
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: Edward Yi CHANG, Yueh-Chin LIN
  • Publication number: 20120025270
    Abstract: This invention discloses an enhancement-mode high-electron-mobility transistor and the manufacturing method thereof. The transistor comprises an epitaxial buffer layer on a substrate, a source and drain formed in the buffer layer, a PN-junction stack formed on the buffer layer and located between the source and drain, and a gate formed on the PN-junction stack, wherein the PN-junction stack is composed of alternating layers of a P-type semiconductor and an N-type semiconductor.
    Type: Application
    Filed: September 30, 2010
    Publication date: February 2, 2012
    Applicant: National Chiao Tung University
    Inventors: EDWARD YI CHANG, CHIA-HUA CHANG, YUEH-CHIN LIN
  • Patent number: 8033039
    Abstract: In a high frequency flip chip package process of a polymer substrate and a structure thereof, the structure is a one-layer structure packaged by a high frequency flip chip package process to overcome the shortcomings of a conventional two-layer structure packaged by the high frequency flip chip package process. The conventional structure not only incurs additional insertion loss and return loss in its high frequency characteristic, but also brings out a reliability issue. Thus, the manufacturing process of a ceramic substrate in the conventional structure still has the disadvantages of a poor yield rate and a high cost.
    Type: Grant
    Filed: August 26, 2009
    Date of Patent: October 11, 2011
    Assignee: National Chiao Tung University
    Inventors: Edward-yi Chang, Li-Han Hsu, Chee-Way Oh, Wei-Cheng Wu, Chin-te Wang
  • Patent number: 8034654
    Abstract: The method is disclosed that Si+ is implanted on Si substrate to enhance strain relaxation at the interface between the metamorphic GexSi1?x buffer layers and Si substrate, in order to facilitate the growth of a high quality Ge on Si substrate. And several GexSi1?x buffer layers (Si/Ge0.8Si0.2/Ge0.9Si0.1/Ge) are grown on top of Si substrate by UHVCVD. Then grow pure Ge layer of low dislocation density on GexSi1?x buffer layer. Finally, grow up high efficiency III-V solar cell on GexSi1?x buffer layer.
    Type: Grant
    Filed: August 4, 2009
    Date of Patent: October 11, 2011
    Assignee: National Chiao Tung University
    Inventors: Edward Yi Chang, Shih-Hsuan Tang, Yue-Cin Lin
  • Publication number: 20110239932
    Abstract: The present invention discloses a method to grow group III-nitride materials on a non-native substrate with much reduced threading dislocation (TD) density and smooth surface by using MBE. The first layer is to suppress the formation of screw TD while the second layer is to bend the propagation of edge TD. After that, the migration enhanced epitaxy (MEE) approach is used to smoothen the second layer surface before a main layer of group III-nitride is growth to the thickness required for different applications. All of these steps are performed in the MBE reactor by carefully control over the arrival rate and sequence of group III atoms and nitrogen radicals onto the sample substrate. By using reflective high energy electron diffraction (RHEED), the change of each layer's surface morphology can be monitored during the growth to achieve the high quality group III-nitride materials.
    Type: Application
    Filed: October 5, 2010
    Publication date: October 6, 2011
    Applicant: National Chiao Tung University
    Inventors: Edward Yi Chang, Yuen Yee Wong
  • Publication number: 20110186974
    Abstract: A high frequency flip chip package substrate of a polymer is a one-layer structure packaged by a high frequency flip chip package process to overcome the shortcomings of a conventional two-layer structure packaged by the high frequency flip chip package process. The conventional structure not only incurs additional insertion loss and return loss in its high frequency characteristic, but also brings out a reliability issue. Thus, the manufacturing process of a ceramic substrate in the conventional structure still has the disadvantages of a poor yield rate and a high cost.
    Type: Application
    Filed: April 13, 2011
    Publication date: August 4, 2011
    Inventors: Edward-yi Chang, Li-Han Hsu, Chee-Way Oh, Wei-Cheng Wu, Chin-te Wang
  • Publication number: 20110156100
    Abstract: A high electron mobility transistor includes a substrate, a buffer layer, a channel layer, a spacer layer, a schottky layer and a cap layer. The buffer layer is formed on the substrate. The channel layer is formed on the buffer layer, in which the channel layer comprises a superlattice structure formed with a plurality of indium gallium arsenide thin films alternately stacked with a plurality of indium arsenide thin films. The spacer layer is formed on the channel layer. The schottky layer is formed on the spacer layer. The cap layer is formed on the schottky layer.
    Type: Application
    Filed: April 13, 2010
    Publication date: June 30, 2011
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: Edward Yi Chang, Chien-I Kuo, Heng-Tung Hsu
  • Publication number: 20110146779
    Abstract: The present invention relates to a method for fabricating a sub-wavelength structure layer, including: forming a metal film on a passivation layer, an n-GaN layer or a transparent conductive oxide layer; performing thermal treatment to form self assembled metal nano particles; using the metal nano particles as a mask to remove a partial area of the passivation layer, the n-GaN layer or the transparent conductive oxide layer to form a sub-wavelength structure of which the cross-sectional area increases along the thickness direction of the passivation layer, the n-GaN layer or the transparent conductive oxide layer; and removing the metal nano particles. In addition, the present invention further provides the obtained sub-wavelength structure layer and a photoelectric conversion device using the same.
    Type: Application
    Filed: March 26, 2010
    Publication date: June 23, 2011
    Applicant: National Chiao Tung University
    Inventors: Edward Yi Chang, Kartika Chandra Sahoo, Men-Ku Lin, Yi-Yao Lu, Sheng-Ping Wang