Abstract: Disclosed is an electronic locking device comprising at least one lock unit and a safety key (1) that is provided with at least one control circuit and a transmit and receive circuit which transmits the data signals to the control circuit of the other respective unit. At least one data carrier module (7) comprising an antenna (7a) is provided. The safety key (1) encompasses a mechanical part (3) that is provided with a head (12) and a shaft (4) comprising control areas (5). The data carrier module (7) is inserted into a recess (13, 14, 15) of the mechanical part (3). The safety key (1) is embodied in such a way that it can be or is fitted with at least one second data carrier module (8, 9) which is provided with an independent antenna (8a, 9a) and a frequency that is different from that of the data carrier module. The second data carrier module (8, 9) is or can be inserted into a pocket of a cap (2) which is placed upon the mechanical part (3).

Abstract: An apparatus for providing a return current path for RF current between a chamber wall and a substrate support is provided comprising a low impedance flexible curtain having a first end and a second end, the first end adapted to be electrically connected to the chamber wall and the second end adapted to be connected to the substrate support, wherein the curtain further comprises at least one fold in the curtain material, located an axial distance between the first end and the second end, and at least one perforation cut into the curtain proximate the second end.

Abstract: An apparatus for providing a return current path for RF current between a chamber wall and a substrate support is provided comprising a low impedance flexible curtain having a first end and a second end, the first end adapted to be electrically connected to the chamber wall and the second end adapted to be connected to the substrate support, wherein the curtain further comprises at least one fold in the curtain material, located an axial distance between the first end and the second end, and at least one perforation cut into the curtain proximate the second end.

Abstract: The rotary locking cylinder comprises a housing (5) and at least one rotor (8) provided with a key channel (27). Tumblers are provided to rotationally release the armature (8) with a key (17) associated therewith. A driver (6) is provided with at least one extension element (3) on the active part (2) of the rotary cylinder. Said extension element comprises a housing (24) and a rotatable insert (9). At least one extension element (3) is arranged on an outer side on the active part (2) at a distance from the driver (6). The key shank is extended in a manner which corresponds substantially to the length (A) of the extension element (3). Preferably, the rotatable insert (9) of the extension element (3) is profiled.

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.

Abstract: An apparatus and method for maintaining or adjusting the orientation of a large area substrate is disclosed by using multiple support plates disposed below a susceptor adapted to support the large area substrate. The multiple support plates are supported by a plurality of support shafts that are coupled to at least one actuator. The apparatus is designed to selectively adjust the horizontal cross-sectional profile of the susceptor to promote even and uniform processing. The horizontal profile may be one of planar, concave, or convex. The apparatus allows any adjustment to be made before, during, or after processing.

Abstract: The rotary locking cylinder has a stator with a rotor and with tumblers which are to be arranged in place for the rotary release of the rotor using an associated key. At least one core pin consists of at least one inner part and one outer part. The length of the outer part and the length of the associated housing pin together result in a length which is greater than a length of a hole in which the housing pin is mounted. The rotary locking cylinder also cannot be opened by means of the “bump technique”.

Abstract: A method and apparatus for masking portions of large area substrates during substrate processing are provided. A shadow frame assembly comprising a shadow frame and one or more mask panels is provided. The shadow frame assembly creates processing apertures that define multiple processing regions on a large area substrate.

Abstract: The locking cylinder has a basic code which can be changed using at least one change key (17, 17?). A rotor (3) is mounted in a cylinder housing (2a, 2b) and has a keyway (4) into which a shank of a standard key which is provided with control surfaces 18 can be pushed in order to position the tumblers which are arranged in three first rows (A, B, C). Further tumblers have coding elements (13) which are arranged in further bores in the cylinder housing (2a, 2b) in a programming position of the rotor (3). The change key (17, 17?) interacts with three further rows (D, E, F) of tumblers in the programming position, these tumblers being arranged in slides. These further rows (D, E, F) each contain tumblers having coding elements (C). The locking cylinder can be produced with a smaller outside diameter and be installed in a particularly cost-effective manner.

Abstract: The safety key has a shank (6) which is provided with a plurality of control surfaces (7) for properly positioning tumblers and has a front end and a rear end (6a, 6b). At a front end (4a), the rotor (4) of the associated locking cylinder (2) has at least one further control surface (8), which interacts with a further control surface (9) arranged at the rear end (6b) of the shank (5). The safety key is backward compatible and is relatively difficult to copy.

Abstract: Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon an upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention.

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: An apparatus for providing a return current path for RF current between a chamber wall and a substrate support is provided comprising a low impedance flexible curtain having a first end and a second end, the first end adapted to be electrically connected to the chamber wall and the second end adapted to be connected to the substrate support, wherein the curtain further comprises at least one fold in the curtain material, located an axial distance between the first end and the second end, and at least one perforation cut into the curtain proximate the second end.

Abstract: A method of flexibly mounting a gas distribution plate to the back wall of a gas inlet manifold for a plasma chamber. A perforated gas distribution plate is suspended from the back wall by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate.

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.

Abstract: The safety key has a shank (6) which is provided with a plurality of control surfaces (7) for properly positioning tumblers and has a front end and a rear end (6a, 6b). At a front end (4a), the rotor (4) of the associated locking cylinder (2) has at least one further control surface (8), which interacts with a further control surface (9) arranged at the rear end (6b) of the shank (5). The safety key is backward compatible and is relatively difficult to copy.

Abstract: The rotary locking cylinder comprises a housing (5) and at least one rotor (8) provided with a key channel (27). Tumblers are provided to rotationally release the armature (8) with a key (17) associated therewith. A driver (6) is provided with at least one extension element (3) on the active part (2) of the rotary cylinder. Said extension element comprises a housing (24) and a rotatable insert (9). At least one extension element (3) is arranged on an outer side on the active part (2) at a distance from the driver (6). The key shank is extended in a manner which corresponds substantially to the length (A) of the extension element (3). Preferably, the rotatable insert (9) of the extension element (3) is profiled.