Patents by Inventor Eric Guiot
Eric Guiot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230411151Abstract: A method of fabricating a substrate for epitaxial growth of a layer of gallium nitride (GaN), aluminum gallium nitride (AlGaN) or indium gallium nitride (InGaN), comprises the following successive steps: providing a base substrate comprising at least one layer of single-crystal silicon carbide, performing epitaxial growth of a layer of semi-insulating SiC having a thickness larger than 1 ?m on the layer of single-crystal SiC to form a donor substrate, implanting ionic species into the layer of semi-insulating SiC so as to form a weakened region defining a thin layer of single-crystal semi-insulating SiC to be transferred, bonding the layer of semi-insulating SiC directly to a receiver substrate having a high electrical resistivity, and detaching the donor substrate along the weakened region so as to transfer the thin layer of single-crystal semi-insulating SiC to the receiver substrate.Type: ApplicationFiled: October 4, 2021Publication date: December 21, 2023Inventor: Eric Guiot
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Publication number: 20230411140Abstract: A method of producing a substrate for epitaxial growth of a gallium-based III-N alloy layer comprises the following consecutive steps: —providing a donor substrate of semi-insulating monocrystalline silicon carbide, —implanting ionic species in the donor substrate so as to form a zone of weakness defining a thin layer of semi-insulating monocrystalline SiC to be transferred, —bonding the donor substrate to a first receiving substrate by means of a bonding layer, —detaching the donor substrate along the zone of weakness so as to transfer the thin layer of semi-insulating monocrystalline SiC on to the first receiving substrate, —forming an additional layer of semi-insulating SiC on the transferred thin layer, —bonding the additional layer to a second receiving substrate having a high electrical resistivity, —removing at least a portion of the bonding layer so as to detach the first receiving substrate and expose the layer of transferred semi-insulating monocrystalline SiC.Type: ApplicationFiled: October 4, 2021Publication date: December 21, 2023Inventor: Eric Guiot
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Publication number: 20230374701Abstract: A method for producing a substrate for the epitaxial growth of a gallium-based III-N alloy layer comprises the following successive steps: —providing a donor substrate of single-crystal silicon carbide; —implanting ions in the donor substrate to form an embrittlement zone defining a thin film layer of single-crystal SiC; —bonding the donor substrate onto a first receiving substrate via a bonding layer; —detaching the donor substrate along the embrittlement zone to transfer the thin film of SiC onto the first receiving substrate; —epitaxially growing a layer of semi-insulating SiC having a thickness greater than 1 ?m on the thin film of SiC; —bonding the layer of semi-insulating SiC onto a second receiving substrate having a high electrical resistivity; —removing at least a portion of the bonding layer to detach the first receiving substrate; and —removing the transferred thin film of single-crystal SiC, to expose the semi-insulating SiC layer.Type: ApplicationFiled: October 4, 2021Publication date: November 23, 2023Inventor: Eric Guiot
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Publication number: 20230260841Abstract: A method of producing a composite structure comprising a thin layer of monocrystalline silicon carbide arranged on a carrier substrate of silicon carbide comprises: a) a step of provision of an initial substrate of monocrystalline silicon carbide, b) a step of epitaxial growth of a donor layer of monocrystalline silicon carbide on the initial substrate, to form a donor substrate, c) a step of ion implantation of light species into the donor layer, to form a buried brittle plane delimiting the thin layer, d) a step of formation of a carrier substrate of silicon carbide on the free surface of the donor layer, comprising a deposition at a temperature of between 400° C. and 1100° C., e) a step of separation along the buried brittle plane, to form the composite structure and the remainder of the donor substrate, and f) a step of chemical-mechanical treatment(s) of the composite structure.Type: ApplicationFiled: October 26, 2020Publication date: August 17, 2023Inventors: Ionut Radu, Hugo Biard, Christophe Maleville, Eric Guiot, Didier Landru
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Patent number: 11251321Abstract: An engineered substrate comprising: a seed layer made of a first semiconductor material for growth of a solar cell; a first bonding layer on the seed layer; a support substrate made of a second semiconductor material; a second bonding layer on a first side of the support substrate; a bonding interface between the first and second bonding layers; the first and second bonding layers each made of metallic material; wherein doping concentration and thickness of the engineered substrate, in particular, of the seed layer, the support substrate, and both the first and second bonding layers, are selected such that the absorption of the seed layer is less than 20%, preferably less than 10%, as well as total area-normalized series resistance of the engineered substrate is less than 10 mOhm·cm2, preferably less than 5 mOhm·cm2.Type: GrantFiled: January 27, 2017Date of Patent: February 15, 2022Assignees: Soitec, Commissariat A L'Energie Atomigue et aux Energies AlternativesInventors: Eric Guiot, Aurelie Tauzin, Thomas Signamarcheix, Emmanuelle Lagoutte
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Publication number: 20210193853Abstract: An engineered substrate comprising: a seed layer made of a first semiconductor material for growth of a solar cell; a first bonding layer on the seed layer; a support substrate made of a second semiconductor material; a second bonding layer on a first side of the support substrate; a bonding interface between the first and second bonding layers; the first and second bonding layers each made of metallic material; wherein doping concentration and thickness of the engineered substrate, in particular, of the seed layer, the support substrate, and both the first and second bonding layers, are selected such that the absorption of the seed layer is less than 20%, preferably less than 10%, as well as total area-normalized series resistance of the engineered substrate is less than 10 mOhm·cm2, preferably less than 5 mOhm·cm2.Type: ApplicationFiled: January 27, 2017Publication date: June 24, 2021Applicants: Soitec, Commissariat A L'Energie Atomique et aux Energies Alternatives, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Eric Guiot, Aurelie Tauzin, Thomas Signamarcheix, Emmanuelle Lagoutte
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Patent number: 10361326Abstract: This disclosure relates to a solar cell assembly structure for supporting a concentrator photovoltaic cell comprising a semiconducting structure and a diode, wherein the semiconducting structure comprises a first semiconducting region at least a part of which for placing the concentrator photovoltaic cell structure, and a second semiconducting region for realizing the diode within or on the second semiconducting region and wherein the part of the first semiconducting region for placing the concentrator photovoltaic cell structure and the second semiconducting region are not vertically overlapping.Type: GrantFiled: March 26, 2014Date of Patent: July 23, 2019Assignee: SoitecInventors: Cécile Aulnette, Rainer Krause, Frank Dimroth, Eric Guiot, Eric Mazaleyrat, Charlotte Drazek
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Patent number: 9954139Abstract: This disclosure is related to a manufacturing method for a plurality of photovoltaic cells comprising the steps of: obtaining a plurality of photovoltaic cells placed at a first distance from each other; attaching a stretching material to the plurality of photovoltaic cells; and stretching the stretching material such that the plurality of photovoltaic cells result at a second distance from each other, wherein the second distance is greater that the first distance.Type: GrantFiled: March 26, 2014Date of Patent: April 24, 2018Assignee: SOITECInventors: Rainer Krause, Cecile Aulnette, Eric Mazaleyrat, Frank Dimroth, Eric Guiot
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Publication number: 20160056318Abstract: This disclosure relates to a solar cell assembly structure for supporting a concentrator photovoltaic cell structure (3420), comprising a semiconducting structure and a diode, wherein the semiconducting structure comprises a first semiconducting region at least a part of which for placing the concentrator photovoltaic cell structure, and a second semiconducting region for realizing the diode within or on the second semiconducting region and wherein the part of the first semiconducting region for placing the concentrator photovoltaic cell structure and the second semiconducting region are not vertically overlapping.Type: ApplicationFiled: March 26, 2014Publication date: February 25, 2016Inventors: Cecile Aulnette, Rainer Krause, Frank Dimroth, Matthias Grave, Eric Guiot, Eric Mazaleyrat, Charlotte Drazek
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Publication number: 20160043254Abstract: This disclosure is related to a manufacturing method for a plurality of photovoltaic cells comprising the steps of: obtaining a plurality of photovoltaic cells placed at a first distance from each other; attaching a stretching material to the plurality of photovoltaic cells; and stretching the stretching material such that the plurality of photovoltaic cells result at a second distance from each other, wherein the second distance is greater that the first distance.Type: ApplicationFiled: March 26, 2014Publication date: February 11, 2016Inventors: Rainer Krause, Cecile Aulnette, Eric Mazaleyrat, Frank Dimroth, Eric Guiot
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Patent number: 9136113Abstract: A process for avoiding formation of an Si—SiO2—H2 environment during a dissolution treatment of a semiconductor-on-insulator structure that includes a carrier substrate, an oxide layer, a thin layer of a semiconductor material and a peripheral ring in which the oxide layer is exposed. This process includes encapsulating at least the exposed oxide layer of the peripheral ring with semiconductor material by performing a creep thermal treatment; and performing an oxide dissolution treatment to reduce part of the thickness of the oxide layer. In this process, the semiconductor material that encapsulates the oxide layer has a thickness before the oxide dissolution that is at least twice that of the oxide that is to be dissolved, thus avoiding formation of an Si—SiO2—H2 environment on the peripheral ring where the oxide layer would otherwise be exposed.Type: GrantFiled: October 2, 2013Date of Patent: September 15, 2015Assignee: SOITECInventors: Didier Landru, Fabrice Gritti, Eric Guiot, Oleg Kononchuk, Christelle Veytizou
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Publication number: 20140030877Abstract: A process for avoiding formation of a Si—SiO2—H2 environment during a dissolution treatment of a semiconductor-on-insulator structure that includes a carrier substrate, an oxide layer, a thin layer of semiconductor material and a peripheral ring in which the oxide layer is exposed. This process includes encapsulating at least the exposed oxide layer of the peripheral ring with semiconductor material by performing a creep thermal treatment; and performing an oxide dissolution treatment to reduce part of the thickness of the oxide layer. In this process, the semiconductor material that encapsulates the oxide layer has a thickness before the oxide dissolution that is at least twice that of the oxide that is to be dissolved, thus avoiding formation of a Si—SiO2—H2 environment on the peripheral ring where the oxide layer would otherwise be exposed.Type: ApplicationFiled: October 2, 2013Publication date: January 30, 2014Applicant: SOITECInventors: Didier LANDRU, Fabrice GRITTI, Eric GUIOT, Oleg KONONCHUK, Christelle VEYTIZOU
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Patent number: 8343850Abstract: A process for fabricating a substrate that includes a buried oxide layer for the production of electronic components or the like. The process includes depositing an oxide layer or a nitride layer on either of a donor or receiver substrate, and bringing the donor and receiver substrates into contact; conducting at least a first heat treatment of the oxide or nitride layer before bonding the substrates, and conducting a second heat treatment of the fabricated substrate of the receiver substrate, the oxide layer and all or part of the donor substrate at a temperature equal to or higher than the temperature applied in the first heat treatment. Substrates that have an oxide or nitride layer deposited thereon wherein the oxide or nitride layer is degassed and has a refractive index smaller than the refractive index of an oxide or nitride layer of the same composition formed by thermal growth.Type: GrantFiled: February 12, 2008Date of Patent: January 1, 2013Assignee: SoitecInventors: Eric Guiot, Fabrice Lallement
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Patent number: 8324072Abstract: A process for treating a semiconductor-on-insulator type structure that includes, successively, a support substrate, an oxide layer and a thin semiconductor layer. The process includes formation of a silicon nitride or silicon oxynitride mask on the thin semiconductor layer to define exposed areas at the surface of the layer which are not covered by the mask, and which are arranged in a desired pattern; and application of a heat treatment in a neutral or controlled reducing atmosphere and under controlled conditions of temperature and time to induce at least a portion of the oxygen of the oxide layer to diffuse through the thin semiconductor layer, thereby resulting in the controlled reduction in the oxide thickness in the areas of the oxide layer corresponding to the desired pattern. The mask is formed so as to be at least partially buried in the thickness of the thin semiconductor layer.Type: GrantFiled: September 21, 2009Date of Patent: December 4, 2012Assignee: SoitecInventors: Christelle Veytizou, Fabrice Gritti, Eric Guiot, Oleg Kononchuk, Didier Landru
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Publication number: 20120094496Abstract: A process for treating a semiconductor-on-insulator type structure that includes, successively, a support substrate, an oxide layer and a thin semiconductor layer. The process includes formation of a silicon nitride or silicon oxynitride mask on the thin semiconductor layer to define exposed areas at the surface of the layer which are not covered by the mask, and which are arranged in a desired pattern; and application of a heat treatment in a neutral or controlled reducing atmosphere and under controlled conditions of temperature and time to induce at least a portion of the oxygen of the oxide layer to diffuse through the thin semiconductor layer, thereby resulting in the controlled reduction in the oxide thickness in the areas of the oxide layer corresponding to the desired pattern. The mask is formed so as to be at least partially buried in the thickness of the thin semiconductor layer.Type: ApplicationFiled: September 21, 2009Publication date: April 19, 2012Inventors: Christelle Veytizou, Fabrice Gritti, Eric Guiot, Oleg Kononchuk, Didier Landru
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Publication number: 20110275226Abstract: The invention concerns a process to treat a structure of semiconductor-on-insulator type structure of a carrier substrate, an oxide layer and a thin layer of a semiconductor material, wherein the structure having a peripheral ring in which the oxide layer is exposed, and the process includes the application of a main thermal treatment in a neutral or controlled reducing atmosphere. The method includes a step to cover at least an exposed peripheral part of the oxide layer, prior to the main thermal treatment, this latter treatment being conducted under controlled time and temperature conditions so as to urge at least part of the oxygen in the oxide layer to diffuse through the thin semiconductor layer, leading to controlled reduction of the thickness of the oxide layer.Type: ApplicationFiled: December 30, 2009Publication date: November 10, 2011Inventors: Didier Landru, Fabrice Gritti, Eric Guiot, Oleg Kononchuk, Christelle Veytizou
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Publication number: 20110193201Abstract: The present invention notably concerns a method to fabricate and treat a structure of semiconductor-on-insulator type, successively comprising a carrier substrate (1), an oxide layer (3) and a thin layer (2) of semiconducting material, according to which: 1) a mask is formed on said thin layer (2) so as to define exposed regions (20), on the surface of said layer, which are not covered by the mask; 2) heat treatment is applied so as to urge at least part of the oxygen of the oxide layer (3) to diffuse through the thin layer (2), leading to controlled removal of the oxide in the regions (30) of the oxide layer (3) corresponding to the desired pattern; characterized in that said carrier substrate (1) and thin layer (2) are arranged relative to each other so that their crystal lattices, in a plane parallel to their interface (I), together form an angle called a “twist angle” of no more than 1°, and in a plane perpendicular to their interface (I) an angle called a “tilt angle” of no more than 1°, and in that a thType: ApplicationFiled: October 9, 2009Publication date: August 11, 2011Applicant: S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIESInventors: Oleg Kononchuk, Eric Guiot, Fabrice Gritti, Didier Landru, Christelle Veytizou
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Publication number: 20110183493Abstract: The present invention relates to a process for manufacturing a structure comprising a germanium layer (3) on a support substrate (1), characterised in that it comprises the following steps: (a) formation of an intermediate structure (10) comprising said support substrate (1), a silicon oxide layer (20) and said germanium layer (3), the silicon oxide layer (20) being in direct contact with the germanium layer (3), (b) application to said intermediate structure (10) of a heat treatment, in a neutral or reducing atmosphere, at a defined temperature and for a defined time, to diffuse at least part of the oxygen from the silicon oxide layer (20) through the germanium layer (3).Type: ApplicationFiled: June 12, 2009Publication date: July 28, 2011Applicant: S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIESInventors: Nicolas Daval, Oleg Kononchuk, Eric Guiot, Cecile Aulnette, Fabrice Lallement, Christophe Figuet, Didier Landru
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Publication number: 20100167500Abstract: A method for forming a semiconductor structure that includes a thin layer of semiconductor material on a receiver wafer is disclosed. The method includes removing a thickness of material from a donor wafer, which comprises a support substrate and an epitaxial layer, for surface preparation and transferring a portion of the epitaxial layer from the donor wafer to the receiver wafer. The thickness removed during the surface preparation is adapted to enable formation of a new semiconductor structure from the remaining epitaxial portion of the donor wafer.Type: ApplicationFiled: March 5, 2010Publication date: July 1, 2010Inventors: Nabil Chhaimi, Eric Guiot, Patrick Reynaud, Bruno Ghyselen, Cécile Aulnette, Bénédite Osternaud, Takeshi Akatsu, Yves-Matthieu Le Vaillant
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Publication number: 20100096733Abstract: A process for fabricating a substrate that includes a buried oxide layer for the production of electronic components or the like. The process includes depositing an oxide layer or a nitride layer on either of a donor or receiver substrate, and bringing the donor and receiver substrates into contact; conducting at least a first heat treatment of the oxide or nitride layer before bonding the substrates, and conducting a second heat treatment of the fabricated substrate of the receiver substrate, the oxide layer and all or part of the donor substrate at a temperature equal to or higher than the temperature applied in the first heat treatment. Substrates that have an oxide or nitride layer deposited thereon wherein the oxide or nitride layer is degassed and has a refractive index smaller than the refractive index of an oxide or nitride layer of the same composition formed by thermal growth.Type: ApplicationFiled: February 12, 2008Publication date: April 22, 2010Applicant: S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIESInventors: Eric Guiot, Fabrice Lallement