Abstract: A thin film deposition apparatus according to an embodiment includes a chamber, a deposition source disposed in a chamber and that supplies a deposition material to the substrate, a mask assembly comprising pattern holes through which the deposition material passes, and an electrostatic chuck facing the mask assembly and that fixes the substrate. The electrostatic chuck comprises a body that supports the substrate, an insulating layer disposed on the body, a first electrode disposed in the insulating layer and spaced apart from the body by a first distance, a second electrode disposed in the insulating layer and spaced apart from the body by a second distance, and a conductive layer disposed in the insulating layer and spaced apart from the body by a third distance. The first electrode and the second electrode are supplied with different voltages, and the third distance is greater than the first distance.

Abstract: A deposition apparatus for depositing a deposition material on a base substrate disposed on a mask, includes: a mask assembly including a mask frame which defines an opening therein and surrounds the opening, and the mask disposed on the mask frame; an electrostatic chuck disposed on the base substrate; and a plate disposed on the electrostatic chuck. The electrostatic chuck includes a plurality of magnetic bodies, and a magnetic property of at least one magnetic body among the plurality of magnetic bodies is different from a magnetic property of remaining magnetic bodies except for the at least one magnetic body among the plurality of magnetic bodies.

Abstract: A deposition apparatus includes a plate; electrostatic chucks including a first surface on which the plate is disposed; and a second surface on which a substrate is supported; and a control device that controls a flatness between the electrostatic chucks, and each of the electrostatic chucks includes driving shafts disposed through an area of an edge of the first surface of each of the electrostatic chucks, and the control device controls the flatness between the electrostatic chucks through the driving shafts by measuring a height deviation between the electrostatic chucks.

Abstract: A mask assembly and method for manufacturing of the same are provided. A mask assembly includes: a mask frame including a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar; a first split mask overlapping the first mask opening; and a second split mask overlapping the second mask opening, and the first split mask and the second split mask are spaced apart from each other in a region overlapping the support bar.

Abstract: A mask assembly and method for manufacturing of the same are provided. A mask assembly includes: a mask frame including a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar; a first split mask overlapping the first mask opening; and a second split mask overlapping the second mask opening, and the first split mask and the second split mask are spaced apart from each other in a region overlapping the support bar.

Abstract: A printing apparatus includes a printing mask, which is disposed between a substrate having a display area and a non-display area surrounding the display area. The apparatus further includes a nozzle discharging an organic light emitting liquid onto the substrate. The printing mask includes a mask open part and a mask cover part. The mask open part exposes the display area, and the mask cover part surrounds the mask open part and covers the non-display area. The apparatus can be used to form an organic emitting layer on the substrate.

Abstract: A printing apparatus includes a printing mask, which is disposed between a substrate having a display area and a non-display area surrounding the display area. The apparatus further includes a nozzle discharging an organic light emitting liquid onto the substrate. The printing mask includes a mask open part and a mask cover part. The mask open part exposes the display area, and the mask cover part surrounds the mask open part and covers the non-display area. The apparatus can be used to form an organic emitting layer on the substrate.

Abstract: A printing apparatus includes a printing mask, which is disposed between a substrate having a display area and a non-display area surrounding the display area. The apparatus further includes a nozzle discharging an organic light emitting liquid onto the substrate. The printing mask includes a mask open part and a mask cover part. The mask open part exposes the display area, and the mask cover part surrounds the mask open part and covers the non-display area. The apparatus can be used to form an organic emitting layer on the substrate.

Abstract: An organic light-emitting diode (OLED) display and method of manufacturing the same are disclosed. In one aspect, the OLED display includes a substrate, a thin film transistor (TFT) formed over the substrate, and a first pixel defining layer formed over the TFT and having an opening. The OLED display also includes an insulating layer formed in the opening and including a top surface having a dome shape and an OLED formed over the insulating layer.

Abstract: An organic light-emitting diode includes a first electrode, an intermediate layer on the first electrode, and a second electrode on the intermediate layer. The intermediate layer includes an emission layer including an organic material, and a functional layer between the second electrode and the emission layer and including at least one of a metal compound and a semiconductor compound including at least one of an oxygen atom and a sulfur atom. An oxygen concentration in the functional layer increases toward the second electrode, and a sulfur concentration in the functional layer increases toward the emission layer.

Abstract: A method for testing an organic pattern including: forming an organic pattern on a test substrate through a mask; acquiring a test image by photographing a predetermined test area of the test substrate; and checking whether an edge of the organic pattern displayed to the test image goes over an edge of a virtual test figure.

Abstract: Provided is an apparatus for manufacturing a deposition mask assembly for a flat panel display, which prevents a pattern from being distorted in a pattern mask when divided pattern masks are welded to a support fixture. An apparatus for manufacturing a deposition mask assembly for a flat panel display of the present description, which includes a frame mask forming an opening, a support fixture installed in the frame mask, and a pattern mask welded to the support fixture to have a pattern allowing a deposition material to be transmitted therethrough, includes: a welding head disposed in a side of the pattern mask; and a support member supporting the support fixture in an opposite side of the welding head with the pattern mask interposed therebetween.

Abstract: An organic light-emitting diode (OLED) display and method of manufacturing the same are disclosed. In one aspect, the OLED display includes a substrate, a thin film transistor (TFT) formed over the substrate, and a first pixel defining layer formed over the TFT and having an opening. The OLED display also includes an insulating layer formed in the opening and including a top surface having a dome shape and an OLED formed over the insulating layer.

Abstract: A light emitting display device and a method of fabricating the same are disclosed. The light emitting display device comprises: a substrate comprising an active region in which a plurality of active pixels for displaying images are formed and a first dummy region disposed outside the active region and in which a plurality of first dummy pixels is formed; a first electrode formed on the substrate in each pixel; a pixel defining layer having an opening that exposes the first electrode; a surface treatment layer formed on the first electrode and having a plurality of grooves in each of the first dummy pixels; a light emitting layer formed on the surface treatment layer; and a second electrode formed on the light emitting layer in each of the active pixels.

Abstract: An organic light-emitting diode includes a first electrode, an intermediate layer on the first electrode, and a second electrode on the intermediate layer. The intermediate layer includes an emission layer including an organic material, and a functional layer between the second electrode and the emission layer and including at least one of a metal compound and a semiconductor compound including at least one of an oxygen atom and a sulfur atom. An oxygen concentration in the functional layer increases toward the second electrode, and a sulfur concentration in the functional layer increases toward the emission layer.

Abstract: A printing apparatus includes a printing mask, which is disposed between a substrate having a display area and a non-display area surrounding the display area. The apparatus further includes a nozzle discharging an organic light emitting liquid onto the substrate. The printing mask includes a mask open part and a mask cover part. The mask open part exposes the display area, and the mask cover part surrounds the mask open part and covers the non-display area. The apparatus can be used to form an organic emitting layer on the substrate.

Abstract: A light emitting display device and a method of fabricating the same are disclosed. The light emitting display device comprises: a substrate comprising an active region in which a plurality of active pixels for displaying images are formed and a first dummy region disposed outside the active region and in which a plurality of first dummy pixels is formed; a first electrode formed on the substrate in each pixel; a pixel defining layer having an opening that exposes the first electrode; a surface treatment layer formed on the first electrode and having a plurality of grooves in each of the first dummy pixels; a light emitting layer formed on the surface treatment layer; and a second electrode formed on the light emitting layer in each of the active pixels.

Abstract: A method for testing an organic pattern including: forming an organic pattern on a test substrate through a mask; acquiring a test image by photographing a predetermined test area of the test substrate; and checking whether an edge of the organic pattern displayed to the test image goes over an edge of a virtual test figure.

Abstract: Provided is an apparatus for manufacturing a deposition mask assembly for a flat panel display, which prevents a pattern from being distorted in a pattern mask when divided pattern masks are welded to a support fixture. An apparatus for manufacturing a deposition mask assembly for a flat panel display of the present description, which includes a frame mask forming an opening, a support fixture installed in the frame mask, and a pattern mask welded to the support fixture to have a pattern allowing a deposition material to be transmitted therethrough, includes: a welding head disposed in a side of the pattern mask; and a support member supporting the support fixture in an opposite side of the welding head with the pattern mask interposed therebetween.

Abstract: Provided is a method of descaling a mask that quickly and effectively removes a material attached to the mask. The method includes: directing a laser beam onto a material attached to the mask; and removing the material attached to the mask.