Abstract: The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: The invention relates to a built-in safety device comprising a housing (3) and a rotor (4) mounted therein. Tumblers (8) are mounted in the housing (3) and in the rotor (4). The maximal length (A) of the built-in safety device (1) is approximately 40 mm, and the effective part (2c) of the key (2) is essentially as long as the rotor (4). In addition, the rotor (4) is constructed as one piece and can be operated from both sides thereof. The inventive built in safety device can be installed in a mortise lock more easily than a cross-key bit safety device and permits the production of a locking system.

Abstract: The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.

Abstract: Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon an upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention.

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: The lock bolt has a bolt tip (2) a bolt head (3) whose back wall (4) is intended to rest against a housing pin for sliding this pin into the rotary closure cylinder (24). The bolt tip (2) is supported on the bolt head (3) with a spring engaged between the bolt tip (2) and the bolt head (3) so that it can slide in a limited fashion between an inner and an outer position. The bolt head (3) has a longitudinal bore (5) in which the bolt tip (2) is supported so that it can slide. The lock bolt to a large extent prevents unlocking attempts in which vibrational movements are exerted on the tumblers.

Abstract: A safety lock comprises a spring-loaded tumbler (4) which is arranged in a twistlock cylinder (1) and which is provided with a rotor pin (12) and a housing pin (2) which are arranged in order, for the rotational release of the rotor (3), by means of an insertable key introduced into a keyway (22) of the twistlock cylinder (1). A blocking member (5), which follows the housing pin (9) in the event of an attempt to unlock the lock, has a part (11) which is guided displaceably in the housing pin (9) and which is connected magnetically to the rotor pin (12).

Abstract: The rotary locking cylinder described has a stationary part (2) and a rotating part (3) plus several tumblers (8) each with a core pin (10) and a housing pin (9). Mounted in the rotating part (3) is at least one locking element (22) which can be displaced approximately at right angles to the core pin (10) of a tumbler (8) and in its position of rest engages in a recess (20) in the stationary part (2). The recess (20) in the stationary part (2) has a control surface (19) designed so that, when the unlocked stationary part (2) is rotated, the locking element (22) is moved towards the core pin (10).

Abstract: A key and an installation double cylinder for a security lock is disclosed with two cylinder halves, a cylinder core and tumblers which are constructed as core pins and housing pins and can be brought into line by means of the key, which can be inserted into the keyway to release the cylinder core for rotation. The key has, at its bit, a lengthening element by which the tumblers in an oppositely located cylinder half can be brought into line for free turning. The cylinder half on the outside of the door can have a solid rotor of hardened steel which protects the cylinder half on the inside.

Abstract: The rotary locking cylinder has a housing with a longitudinal bore hole in which a rotor is inserted. In the lower region of the bore hole, a groove-shaped recess is worked into the housing, a blocking insert being inserted into this recess. This blocking insert projects into the key groove and prevents the rotor from being turned by force so as to shear off the tumbler pins. When employing unauthorized opening methods, the blocking insert must be held against the repelling force of spring elements in an inactive position, which substantially impedes such unauthorized methods or even renders them impossible.

Abstract: A rotary locking cylinder for a safety lock has a housing and a crosspiece. A recess is incorporated in the crosspiece from the top, a locking element being inserted into this recess. The recess connects an upper outer side of the crosspiece with a transverse bore hole in an arm of the crosspiece. In the assembled state, the crosspiece is inserted into a recess of the cylinder pocket and connected with a transverse pin. In order to secure the transverse pin against longitudinal displacement in the cylinder pocket, this transverse pin has a circumferential groove in which the locking element engages from above. In order to exchange the crosspiece, the rotary locking cylinder is rotated about its longitudinal axis in such a way that the cylinder pocket is on top. During rotation, the locking element falls downward due to the force of gravity and releases the transverse pin.

Abstract: The invention is directed to a web which has a plurality of parts extending in the longitudinal direction of the web and placed against each other. These parts may be stamped sheet metal parts or cast parts, which can be produced in a very cost-effective manner. Two outer parts can form a shell, into which a stamped interior part of steel has been inserted. These two parts can be produced cost-effectively as cast parts, for example of zinc, aluminum or a plastic material, and the interior part (12) can be produced as a stamped sheet metal part. The invention permits a particularly cost-effective production of the web and in bending tests was shown to be particularly stable.

Abstract: A key and rotary cylinder for a safety lock are disclosed. The key has in its shank a continuous bore hole in which two opposite control elements are supported. These control elements are movable inwardly against the restoring force of a pressure spring arranged in the bore hole. An additional tumbler is lifted by a control element when the key is inserted into a key slot of the rotary locking cylinder. This additional tumbler engages in a recess of the stator. When using a key without a control element, the rotor is blocked by means of the tumbler. When using a key according to the invention, the rotor can be turned and the tumbler is lifted out of the recess and the control element is moved inward radially. After turning by 90.degree., for example, a counterpin of the stator is brought into line by the tumbler. In the absence of a control element, the rotor is blocked by the counterpin in this case as well.

Abstract: An additional tumbler (10) is disposed in the rotary lock cylinder, which is aligned by means of a control element (19) disposed in the key (16). A blocking element (6) is provided in the stator (2) at a distance from this tumbler (10) which, in a set rotational position of the rotor (3), radially displaces the control element (19) with the core pin (13) of the additional tumbler (10) against a restoring force.

Abstract: A lock system has lock cylinders (5) in which the rotor (9) is lodged as usual in the cylinder housing, (11) as well as lock cylinders (6) in which the rotor (10) is rotated through 180.degree. about its longitudinal axis relative to the other rotors (9). The security keys for the lock system are flat keys and not turning keys and, in the event that these are priority keys, have two completely independent key codes. The invention also provides a further possibility for increasing the number of variations of the lock and thus for increasing its security.

Abstract: The spring loaded tumbler is provided with a casing and a core. Latter has a limited travel towards the key passage, and is located in a stepped drilling in the cylindrical core. A sliding sleeve element is located on the core, which has a corresponding shape to that of the stepped drilling. The tumbler according to the present invention can be inserted in normal cylinder locks and effectively prevents unauthorized opening without the use of a key or damage to the lock.

Abstract: A DIP tube loader and handler including magazine for containing a quantity of empty DIP packaging tubes, a tube singulating mechanism for positioning the tubes one at a time into a position to be loaded with DIPs, a DIP singulating mechanism for loading a predetermined number of DIPs into the tubes, and a tube elevator for transporting the loaded tubes from the loading position into a hopper.

Abstract: An improved DIP lead trimming apparatus including a base having an inclined upper surface which supports an input rail, an output rail, a singulator mechanism, an adaptable cutter assembly and stop assembly, and a DIP lifter assembly for lifting a trimmed DIP from a position above the cutter assembly to the output rail.