Patents by Inventor Eugene P. Marsh

Eugene P. Marsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190240636
    Abstract: Compositions, devices, methods and systems are provided for differential functionalization of a surface of a structure to support biopolymer synthesis. Provided herein are processes which include use of lamps, lasers, and/or microcontact printing to add functional groups to surfaces for the efficient and uniform synthesis of oligonucleic acids.
    Type: Application
    Filed: April 15, 2019
    Publication date: August 8, 2019
    Inventors: Bill James PECK, Pierre INDERMUHLE, Eugene P. MARSH, Andres FERNANDEZ, David STERN
  • Patent number: 10374156
    Abstract: A method of forming a metal chalcogenide material. The method comprises introducing a metal precursor and a chalcogenide precursor into a chamber, and reacting the metal precursor and the chalcogenide precursor to form a metal chalcogenide material on a substrate. The metal precursor is a carboxylate of an alkali metal, an alkaline earth metal, a transition metal, a post-transition metal, or a metalloid. The chalcogenide precursor is a hydride, alkyl, or aryl precursor of sulfur, selenium, or tellurium or a silylhydride, silylalkyl, or silylaryl precursor of sulfur, selenium, or tellurium. Methods of forming a memory cell including the metal chalcogenide material are also disclosed, as are memory cells including the metal chalcogenide material.
    Type: Grant
    Filed: October 25, 2016
    Date of Patent: August 6, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Eugene P. Marsh, Stefan Uhlenbrock
  • Patent number: 10283705
    Abstract: Memory cells are disclosed, which cells include a cell material and an ion-source material over the cell material. A discontinuous interfacial material is included between the cell material and the ion-source material. Also disclosed are fabrication methods and semiconductor devices including the disclosed memory cells.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: May 7, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Timothy A. Quick, Eugene P. Marsh, Stefan Uhlenbrock, Chet E. Carter, Scott E. Sills
  • Publication number: 20190118154
    Abstract: Devices for the manufacturing of high-quality building blocks, such as oligonucleotides, are described herein. Nano-scale devices allow for selective control over reaction conditions. Further, methods and devices described herein allow for the rapid construction of large libraries of highly accurate nucleic acids.
    Type: Application
    Filed: October 19, 2018
    Publication date: April 25, 2019
    Inventors: Eugene P. MARSH, Pierre F. INDERMUHLE, Bill James PECK
  • Publication number: 20190051823
    Abstract: Memory cells are disclosed, which cells include a cell material and an ion-source material over the cell material. A discontinuous interfacial material is included between the cell material and the ion-source material. Also disclosed are fabrication methods and semiconductor devices including the disclosed memory cells.
    Type: Application
    Filed: October 15, 2018
    Publication date: February 14, 2019
    Inventors: Timothy A. Quick, Eugene P. Marsh, Stefan Uhlenbrock, Chet E. Carter, Scott E. Sills
  • Patent number: 10153431
    Abstract: Resistive memory having confined filament formation is described herein. One or more method embodiments include forming an opening in a stack having a silicon material and an oxide material on the silicon material, and forming an oxide material in the opening adjacent the silicon material, wherein the oxide material formed in the opening confines filament formation in the resistive memory cell to an area enclosed by the oxide material formed in the opening.
    Type: Grant
    Filed: July 27, 2017
    Date of Patent: December 11, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Eugene P. Marsh, Jun Liu
  • Publication number: 20180254413
    Abstract: Some embodiments include methods utilizing atomic layer deposition to form material containing silicon and nitrogen (e.g., silicon nitride). The atomic layer deposition uses SiI4 as one precursor and uses a nitrogen-containing material as another precursor. Some embodiments include methods of forming a structure in which a chalcogenide region is formed over a semiconductor substrate; and in which SiI4 is used as a precursor during formation of silicon nitride material directly against a surface of the chalcogenide region.
    Type: Application
    Filed: May 4, 2018
    Publication date: September 6, 2018
    Applicant: Micron Technology, Inc.
    Inventor: Eugene P. Marsh
  • Publication number: 20180236425
    Abstract: Devices and methods for de novo synthesis of large and highly accurate libraries of oligonucleic acids are provided herein. Devices include structures having a main channel and microchannels, where the microchannels have a high surface area to volume ratio. Devices disclosed herein provide for de novo synthesis of oligonucleic acids having a low error rate.
    Type: Application
    Filed: April 23, 2018
    Publication date: August 23, 2018
    Inventors: William BANYAI, Bill James PECK, Andres FERNANDEZ, Siyuan CHEN, Pierre INDERMUHLE, Eugene P. MARSH
  • Publication number: 20180198063
    Abstract: Memory cells are disclosed, which cells include a cell material and an ion-source material over the cell material. A discontinuous interfacial material is included between the cell material and the ion-source material. Also disclosed are fabrication methods and semiconductor devices including the disclosed memory cells.
    Type: Application
    Filed: March 8, 2018
    Publication date: July 12, 2018
    Inventors: Timothy A. Quick, Eugene P. Marsh, Stefan Uhlenbrock, Chet E. Carter, Scott E. Sills
  • Patent number: 9981239
    Abstract: Devices and methods for de novo synthesis of large and highly accurate libraries of oligonucleic acids are provided herein. Devices include structures having a main channel and microchannels, where the microchannels have a high surface area to volume ratio. Devices disclosed herein provide for de novo synthesis of oligonucleic acids having a low error rate.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: May 29, 2018
    Assignee: TWIST BIOSCIENCE CORPORATION
    Inventors: William Banyai, Bill James Peck, Andres Fernandez, Siyuan Chen, Pierre Indermuhle, Eugene P. Marsh
  • Patent number: 9978937
    Abstract: Some embodiments include methods utilizing atomic layer deposition to form material containing silicon and nitrogen (e.g., silicon nitride). The atomic layer deposition uses Sil4 as one precursor and uses a nitrogen-containing material as another precursor. Some embodiments include methods of forming a structure in which a chalcogenide region is formed over a semiconductor substrate; and in which Sil4 is used as a precursor during formation of silicon nitride material directly against a surface of the chalcogenide region.
    Type: Grant
    Filed: May 13, 2016
    Date of Patent: May 22, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Eugene P. Marsh
  • Publication number: 20180126355
    Abstract: Compositions, devices, methods and systems are provided for differential functionalization of a surface of a structure to support biopolymer synthesis. Provided herein are processes which include use of lamps, lasers, and/or microcontact printing to add functional groups to surfaces for the efficient and uniform synthesis of oligonucleic acids.
    Type: Application
    Filed: January 2, 2018
    Publication date: May 10, 2018
    Inventors: Bill James PECK, Pierre INDERMUHLE, Eugene P. MARSH, Andres FERNANDEZ, David STERN
  • Publication number: 20180104664
    Abstract: Methods, devices and systems are provided herein for surfaces for de novo polynucleotide synthesis that provide for increased polynucleotide yield. Surfaces described herein comprise a texture that increases surface area provide for increased polynucleotide yield compared to non-textured surfaces. In addition, the patterned placement of nucleoside coupling reagent spanning such surfaces provides for improved synthesis yield, representation, and a reduction in contamination on the surface between different polynucleotide species.
    Type: Application
    Filed: December 7, 2017
    Publication date: April 19, 2018
    Inventors: Andres FERNANDEZ, Pierre INDERMUHLE, Eugene P. MARSH, William BANYAI, Bill James PECK
  • Patent number: 9935264
    Abstract: Memory cells are disclosed, which cells include a cell material and an ion-source material over the cell material. A discontinuous interfacial material is included between the cell material and the ion-source material. Also disclosed are fabrication methods and semiconductor devices including the disclosed memory cells.
    Type: Grant
    Filed: April 2, 2015
    Date of Patent: April 3, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Timothy A. Quick, Eugene P. Marsh, Stefan Uhlenbrock, Chet E. Carter, Scott E. Sills
  • Patent number: 9895673
    Abstract: Compositions, devices, methods and systems are provided for differential functionalization of a surface of a structure to support biopolymer synthesis. Provided herein are processes which include use of lamps, lasers, and/or microcontact printing to add functional groups to surfaces for the efficient and uniform synthesis of oligonucleic acids.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: February 20, 2018
    Assignee: TWIST BIOSCIENCE CORPORATION
    Inventors: Bill James Peck, Pierre Indermuhle, Eugene P. Marsh, Andres Fernandez, David Stern
  • Publication number: 20170324034
    Abstract: Resistive memory having confined filament formation is described herein. One or more method embodiments include forming an opening in a stack having a silicon material and an oxide material on the silicon material, and forming an oxide material in the opening adjacent the silicon material, wherein the oxide material formed in the opening confines filament formation in the resistive memory cell to an area enclosed by the oxide material formed in the opening.
    Type: Application
    Filed: July 27, 2017
    Publication date: November 9, 2017
    Inventors: Eugene P. Marsh, Jun Liu
  • Patent number: 9722178
    Abstract: Resistive memory having confined filament formation is described herein. One or more method embodiments include forming an opening in a stack having a silicon material and an oxide material on the silicon material, and forming an oxide material in the opening adjacent the silicon material, wherein the oxide material formed in the opening confines filament formation in the resistive memory cell to an are enclosed by the oxide material formed in the opening.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: August 1, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Eugene P. Marsh, Jun Liu
  • Publication number: 20170151546
    Abstract: Compositions, devices, methods and systems are provided for differential functionalization of a surface of a structure to support biopolymer synthesis. Provided herein are processes which include use of lamps, lasers, and/or microcontact printing to add functional groups to surfaces for the efficient and uniform synthesis of oligonucleic acids.
    Type: Application
    Filed: November 30, 2016
    Publication date: June 1, 2017
    Inventors: Bill James PECK, Pierre INDERMUHLE, Eugene P. MARSH, Andres FERNANDEZ, David STERN
  • Patent number: 9627442
    Abstract: Horizontally oriented and vertically stacked memory cells are described herein. One or more method embodiments include forming a vertical stack having a first insulator material, a first memory cell material on the first insulator material, a second insulator material on the first memory cell material, a second memory cell material on the second insulator material, and a third insulator material on the second memory cell material, forming an electrode adjacent a first side of the first memory cell material and a first side of the second memory cell material, and forming an electrode adjacent a second side of the first memory cell material and a second side of the second memory cell material.
    Type: Grant
    Filed: April 26, 2016
    Date of Patent: April 18, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Timothy A. Quick, Eugene P. Marsh
  • Publication number: 20170040533
    Abstract: A method of forming a metal chalcogenide material. The method comprises introducing a metal precursor and a chalcogenide precursor into a chamber, and reacting the metal precursor and the chalcogenide precursor to form a metal chalcogenide material on a substrate. The metal precursor is a carboxylate of an alkali metal, an alkaline earth metal, a transition metal, a post-transition metal, or a metalloid. The chalcogenide precursor is a hydride, alkyl, or aryl precursor of sulfur, selenium, or tellurium or a silylhydride, silylalkyl, or silylaryl precursor of sulfur, selenium, or tellurium. Methods of forming a memory cell including the metal chalcogenide material are also disclosed, as are memory cells including the metal chalcogenide material.
    Type: Application
    Filed: October 25, 2016
    Publication date: February 9, 2017
    Inventors: Eugene P. Marsh, Stefan Uhlenbrock