Abstract: Fuel processors, methods of using fuel processors, and the like, are disclosed.

Abstract: Apparatus for transporting a fluid, atomizers, reactors, integrated fuel processing apparatus, combinations thereof, methods of atomizing reactants, methods of moving fluids, methods of reverse-flow in a reactor, and combinations thereof, are provided. One exemplary apparatus for transporting a fluid, among others, includes: a channel for receiving a fluid; a sensor for determining an internal condition of the fluid in the channel; and a channel actuator in communication with the sensor for changing a cross-sectional area of the channel based on the internal condition, wherein the change in cross-sectional area controls a parameter selected from a pressure and a fluid flow.

Abstract: Electrospray systems, electrospray structures, removable electrospray structures, methods of operating electrospray systems, and methods of fabricating electrospray systems, are disclosed.

Abstract: An electromagnetic drive causes a cantilever of a probe-based instrument to deform flexurally by transmitting a high frequency AC signal through an electromagnetic actuator located in the vicinity of the cantilever. The AC signal preferably is an RF carrier signal having a frequency that is substantially higher than the resonant frequency of the cantilever. The carrier signal may, if desired, be modulated with a lower frequency modulation signal to induce the cantilever to oscillate, preferably at resonance. Alternatively, the carrier signal may be transmitted to the electromagnetic actuator without being modulated in order to deflect the cantilever quasi-statically. Cantilever response can then be monitored either directly in response to the imposition of the electromagnetically induced deformation of the cantilever in response to probe/sample interaction to obtain measurements regarding characteristics of the sample, the environment, and/or the cantilever.

Abstract: The present invention provides fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluid characteristics such as pressure, density, viscosity, flow rate and can also be used to mix and pump fluids.

Abstract: Apparatus for transporting a fluid, atomizers, reactors, integrated fuel processing apparatus, combinations thereof, methods of atomizing reactants, methods of moving fluids, methods of reverse-flow in a reactor, and combinations thereof, are provided. One exemplary apparatus for transporting a fluid, among others, includes: a channel for receiving a fluid; a sensor for determining an internal condition of the fluid in the channel; and a channel actuator in communication with the sensor for changing a cross-sectional area of the channel based on the internal condition, wherein the change in cross-sectional area controls a parameter selected from a pressure and a fluid flow.

Abstract: The cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range.

Abstract: The cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range.

Abstract: An electromagnetic drive causes a cantilever of a probe-based instrument to deform flexurally by transmitting a high frequency AC signal through an electromagnetic actuator located in the vicinity of the cantilever. The AC signal preferably is an RF carrier signal having a frequency that is substantially higher than the resonant frequency of the cantilever. The carrier signal may, if desired, be modulated with a lower frequency modulation signal to induce the cantilever to oscillate, preferably at resonance. Alternatively, the carrier signal may be transmitted to the electromagnetic actuator without being modulated in order to deflect the cantilever quasi-statically. Cantilever response can then be monitored either directly in response to the imposition of the electromagnetically induced deformation of the cantilever in response to probe/sample interaction to obtain measurements regarding characteristics of the sample, the environment, and/or the cantilever.

Abstract: The cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range.

Abstract: The cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range.

Abstract: A two-dimensional sensor array for high throughput screening of fluids in micro-machined fluid arrays is provided. The sensor array includes a two-dimensional array of piezoelectric transducers which are in contact with the back-side of the micro-machined fluid array which is opposite from the fluid positions. A means is provided to generate and detect shear or longitudinal ultrasonic waves in a time-multiplexed manner whereby the waves could propagate in either a pulse or continuous mode. A means to determine fluid parameters based on the shear and longitudinal ultrasonic waves is also provided. Furthermore, a fluid dispense system could be included which is then controlled based on the determined fluid parameters and a feedback control system. The two-dimensional micro-sensor array is compatible with and based on miniaturization technologies for high-throughput biology, such as micro-fluidics, detection, sample handling, and bioassay technology amenable to high-density formats.

Abstract: A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.

Abstract: There is described a cMUT array with transducer elements which include a plurality of cells with membranes formed on one surface of a wafer. Voltages applied between said spaced electrodes drive said membranes. The voltages applied to said electrodes are applied from the opposite surface of the wafer through the wafer and through vias formed in the wafer.

Abstract: The present invention provides fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluid characteristics such as pressure, density, viscosity, flow rate and can also be used to mix and pump fluids.

Abstract: A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.

Abstract: A micromachined capacitive ultrasonic transducer is used to generate and detect Rayleigh, Lamb, and bulk waves in a solid substrate. The transducer contains a substrate with a conductive back electrode, a support material on the substrate, a membrane supported above the substrate by the support material, and a conductive film on the membrane. The support material contains parallel edges defining elongated gaps over which the membrane is supported. Unsupported free regions of the membrane above the gaps are vibrated by applying an electrical signal between the conductive film and conductive back electrode, and stresses are coupled into the substrate at the attachment edges of the membrane. Acoustic modes of the substrate are excited by the stresses, and ultrasonic waves propagate in a direction perpendicular to the parallel edges.

Abstract: There is described a capacitive micromachined ultrasonic transducer array which is configured to minimize the excitation and propagation of plate waves traveling in the substrate and ultrasonic waves propagating at the interface between the array surface and the immersion fluid.

Abstract: There is provided a monitor and method for monitoring the condition of a photoresist film on a wafer in which the phase of high frequency ultrasonic pulses reflected from the wafer/photoresist interface provides an indication of the condition of the photoresist film.

Abstract: There is provided a monitor and method for monitoring the condition of a photoresist film on a wafer during baking in which the phase of high frequency ultrasonic pulses reflected from the wafer/photoresist interface provides an indication of the condition of the photoresist film.