Abstract: An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis.

Abstract: An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly.

Abstract: An optional insertable feature to the trim or modulating member for ball-type valves limits the magnitude of fluid flow turbulence within the flow stream of the valve. This attenuates noise and cavitation caused by flow through the valve. The insert mounts into the interior of the trim member and presents two intersecting apertured surfaces. The apertures or holes are specially shaped, sized, and spaced to maximize flow efficiency and minimize fluid turbulence as a result of flow through ball-like valves. The size and orientation of the surfaces are such that they restrict and partition fluid flow through the valve to varying degrees at varying valve openings. Virtually all fluid is partitioned by being directed through the apertured plates during approximately the first 50 percent opening of the valve to minimize noise and cavitation, while insuring that the flow characteristic is a monotonic function between valve capacity and valve opening.