Gas distribution plate
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Description
The portions of the gas distribution plate shown in broken line form no part of the claimed design.
Claims
The ornamental design for a gas distribution plate, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
144518 | November 1873 | Dunkelberger |
2145263 | January 1939 | Huntzinger |
4595484 | June 17, 1986 | Giammarco |
D397275 | August 25, 1998 | DuBay, Sr. |
5819434 | October 13, 1998 | Herchen |
6027604 | February 22, 2000 | Lim |
6037574 | March 14, 2000 | Lanham et al. |
6117245 | September 12, 2000 | Mandrekar |
6148761 | November 21, 2000 | Majewski |
6379466 | April 30, 2002 | Sahin |
6432259 | August 13, 2002 | Noorbakhsh |
6444040 | September 3, 2002 | Herchen |
6537419 | March 25, 2003 | Kinnard |
D505590 | May 31, 2005 | Greiner |
D524600 | July 11, 2006 | Austin |
D548705 | August 14, 2007 | Hayashi |
D553104 | October 16, 2007 | Oohashi |
D587222 | February 24, 2009 | Sasaki |
D589471 | March 31, 2009 | Komatsu |
D601521 | October 6, 2009 | Komatsu |
D609655 | February 9, 2010 | Sugimoto |
7658800 | February 9, 2010 | Chen |
D611300 | March 9, 2010 | Chen |
D633452 | March 1, 2011 | Namiki |
D654297 | February 21, 2012 | Lion |
D655968 | March 20, 2012 | Lion |
D664170 | July 24, 2012 | Chung et al. |
D673005 | December 25, 2012 | Lion |
D694790 | December 3, 2013 | Matsumoto |
D697038 | January 7, 2014 | Matsumoto |
D708651 | July 8, 2014 | Martin et al. |
D716742 | November 4, 2014 | Jang |
9023734 | May 5, 2015 | Chen |
D741823 | October 27, 2015 | Tateno |
D743531 | November 17, 2015 | Biagioli |
D743532 | November 17, 2015 | Biagioli |
D749906 | February 23, 2016 | Lee |
D752202 | March 22, 2016 | Berkman |
9353440 | May 31, 2016 | Ge et al. |
9447499 | September 20, 2016 | Roy |
D787458 | May 23, 2017 | Kim et al. |
D791930 | July 11, 2017 | Rivera |
D796458 | September 5, 2017 | Jang |
D797690 | September 19, 2017 | Furutani et al. |
D803802 | November 28, 2017 | Sasaki |
D819580 | June 5, 2018 | Krishnan et al. |
D825505 | August 14, 2018 | Hanson |
D836572 | December 25, 2018 | Riker |
D842450 | March 5, 2019 | Rivera |
D851613 | June 18, 2019 | Johanson |
D858192 | September 3, 2019 | Lo |
10550472 | February 4, 2020 | Chuc |
10876208 | December 29, 2020 | Chang |
D911985 | March 2, 2021 | Nezu |
D931240 | September 21, 2021 | Lee |
D948658 | April 12, 2022 | Miller |
11448977 | September 20, 2022 | Ramaswamy |
11650019 | May 16, 2023 | Tsunoda |
D1007449 | December 12, 2023 | Gunther |
D1008986 | December 26, 2023 | Nakatani |
20030170388 | September 11, 2003 | Shinriki et al. |
20040031565 | February 19, 2004 | Su |
20040129211 | July 8, 2004 | Blonigan |
20050056218 | March 17, 2005 | Sun |
20050150601 | July 14, 2005 | Srivastava |
20080000419 | January 3, 2008 | Bender |
20080173735 | July 24, 2008 | Mitrovic |
20080178805 | July 31, 2008 | Paterson |
20090159002 | June 25, 2009 | Bera |
20090162260 | June 25, 2009 | Bera |
20100307347 | December 9, 2010 | Menashes |
20110073038 | March 31, 2011 | Chien |
20120090691 | April 19, 2012 | Baluja |
20120193456 | August 2, 2012 | Lubomirsky |
20130306758 | November 21, 2013 | Park |
20140017137 | January 16, 2014 | Sansegundo-Sanchez |
20140151331 | June 5, 2014 | Todorow |
20150345020 | December 3, 2015 | Tucker |
20160083840 | March 24, 2016 | Rao |
20160203952 | July 14, 2016 | Tucker |
20170191159 | July 6, 2017 | Polyak et al. |
20170365443 | December 21, 2017 | Carducci et al. |
20180142352 | May 24, 2018 | Shah et al. |
20190032211 | January 31, 2019 | Tucker |
20190189401 | June 20, 2019 | Singh |
20190226087 | July 25, 2019 | Zhang |
20190304751 | October 3, 2019 | Park |
20200030766 | January 30, 2020 | Lee |
20210292898 | September 23, 2021 | Baluja |
20230146837 | May 11, 2023 | Mustafa |
20230407473 | December 21, 2023 | Mustafa |
306731322 | August 2021 | CN |
306731322 | August 2021 | CN |
D1640252 | September 2019 | JP |
D1729409 | November 2022 | JP |
300880638.0000 | November 2016 | KR |
3012247600001 | July 2023 | KR |
D147215 | May 2012 | TW |
D165013 | December 2014 | TW |
201610220 | March 2016 | TW |
201834111 | September 2018 | TW |
M576592 | April 2019 | TW |
I680203 | December 2019 | TW |
227498-0001 | September 2023 | TW |
231180-0001 | May 2024 | TW |
- Research Gate [online] URL: https://www.researchgate.net/figure/Schematic-diagram-and-photo-of-the-gas-distributor-perforated-plate_fig2_324392177 (site visited: Dec. 28, 2023) (Year: 2017).
- Capitol Area Technology [online] URL: https://www.capitolareatechnology.com/applied-materials-amat-0020-31343-gas-distribution-plate.html (site visited: Dec. 28, 2023 (Year: 2023).
- Ebay [online] URL: https://www.ebay.com/itm/0020-03379-GAS-DISTRIBUTION-PLATE-APPLIED-MATERIALS-AMAT-/303638911045 (site visited: Dec. 28, 2023 (Year: 2022).
- Cast Aluminum Solutions [online] URL: https://www.castaluminumsolutions.com/semiconductor-wafer-heaters/ (site visited: Dec. 28, 2023 (Year: 2023).
- Cerameric [online] URL: https://www.cerameric.com/p-1650/Electrostatic-chuck.html (site visited: Dec. 28, 2023 (Year: 2021).
- Semantic Scholar [online] URL: https://www.semanticscholar.org/paper/Influence-of-Gas-Flow-Rate-on-Liquid-Distribution-Llamas-Lesage/a352cba96e5f9a6ec2a1f4abfb0f006f1c907267 (site visited: Dec. 28, 2023 (Year: 2008).
Patent History
Patent number: D1037778
Type: Grant
Filed: Jul 19, 2022
Date of Patent: Aug 6, 2024
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Ashutosh Agarwal (San Jose, CA), Eric J. Hoffmann (San Francisco, CA), Dhritiman Subha Kashyap (Bangalore), Kartik Shah (Saratoga, CA), Amit Rajendra Sherekar (Bangalore), Sanjeev Baluja (Campbell, CA)
Primary Examiner: Michael C Stout
Assistant Examiner: Tia Ruth-Renee Polidori
Application Number: 29/846,787
Type: Grant
Filed: Jul 19, 2022
Date of Patent: Aug 6, 2024
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Ashutosh Agarwal (San Jose, CA), Eric J. Hoffmann (San Francisco, CA), Dhritiman Subha Kashyap (Bangalore), Kartik Shah (Saratoga, CA), Amit Rajendra Sherekar (Bangalore), Sanjeev Baluja (Campbell, CA)
Primary Examiner: Michael C Stout
Assistant Examiner: Tia Ruth-Renee Polidori
Application Number: 29/846,787
Classifications
Current U.S. Class:
D7/407;
D7/323;
Burner Or Heater Coil (D23/415);
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)