Patents by Inventor Eric J. Hoffmann

Eric J. Hoffmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heater assembly with purge gap control and temperature uniformity for batch processing chambers
    Patent number: 11818810
    Abstract: A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: November 14, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja, Vijay D. Parkhe
  • SHOWERHEAD PUMPING GEOMETRY FOR PRECURSOR CONTAINMENT
    Publication number: 20230008986
    Abstract: Gas injector with a vacuum channel having an inlet opening in the front face and an outlet opening in the back face of the injector are described. The vacuum channel comprises a first leg extending a first length from the inlet opening in the front face at a first angle relative to the front face and a second leg extending a second length from the first leg to the outlet opening in the back face at a second angle relative to the front face. Processing chambers and methods of use comprising a plurality of processing regions bounded around an outer peripheral edge by one or more vacuum channel. A first processing region has a first vacuum channel with a first outer diameter and a second processing region has a second vacuum channel with a second outer diameter, the first outer diameter being less than the second outer diameter.
    Type: Application
    Filed: July 11, 2022
    Publication date: January 12, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Prahallad Iyengar, Sanjeev Baluja, Kartik Shah, Chaowei Wang, Janisht Golcha, Eric J. Hoffmann, Joseph AuBuchon, Ashutosh Agarwal, Lin Sun, Cong Trinh
  • HEATER ASSEMBLY WITH PURGE GAP CONTROL AND TEMPERATURE UNIFORMITY FOR BATCH PROCESSING CHAMBERS
    Publication number: 20220312553
    Abstract: A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.
    Type: Application
    Filed: March 26, 2021
    Publication date: September 29, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja, Vijay D. Parkhe
  • APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPATIAL MULTI-SUBSTRATE PROCESSING TOOL
    Publication number: 20220106683
    Abstract: Apparatus and methods for loading and unloading substrates from a spatial processing chamber are described. A support assembly has a rotatable center base and support arms extending therefrom. A support shaft is at the outer end of the support arms and a substrate support is on the support shaft. Primary lift pins are positioned within openings in the substrate support. Secondary lift pins are positioned within openings in the support arms and are aligned with the primary lift pins. An actuation plate within the processing volume causes, upon movement of the support assembly, the primary lift pins to elevate through contact with the secondary lift pins.
    Type: Application
    Filed: October 1, 2020
    Publication date: April 7, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Sanjeev Baluja, Tejas Ulavi, Eric J. Hoffmann, Ashutosh Agarwal
  • Lift pin
    Patent number: D980884
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: March 14, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventor: Eric J. Hoffmann