Abstract: A MEMS device includes a first substrate and a second substrate that is disposed laminated on the first substrate and has a piezoelectric element on the first substrate side, in which the first substrate and the second substrate are substantially the same size, and in planar view, an end of the first substrate and an end of the second substrate are disposed at substantially the same position.

Abstract: Provided is a head including a channel formation substrate that is provided with a pressure generating chamber which communicates with a nozzle for ejecting a liquid, a piezo element, a driving circuit board that is bonded to the one surface side of the channel formation substrate, and a driving circuit for driving the piezo element. The piezo element and the driving circuit are electrically connected to each other via a bump which is provided on any one of the channel formation substrate and the driving circuit board. A holding portion that holds the piezo element is provided between the driving circuit board and the channel formation substrate. The holding portion is opened to an atmosphere through an atmosphere open passage which is provided to penetrate the driving circuit board in a direction in which the driving circuit board and the channel formation substrate are stacked.

Abstract: A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

Abstract: A piezoelectric device includes a deformation portion, a non-deformation portion which hinders deformation of the elastic layer, and a piezoelectric element. The deformation portion includes a first area in which the piezoelectric element is disposed, a third area adjacent to the non-deformation portion, and a second area disposed between the first area and the third area. In the first area, the elastic layer, an insulation layer, the lower electrode layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the second area, the elastic layer, the insulation layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the third area, the elastic layer and the upper electrode layer are sequentially stacked. The elastic layer is silicon oxide, and impurities are added to the upper electrode layer in the silicon oxide in the third area.

Abstract: An empty chamber component includes a pressure chamber formation substrate where a pressure chamber as an empty chamber is defined and a communication substrate bonded to the pressure chamber formation substrate. A piezoelectric element is provided on one side of the pressure chamber formation substrate. A flexible surface is located between the piezoelectric element and the pressure chamber. Empty portions are defined by the communication substrate closing recessed portions in the pressure chamber formation substrate. The empty portions are formed at positions where ends of the active section of the piezoelectric element pass through the empty portions in plan view.

Abstract: A liquid ejection head includes a vibration portion that serves as a wall of a pressure chamber having a shape extending in a first direction; at least one piezoelectric element that is disposed on the vibration portion at an opposite side to the pressure chamber; and an extracting portion that electrically connects the piezoelectric element to external wiring. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric material layer between the first electrode and the second electrode. In a plan view, the first electrode has a planar shape that is included in shapes of the second electrode and the pressure chamber, and the extracting portion protrudes from a peripheral edge of the first electrode so as to cross a long side of an inner peripheral edge extending in the first direction of the pressure chamber.

Abstract: A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

Abstract: The piezoelectric body is configured to have a layered structure such that a plurality of unit layers are stacked in a film thickness direction, and each of the unit layers is formed of a first layer on which the displacement is relatively easy to occur, and a second layer which has a high concentration of Zr as compared with the first layer. In addition, when composition ratio Ti/(Zr+Ti) of Zr to Ti in each of the first layer and the second layer is set as Cr1 and Cr2, the composition ratio of each layer is adjusted so as to satisfy the following conditions (1) to (3). 0.41?Cr1?0.81 ??(1) 0.1?Cr1?Cr2?0.

Abstract: Provided is a head including a channel formation substrate that is provided with a pressure generating chamber which communicates with a nozzle for ejecting a liquid; a piezo element that includes a first electrode which is provided on one surface side of a channel formation substrate, a piezoelectric layer which is provided on the first electrode, and a second electrode which is provided on the piezoelectric layer; and a driving circuit board that is bonded to the one surface side of the channel formation substrate via an adhesive layer, and is provided with a driving circuit for driving the piezo element, in which the piezo element and the driving circuit are electrically connected to each other via a bump which is provided on any one of the channel formation substrate and the driving circuit board, and in which the bump and the adhesive layer are provided above the piezoelectric layer of the piezo element.

Abstract: Provided is a manufacturing method of a head which includes a channel formation substrate having two piezoelectric actuator rows formed thereon, a driving circuit, and a driving circuit board which is provided with a first bump and a second bump. In the method, the first bump is provided on the outside of the piezoelectric actuator row, on the driving circuit board, an adhesive layer is provided on both sides of the first bump and the second bump, a first through hole and a second through hole are provided on the driving circuit board, a first connection wiring and a second connection wiring which are connected to the driving circuit are provided, and a first electrode of the piezoelectric actuator is electrically connected to the first connection wiring via the first bump and a second electrode is electrically connected to the second connection wiring via the second bump.

Abstract: A head includes a channel formation substrate having two piezoelectric actuator rows formed thereon, a driving circuit, and a driving circuit board which is provided with a first bump and a second bump, in which the first bump is provided on the outside of the piezoelectric actuator row, an adhesive layer is provided on both sides of the first bump and the second bump, a first through hole and a second through hole are provided on the driving circuit board, a first connection wiring and a second connection wiring are provided in the first through hole and the second through hole, and a first electrode of the piezoelectric actuator is electrically connected to a first connection wiring via the first bump and a second electrode is electrically connected to a second connection wiring via the second bump.

Abstract: Provided is a head including a channel formation substrate that is provided with a pressure generating chamber which communicates with a nozzle for ejecting a liquid, a piezo element, a driving circuit board that is bonded to the one surface side of the channel formation substrate, and a driving circuit for driving the piezo element. The piezo element and the driving circuit are electrically connected to each other via a bump which is provided on any one of the channel formation substrate and the driving circuit board. A holding portion that holds the piezo element is provided between the driving circuit board and the channel formation substrate. The holding portion is opened to an atmosphere through an atmosphere open passage which is provided to penetrate the driving circuit board in a direction in which the driving circuit board and the channel formation substrate are stacked.

Abstract: A liquid ejecting head includes a piezoelectric element that is disposed on a flow passage formation substrate, and discharges liquid from nozzle openings through the nozzle openings by pressurizing the liquid which fills the inside of a pressure generating chamber due to the displacement of a vibration film according to driving of the piezoelectric element, the piezoelectric element includes an insulating film formed on the vibration film, a first electrode film formed on the insulating film, a piezoelectric layer formed on the first electrode film, and a second electrode film formed on the piezoelectric layer, and the insulating film includes a lower insulating film formed on the vibration film and an upper insulating film which is formed on the lower insulating film with the same material as that of the lower insulating film, but has a different crystal structure.

Abstract: A liquid ejecting head includes a pressure chamber forming substrate that forms a pressure chamber filled with ink, a nozzle that ejects the ink in a Z direction along the pressure chamber forming substrate, and a communicating flow path that allows the pressure chamber to communicate with the nozzle, in which the communicating flow path includes a first flow path along a Y direction intersecting the Z direction.

Abstract: A liquid ejecting head includes a nozzle which ejects a liquid, a pressure chamber, a portion of which is partitioned by a flexible diaphragm and which communicates with the nozzle, a piezoelectric element which is laminated on an opposite side of the diaphragm from the pressure chamber and changes a pressure within the pressure chamber, and a reservoir which communicates with the pressure chamber, in which a valve mechanism is provided in a region which is distanced from a region in which the piezoelectric element of the diaphragm is laminated, and is configured to allow the liquid to flow from the reservoir side into the pressure chamber side while inhibiting the liquid from flowing out from the pressure chamber side to the reservoir side.

Abstract: At an area corresponding to a pressure chamber, the width of a lower electrode film in a nozzle row direction is narrower than the width of the pressure chamber in the same direction. A vibrating plate at the area corresponding to a pressure chamber includes an area P1, an area P2, and an area P3. The area P1 is an area on which the piezoelectric layer to be an activation portion is stacked. The area P2 is an area on which the piezoelectric layer to be an inactivation portion is stacked. The area P3 is an area on which the piezoelectric layer is not stacked. When the thicknesses of the vibrating plate at the areas P1, P2 and P3 are set to, respectively, t1, t2, and t3, the following expression is satisfied: t1>t2?t3 (1).

Abstract: A liquid ejection head includes a vibration portion that serves as a wall of a pressure chamber having a shape extending in a first direction; at least one piezoelectric element that is disposed on the vibration portion at an opposite side to the pressure chamber; and an extracting portion that electrically connects the piezoelectric element to external wiring. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric material layer between the first electrode and the second electrode. In a plan view, the first electrode has a planar shape that is included in shapes of the second electrode and the pressure chamber, and the extracting portion protrudes from a peripheral edge of the first electrode so as to cross a long side of an inner peripheral edge extending in the first direction of the pressure chamber.

Abstract: A piezoelectric element includes a vibration plate that has a first region that is allowed to flexurally deform and a second region that is at an outer side of the first region and that is inhibited from flexurally deforming, a piezoelectric element main body in which a lower electrode layer, a piezoelectric material layer, and an upper electrode layer are stacked in that order on the first region of the vibration plate, and a common metal layer stacked on the upper electrode layer, with a common close adherence layer interposed therebetween. A portion of the piezoelectric element main body extends into the second region.

Abstract: A piezoelectric element includes a vibrating plate which is formed of a first region in which a flexural deformation is allowed, and a second region in which the flexural deformation is inhibited. A piezoelectric element main body includes a lower electrode layer, a piezoelectric layer, and a higher electrode layer on the first region of the vibrating plate. A common metal layer is stacked on the higher electrode layer. A part of the piezoelectric element main body is extended to the second region, and an end portion of the piezoelectric layer is extended to the outside of an end portion of the higher electrode layer on the same side.

Abstract: A liquid ejecting head includes a pressure chamber substrate where a plurality of spaces to be a pressure chamber along a Y direction are formed in an X direction, a vibration plate that seals the space by being stacked in the pressure chamber substrate, and a piezoelectric element and a supporting unit that are stacked in the vibration plate on an opposite side to the pressure chamber substrate, in which positions at one end in the Y direction are different from each other in a first space and a second space among the plurality of spaces, and the supporting unit suppresses a vibration of the vibration plate by being formed so as to overlap with at least the one end side portion in the first space in a planar view.