Abstract: The present invention is generally directed to fault detection and control methodologies for ion implant processes, and a system for performing same. In one illustrative embodiment, the method comprises performing a tuning process for an ion implant tool, the tuning process resulting in at least one tool parameter for the ion implant tool, selecting or creating a fault detection model for an ion implant process to be performed in the ion implant tool based upon the tool parameter resulting from the tuning process, and monitoring an ion implant process performed in the ion implant tool using the selected or created fault detection model.

Abstract: A method of brokering information in a manufacturing system comprising a broker coupled between a supplier of information and a consumer of information is set forth. The manufacturing system receives information from the supplier in a first format and sends information from the broker to the consumer in a second format. Additionally, a method of brokering fault detection and classification data in a manufacturing system which comprises providing a broker coupled between a supplier of fault detection and classification data and a consumer of fault detection and classification data is set forth. The manufacturing system receives fault detection and classification data from the supplier in a first format and sends fault detection and classification data from the broker to the consumer in a second format. Additionally, a manufacturing system which comprises a supplier of fault detection and classification data, a consumer of fault detection and classification data and a broker is set forth.

Abstract: A method for pre-positioning routed material in a computer controlled manufacturing arrangement having alternate locations for predetermined ones of a plurality of manufacturing process steps and predetermined types of materials to be routed into alternate locations. The method includes establishing a distribution of events indicative of the alternate locations at which material is processed for a manufacturing process step with respect to the materials to be routed and documenting the distribution of events in a database with respect to the type of materials to be routed and the alternate locations in terms of routing times, therein establishing a historical routing time for the type of material to be routed. In addition, there is established the actual mix of materials to be routed to the alternate locations and their historical routing time and actual routing time for the type of routed material are compared.