Abstract: At an area corresponding to a pressure chamber, the width of a lower electrode film in a nozzle row direction is narrower than the width of the pressure chamber in the same direction. A vibrating plate at the area corresponding to a pressure chamber includes an area P1, an area P2, and an area P3. The area P1 is an area on which the piezoelectric layer to be an activation portion is stacked. The area P2 is an area on which the piezoelectric layer to be an inactivation portion is stacked. The area P3 is an area on which the piezoelectric layer is not stacked. When the thicknesses of the vibrating plate at the areas P1, P2 and P3 are set to, respectively, t1, t2, and t3, the following expression is satisfied: t1>t2?t3??(1).

Abstract: A piezoelectric device includes a deformation portion, a non-deformation portion which hinders deformation of the elastic layer, and a piezoelectric element. The deformation portion includes a first area in which the piezoelectric element is disposed, a third area adjacent to the non-deformation portion, and a second area disposed between the first area and the third area. In the first area, the elastic layer, an insulation layer, the lower electrode layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the second area, the elastic layer, the insulation layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the third area, the elastic layer and the upper electrode layer are sequentially stacked. The elastic layer is silicon oxide, and impurities are added to the upper electrode layer in the silicon oxide in the third area.

Abstract: A liquid ejecting head is provided. A lower electrode layer of the liquid ejecting head is divided into separate lower electrodes corresponding to respective pressure chamber spaces. An upper electrode layer is a continuous electrode. Each of the separate lower electrodes has (i) a wide portion whose width is smaller than the width of a pressure chamber space and (ii) a narrow portion whose width is smaller than the wide portion. The wide portion is positioned in a region that corresponds to the opening of the pressure chamber space and includes the center, when seen in the direction of the length of the pressure chamber space, of the pressure chamber space, and the narrow portion continuously extends from the wide portion to a region that corresponds to outside of the opening of the pressure chamber space in the direction of the length of the pressure chamber space.

Abstract: A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

Abstract: A piezoelectric element includes a vibrating plate which is formed of a first region in which a flexural deformation is allowed, and a second region in which the flexural deformation is inhibited. A piezoelectric element main body includes a lower electrode layer, a piezoelectric layer, and a higher electrode layer on the first region of the vibrating plate. A common metal layer is stacked on the higher electrode layer. A part of the piezoelectric element main body is extended to the second region, and an end portion of the piezoelectric layer is extended to the outside of an end portion of the higher electrode layer on the same side.

Abstract: A piezoelectric element includes a vibration plate that has a first region that is allowed to flexurally deform and a second region that is at an outer side of the first region and that is inhibited from flexurally deforming, a piezoelectric element main body in which a lower electrode layer, a piezoelectric material layer, and an upper electrode layer are stacked in that order on the first region of the vibration plate, and a common metal layer stacked on the upper electrode layer, with a common close adherence layer interposed therebetween. A portion of the piezoelectric element main body extends into the second region.

Abstract: A liquid ejecting head includes a pressure chamber substrate where a plurality of spaces to be a pressure chamber along a Y direction are formed in an X direction, a vibration plate that seals the space by being stacked in the pressure chamber substrate, and a piezoelectric element and a supporting unit that are stacked in the vibration plate on an opposite side to the pressure chamber substrate, in which positions at one end in the Y direction are different from each other in a first space and a second space among the plurality of spaces, and the supporting unit suppresses a vibration of the vibration plate by being formed so as to overlap with at least the one end side portion in the first space in a planar view.

Abstract: A liquid ejecting head includes a passage-forming substrate provided with a pressure-generating chamber communicating with a nozzle orifice for ejecting a liquid and includes a piezoelectric element including a diaphragm disposed on the passage-forming substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, and second electrode disposed on the piezoelectric layer. The diaphragm includes a metal oxide layer of a metal oxide formed by a gas-phase method and a zirconium oxide layer of zirconium oxide formed by a liquid-phase method.

Abstract: A liquid ejecting head includes a flow channel forming substrate having pressure generation chambers communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chambers, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer, the first electrode includes a taper section of which a width is gradually decreased toward the boundary from the active section side.

Abstract: A liquid ejecting head includes a pressure chamber forming substrate in which a plurality of spaces to be pressure chambers in communication with nozzles are provided side by side in a nozzle column direction, in which in a region corresponding to the pressure chamber, a lower electrode film is formed with a width of 50% or more and 80% or less of a width of the pressure chamber in the nozzle column direction and the piezoelectric body layer covers the lower electrode film in the nozzle column direction and is formed with a width of 90% or less of the width of the pressure chamber.

Abstract: A manufacturing method of a piezoelectric element includes forming an adhesive layer of a lead electrode on a piezoelectric element main body of a vibration plate, forming a metallic layer of the lead electrode on the adhesive layer, removing the metallic layer to leave the adhesive layer in a portion that corresponds to an extended electrode of the lead electrode using etching, patterning the remaining adhesive layer as individual extended electrodes that correspond to the piezoelectric element main body using etching, joining a protective substrate onto the vibration plate in a state in which the piezoelectric element main body is accommodated inside an accommodation hollow section and the extended electrode is positioned further on an outer side of the vibration plate than the protective substrate, layering and forming a section of the wiring on the protective substrate and the extended electrode, and patterning the wiring as individual wiring for each extended electrode using etching.

Abstract: A piezoelectric device including: a first electrode layer provided so as to overlie a substrate; a second electrode layer disposed so as to face the first electrode layer; and a piezoelectric layer disposed between the first electrode layer and the second electrode layer. The first electrode layer has a conductive layer and a barrier layer. The barrier layer is provided between the conductive layer and the piezoelectric layer so as to prevent the conductive layer from contacting the piezoelectric layer.

Abstract: A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

Abstract: A liquid ejecting head includes a nozzle which ejects a liquid, a pressure chamber, a portion of which is partitioned by a flexible diaphragm and which communicates with the nozzle, a piezoelectric element which is laminated on an opposite side of the diaphragm from the pressure chamber and changes a pressure within the pressure chamber, and a reservoir which communicates with the pressure chamber, in which a valve mechanism is provided in a region which is distanced from a region in which the piezoelectric element of the diaphragm is laminated, and is configured to allow the liquid to flow from the reservoir side into the pressure chamber side while inhibiting the liquid from flowing out from the pressure chamber side to the reservoir side.

Abstract: At an area corresponding to a pressure chamber, the width of a lower electrode film in a nozzle row direction is narrower than the width of the pressure chamber in the same direction. A vibrating plate at the area corresponding to a pressure chamber includes an area P1, an area P2, and an area P3. The area P1 is an area on which the piezoelectric layer to be an activation portion is stacked. The area P2 is an area on which the piezoelectric layer to be an inactivation portion is stacked. The area P3 is an area on which the piezoelectric layer is not stacked. When the thicknesses of the vibrating plate at the areas P1, P2 and P3 are set to, respectively, t1, t2, and t3, the following expression is satisfied: t1>t2?t3??(1).

Abstract: Piezoelectric elements each have a configuration in which a lower electrode film, a piezoelectric body layer, and an upper electrode film are stacked in order from a side relatively near to a displacement portion that defines a pressure chamber by tightly closing a portion of a pressure chamber space that forms the pressure chamber. The lower electrode film is provided individually for each pressure chamber. The upper electrode film covers the lower electrode film and the piezoelectric body layer, and is common to the piezoelectric elements. The ratio of a length (L) of a displacement portion-side opening of each pressure chamber space in a direction orthogonal to a pressure chamber space juxtaposition direction to a width (W) of the displacement portion-side opening in the pressure chamber space juxtaposition direction is greater than or equal to 4.3 and less than or equal to 6.0.

Abstract: A flow channel substrate has pressure chambers, and the pressure chambers communicate with nozzle openings for ejecting liquid. Each of piezoelectric elements on the flow channel substrate has a piezoelectric layer, a pair of electrodes, and a wiring layer coupled to the electrodes. The wiring layer has an adhesion layer and a conductive layer on the adhesion layer. The adhesion layer contains at least one selected from nickel, chromium, titanium, and tungsten. The piezoelectric element has an insulating film at least between the wiring layer and the electrodes. The wiring layer and the electrodes of the piezoelectric element are coupled via contact holes created through the insulating film.

Abstract: A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

Abstract: A liquid ejecting head includes a flow-path forming substrate including pressure generation chambers that communicate with nozzle openings through which ink is ejected, a piezoelectric element that applies a pressure to the pressure generation chambers via a diaphragm, and a protection substrate that forms a sealed space for sealing the piezoelectric element, in which a pressure in the sealed space is adjusted such that the diaphragm is drawn up to the piezoelectric element side and an initial bent position of the diaphragm is adjusted.

Abstract: At an area corresponding to a pressure chamber, the width of a lower electrode film in a nozzle row direction is narrower than the width of the pressure chamber in the same direction. A vibrating plate at the area corresponding to a pressure chamber includes an area P1, an area P2, and an area P3. The area P1 is an area on which the piezoelectric layer to be an activation portion is stacked. The area P2 is an area on which the piezoelectric layer to be an inactivation portion is stacked. The area P3 is an area on which the piezoelectric layer is not stacked. When the thicknesses of the vibrating plate at the areas P1, P2 and P3 are set to, respectively, t1, t2, and t3, the following expression is satisfied: t1>t2?t3??(1).