Gas distribution plate

- Applied Materials, Inc.
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Description

FIG. 1 is a top-front isometric view of our new design for a gas distribution plate;

FIG. 2 is a top-rear isometric view of the gas distribution plate of FIG. 1;

FIG. 3 is a front view of the gas distribution plate of FIG. 1;

FIG. 4 is a rear view of the gas distribution plate of FIG. 1;

FIG. 5 is a left side view of the gas distribution plate of FIG. 1;

FIG. 6 is a right side view of the gas distribution plate of FIG. 1;

FIG. 7 is a top view of the gas distribution plate of FIG. 1; and,

FIG. 8 is a bottom view of the gas distribution plate of FIG. 1.

The portions of the gas distribution plate shown in broken line form no part of the claimed design.

Claims

The ornamental design for a gas distribution plate, as shown and described.

Referenced Cited
U.S. Patent Documents
144518 November 1873 Dunkelberger
2145263 January 1939 Huntzinger
4595484 June 17, 1986 Giammarco
D397275 August 25, 1998 DuBay, Sr.
5819434 October 13, 1998 Herchen
6027604 February 22, 2000 Lim
6037574 March 14, 2000 Lanham et al.
6117245 September 12, 2000 Mandrekar
6148761 November 21, 2000 Majewski
6379466 April 30, 2002 Sahin
6432259 August 13, 2002 Noorbakhsh
6444040 September 3, 2002 Herchen
6537419 March 25, 2003 Kinnard
D505590 May 31, 2005 Greiner
D524600 July 11, 2006 Austin
D548705 August 14, 2007 Hayashi
D553104 October 16, 2007 Oohashi
D587222 February 24, 2009 Sasaki
D589471 March 31, 2009 Komatsu
D601521 October 6, 2009 Komatsu
D609655 February 9, 2010 Sugimoto
7658800 February 9, 2010 Chen
D611300 March 9, 2010 Chen
D633452 March 1, 2011 Namiki
D654297 February 21, 2012 Lion
D655968 March 20, 2012 Lion
D664170 July 24, 2012 Chung et al.
D673005 December 25, 2012 Lion
D694790 December 3, 2013 Matsumoto
D697038 January 7, 2014 Matsumoto
D708651 July 8, 2014 Martin et al.
D716742 November 4, 2014 Jang
9023734 May 5, 2015 Chen
D741823 October 27, 2015 Tateno
D743531 November 17, 2015 Biagioli
D743532 November 17, 2015 Biagioli
D749906 February 23, 2016 Lee
D752202 March 22, 2016 Berkman
9353440 May 31, 2016 Ge et al.
9447499 September 20, 2016 Roy
D787458 May 23, 2017 Kim et al.
D791930 July 11, 2017 Rivera
D796458 September 5, 2017 Jang
D797690 September 19, 2017 Furutani et al.
D803802 November 28, 2017 Sasaki
D819580 June 5, 2018 Krishnan et al.
D825505 August 14, 2018 Hanson
D836572 December 25, 2018 Riker
D842450 March 5, 2019 Rivera
D851613 June 18, 2019 Johanson
D858192 September 3, 2019 Lo
10550472 February 4, 2020 Chuc
10876208 December 29, 2020 Chang
D911985 March 2, 2021 Nezu
D931240 September 21, 2021 Lee
D948658 April 12, 2022 Miller
11448977 September 20, 2022 Ramaswamy
11650019 May 16, 2023 Tsunoda
D1007449 December 12, 2023 Gunther
D1008986 December 26, 2023 Nakatani
20030170388 September 11, 2003 Shinriki et al.
20040031565 February 19, 2004 Su
20040129211 July 8, 2004 Blonigan
20050056218 March 17, 2005 Sun
20050150601 July 14, 2005 Srivastava
20080000419 January 3, 2008 Bender
20080173735 July 24, 2008 Mitrovic
20080178805 July 31, 2008 Paterson
20090159002 June 25, 2009 Bera
20090162260 June 25, 2009 Bera
20100307347 December 9, 2010 Menashes
20110073038 March 31, 2011 Chien
20120090691 April 19, 2012 Baluja
20120193456 August 2, 2012 Lubomirsky
20130306758 November 21, 2013 Park
20140017137 January 16, 2014 Sansegundo-Sanchez
20140151331 June 5, 2014 Todorow
20150345020 December 3, 2015 Tucker
20160083840 March 24, 2016 Rao
20160203952 July 14, 2016 Tucker
20170191159 July 6, 2017 Polyak et al.
20170365443 December 21, 2017 Carducci et al.
20180142352 May 24, 2018 Shah et al.
20190032211 January 31, 2019 Tucker
20190189401 June 20, 2019 Singh
20190226087 July 25, 2019 Zhang
20190304751 October 3, 2019 Park
20200030766 January 30, 2020 Lee
20210292898 September 23, 2021 Baluja
20230146837 May 11, 2023 Mustafa
20230407473 December 21, 2023 Mustafa
Foreign Patent Documents
306731322 August 2021 CN
306731322 August 2021 CN
D1640252 September 2019 JP
D1729409 November 2022 JP
300880638.0000 November 2016 KR
3012247600001 July 2023 KR
D147215 May 2012 TW
D165013 December 2014 TW
201610220 March 2016 TW
201834111 September 2018 TW
M576592 April 2019 TW
I680203 December 2019 TW
227498-0001 September 2023 TW
231180-0001 May 2024 TW
Other references
  • Research Gate [online] URL: https://www.researchgate.net/figure/Schematic-diagram-and-photo-of-the-gas-distributor-perforated-plate_fig2_324392177 (site visited: Dec. 28, 2023) (Year: 2017).
  • Capitol Area Technology [online] URL: https://www.capitolareatechnology.com/applied-materials-amat-0020-31343-gas-distribution-plate.html (site visited: Dec. 28, 2023 (Year: 2023).
  • Ebay [online] URL: https://www.ebay.com/itm/0020-03379-GAS-DISTRIBUTION-PLATE-APPLIED-MATERIALS-AMAT-/303638911045 (site visited: Dec. 28, 2023 (Year: 2022).
  • Cast Aluminum Solutions [online] URL: https://www.castaluminumsolutions.com/semiconductor-wafer-heaters/ (site visited: Dec. 28, 2023 (Year: 2023).
  • Cerameric [online] URL: https://www.cerameric.com/p-1650/Electrostatic-chuck.html (site visited: Dec. 28, 2023 (Year: 2021).
  • Semantic Scholar [online] URL: https://www.semanticscholar.org/paper/Influence-of-Gas-Flow-Rate-on-Liquid-Distribution-Llamas-Lesage/a352cba96e5f9a6ec2a1f4abfb0f006f1c907267 (site visited: Dec. 28, 2023 (Year: 2008).
Patent History
Patent number: D1037778
Type: Grant
Filed: Jul 19, 2022
Date of Patent: Aug 6, 2024
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Ashutosh Agarwal (San Jose, CA), Eric J. Hoffmann (San Francisco, CA), Dhritiman Subha Kashyap (Bangalore), Kartik Shah (Saratoga, CA), Amit Rajendra Sherekar (Bangalore), Sanjeev Baluja (Campbell, CA)
Primary Examiner: Michael C Stout
Assistant Examiner: Tia Ruth-Renee Polidori
Application Number: 29/846,787