Abstract: The present invention provides an isotropic etching method of two-dimensional semiconductor materials. The present invention provides an isotropic etching method of two-dimensional semiconductor materials including a first operation of arranging an etching object having a two-dimensional transition metal chalcogenide layer inside an etching space of a remote plasma system in which a discharge space and the etching space are separated, a second operation of extracting oxygen or halogen radical among plasma generated in the discharge space and reacting the two-dimensional transition metal chalcogenide layer with a surface to form an oxide layer and a radical adsorbate layer, and a third operation of selectively removing the oxide layer and the radical adsorbate layer in the etching space, wherein only an upper layer of the two-dimensional transition metal chalcogenide is precisely etched in units of atoms without defects and damage in a lower layer.

Abstract: Provided is torsion damper for a vehicle including an output side-flywheel coupled to an output shaft of a driving unit in an axial direction, a first drive plate disposed to be relatively rotatable in an axial direction of the output side-flywheel, a second drive plate disposed to be relatively rotatable in an axial direction of the first drive plate, an input shaft of a transmission being coupled thereto in the axial direction, a first damper member installed between the output side-flywheel and the first drive plate and configured to absorb vibration and impact generated in a rotation direction thereof, and a second damper member installed between the first drive plate and the second drive plate and configured to absorb vibration and impact generated in a rotation direction thereof.

Abstract: One embodiment of the present invention provides an atomic layer deposition device for filling a gap of a semiconductor structure with a high aspect ratio and a method of manufacturing the same. According to the atomic layer deposition method of filling the gap of the semiconductor structure with the high aspect ratio according to one embodiment of the present invention, it is possible to remove an overhang at an pattern top at the same time as deposition and perform the gap-filling to remove a void and a seam by improving bottom-up deposition in a high aspect ratio structure of 40:1 or more.

Abstract: Lighting module disclosed in an embodiment of the invention, a substrate; a plurality of light emitting devices disposed on the substrate; a first reflective layer disposed on the substrate; a resin layer disposed on the first reflective layer and the light emitting device; and a second reflective layer disposed on the resin layer, wherein the resin layer is a front side surface on which light generated from the plurality of light emitting devices is emitted, a rear side surface facing the front side surface, and first and second side surfaces connecting the front side surface and the rear side surface with each other.

Abstract: Proposed is a system for monitoring internal conditions of a processing chamber. The system includes at least one sensor provided inside the processing chamber and configured to measure an amount of reactant present inside the processing chamber, and a monitoring apparatus configured to monitor the internal conditions of the processing chamber on the basis of a measurement value received from the at least one sensor, wherein the monitoring apparatus determines at least one of a start point and an end point of a cleaning process for the processing chamber on the basis of a change in the measurement value.

Abstract: One embodiment of the present invention provides a method of manufacturing an electronic device using a cyclic doping process including i) an operation of forming a unit transfer thin film including a two-dimensional material on a transfer substrate, ii) an operation of doping the unit transfer thin film in a low-damage doping process, iii) an operation of transferring the unit transfer thin film doped according to the operation ii) on a transfer target substrate, and iv) an operation of repeatedly performing the operations i) to iii) several times to reach a target thickness.

Abstract: Lighting module disclosed in an embodiment of the invention, a substrate; a plurality of light emitting devices disposed on the substrate; a first reflective layer disposed on the substrate; a resin layer disposed on the first reflective layer and the light emitting device; and a second reflective layer disposed on the resin layer, wherein the resin layer is a front side surface on which light generated from the plurality of light emitting devices is emitted, a rear side surface facing the front side surface, and first and second side surfaces connecting the front side surface and the rear side surface with each other.

Abstract: The present invention introduces a plasma etching method and apparatus. The plasma etching method may include forming a photoresist pattern on a target etching layer, hardening the surface of the photoresist pattern by exposing to a first plasma generated from a first discharge gas containing a reforming gas including carbon (C) and sulfur (S) and sequentially annealing, and etching the target etching layer with a second plasma generated from a second discharge gas using the surface-hardened photoresist pattern as a mask.

Abstract: The present disclosure relates to a polyimide-based resin film comprising a polyimide-based resin containing a polyimide repeating unit represented by Chemical Formula 1 and a polyimide repeating unit represented by Chemical Formula 2, a substrate for display device, and an optical device using the same.

Abstract: A storage device including a nonvolatile memory device that includes a nonvolatile memory cell array including a string including first and second memory cells stacked sequentially, and an OTP memory cell array that stores reference count values, the first and second memory cells respectively connected to first and second word lines; a controller including a processor that generates a read command for the first memory cell; a read level generator including a counter that receives the read command and calculates an off-cell count value of memory cells connected to the second word line, and a comparator that receives a first reference count value from the OTP memory cell array, compares the off-cell count value with the first reference count value to determine a threshold voltage shift of the second memory cell, and determines a read level of the first memory cell based on the threshold voltage shift.

Abstract: The present invention relates to a method for purification of hemopexin and haptoglobin and provides a method in which a solution containing hemopexin and haptoglobin is titrated to a range of specific pH values without a step of precipitating haptoglobin by salt addition, followed by separating and purifying hemopexin and haptoglobin individually.

Abstract: A battery module includes a printed circuit board (PCB) having a copper pattern; a flexible printed circuit board (FPCB) having a copper pattern; and a conductive bonding portion for bonding the PCB to the FPCB, wherein the copper pattern of the PCB and the copper pattern of the FPCB are electrically connected to each other by a conductive metal particles, and wherein at least one of the copper pattern of the PCB and the copper pattern of the FPCB has at least one or more alloy layers selected from a group consisting one or more of Ni—Sn and Au—Ni—Sn—Bi.

Abstract: The present disclosure relates to a polyimide-based resin film wherein a thermal hysteresis gap at a temperature of 50° C. or more and 150° C. or less is 100 ?m or more and 500 ?m or less, and a substrate for display device, and an optical device using the same.

Abstract: Proposed is a rubber composition for a tire tread, which includes: a solution-polymerized elastomer having a conjugated diene-based monomer unit, a solution-polymerized elastomer having an aromatic vinyl monomer unit and a conjugated diene-based monomer unit, or a combination thereof, at 100 parts by weight; and a plasticizer containing an aromatic petroleum resin and an aliphatic olefin polymer, at 10 to 50 parts by weight. Further, a manufacturing method of the rubber composition for a tire tread is proposed.

Abstract: A signal control system for reducing intersection accidents on mixed roads with autonomous vehicle includes an autonomous vehicle determining whether there is a possibility of collision based on nearby vehicle information, a signal device installed on a road in a specific area and changing a signal display when a collision possibility notification message is received from the autonomous vehicle, a roadside device installed around the road in the specific area and transmitting and receiving data to and from the autonomous vehicle and the signal device, and an integrated control server transmitting and receiving data to and from the roadside device.

Abstract: A battery module and a battery pack including the same are disclosed. In some implementations, the battery module may include a plurality of battery cells; and a cell monitoring portion connected to the plurality of battery cells, the cell monitoring portion including a plurality of boards collecting information on at least one of temperature, current, and voltage of the plurality of battery cells. The plurality of boards may be separable.

Abstract: The present disclosure relates to a vehicle-type mobile infectious disease clinic, and more particularly, to a mobile infectious disease clinic, which is a vehicle-type mobile infectious disease clinic, that allows a test subject to be tested by a healthcare provider using an infectious disease test kit while exposure of the body parts is minimized and the healthcare provider and the test subject are isolated in the vehicle-type mobile infectious disease clinic, that performs sterilization of an infectious disease using an ultraviolet C (UV-C) lamp to reduce the time taken for disinfecting the clinic, and that allows the light radiation intensity of the UV-C lamp to be adaptively adjusted according to the body temperature of the test subject.

Abstract: A battery module includes a battery cell stack in which a plurality of battery cells are stacked; a module case for accommodating the battery cell stack therein; and a bus bar assembly disposed between the module case and the battery cell stack and electrically connected to the battery cells. The bus bar assembly may include at least one bus bar and a thermal conduction unit for embedding the bus bar therein. The thermal conduction unit may be formed of a resin material containing a thermally conductive filler.

Abstract: A display device includes a first conducive layer including a first and second wiring, a semiconductor layer on the first conductive layer and including a first to third semiconductor part, a gate insulating layer on the semiconductor layer, and a second conductive layer on the gate insulating layer and including a gate electrode overlapping the first semiconductor part, a first connecting electrode overlapping the second semiconductor part, and a second connecting electrode overlapping the third semiconductor part. The first and second connecting electrodes are directly connected to the second and third semiconductor parts, respectively. The second and third semiconductor parts include semiconductor openings. The first connecting electrode includes a (1-1)-th and (1-2)-th connecting electrodes.

Abstract: The present invention relates to a method of preparing an adsorbent for removing radon. The method includes (a) mixing a fluorine (F) compound and zeolite to produce a second mixture.