Patents by Inventor Fa Lu
Fa Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240145412Abstract: A semiconductor device includes a logic circuit region having at least one core device and at least one input/output (I/O) device. The at least one core device has a first accumulative antenna ratio, and the at least one I/O device has a second accumulative antenna ratio. The first accumulative antenna ratio is greater than the second accumulative antenna ratio.Type: ApplicationFiled: November 27, 2022Publication date: May 2, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Shih-Che Huang, Chao-Ting Chen, Jui-Fa Lu, Chi-Heng Lin
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Publication number: 20240128194Abstract: Integrated circuit packages and methods of forming the same are provided. In an embodiment, a device includes: a power distribution interposer including: a first bonding layer; a first die connector in the first bonding layer; and a back-side interconnect structure including a power rail connected to the first die connector; and an integrated circuit die including: a second bonding layer directly bonded to the first bonding layer by dielectric-to-dielectric bonds; a second die connector in the second bonding layer, the second die connector directly bonded to the first die connector by metal-to-metal bonds; and a device layer on the second bonding layer, the device layer including a contact and a transistor, the transistor including a first source/drain region, the contact connecting a back-side of the first source/drain region to the second die connector.Type: ApplicationFiled: January 9, 2023Publication date: April 18, 2024Inventors: Ming-Fa Chen, Yun-Han Lee, Lee-Chung Lu
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Publication number: 20240120315Abstract: A semiconductor package includes a first semiconductor die and a second semiconductor die disposed laterally adjacent one another. The semiconductor package includes a semiconductor bridge overlapping a first corner of the first semiconductor die and a second corner of the second semiconductor die. The semiconductor bridge electrically couples the first semiconductor to the second semiconductor die. The semiconductor package includes a third semiconductor die and a fourth semiconductor die electrically coupled to the first semiconductor die and the second semiconductor die, respectively. The semiconductor bridge is interposed between the third semiconductor die and the fourth semiconductor die.Type: ApplicationFiled: February 15, 2023Publication date: April 11, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Fa Chen, Tze-Chiang Huang, Yun-Han Lee, Lee-Chung Lu
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Patent number: 11953078Abstract: A gear module includes a rotating cylinder, a first planetary gear set, a second planetary gear set, a concave-convex structure, and a limit bearing set. The first planetary gear set is accommodated in the rotating cylinder and includes a driven gear; the second planetary gear set includes a positioning frame, second planetary gears pivoted to a positioning frame, a driven gear engaged with the second planetary gears, and the positioning frame has a through hole; the concave-convex structure includes a convex column extended from the rotating cylinder and a concave hole formed on the positioning frame, the convex column is plugged into the concave hole; the limit bearing set includes a first ball bearing sheathing the driven gear and mounted between the driven gear and the through hole, and a second ball bearing sheathing the convex column and mounted between the convex column and the concave hole.Type: GrantFiled: August 16, 2023Date of Patent: April 9, 2024Assignee: SHA YANG YE INDUSTRIAL CO., LTD.Inventors: Feng-Chun Tsai, Ming-Han Tsai, Chin-Fa Lu, Kai-Hsien Wang
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Publication number: 20240071941Abstract: A semiconductor device includes: a first chip including a plurality of first device features and a plurality of first interconnect structures disposed above the first device features; a second chip including a plurality of second device features and a plurality of second interconnect structures disposed above the second device features; and an interposer bonded to the first chip and the second chip, and disposed on an opposite side from the first and second device features with respect to the first and second interconnect structures; wherein the interposer includes a plurality of power rails configured to deliver power to the first and second chips.Type: ApplicationFiled: August 29, 2022Publication date: February 29, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Fa Chen, Yun-Han Lee, Lee-Chung Lu
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Publication number: 20230189455Abstract: A structure for securely mounting and protecting electronic devices within a housing or tank includes two supporting plates connected to two mounting pieces. The supporting plate defines a first hole, and the mounting piece defines a second hole. A fastener through the first hole and the second hole will position and hold the mounting piece on the supporting plate. The two mounting pieces position the electronic device. The mounting pieces are adjustable relative to the supporting plate, so the distance between two mounting pieces is fully adjustable to fit and hold electronic devices of different sizes. A tank or housing using the structure is also disclosed.Type: ApplicationFiled: November 28, 2022Publication date: June 15, 2023Applicant: Fulian Precision Electronics (Tianjin) Co., LTD.Inventors: JIAN-FA LU, YEN-LU CHENG
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Patent number: 11670584Abstract: The present disclosure provides a method for manufacturing a semiconductor structure, including patterning a photo-sensitive polymer layer with a plurality of trenches by a first mask, the first mask having a first line pitch, patterning a photoresist positioning on a mesa between adjacent trenches by a second mask, the second mask having a second line pitch, the first mask and the second mask having substantially identical pattern topography, and the second line pitch being greater than the first line pitch, and selectively plating conductive material in the plurality of trenches.Type: GrantFiled: August 3, 2021Date of Patent: June 6, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chen-Fa Lu, Cheng-Yuan Tsai, Ching-Chung Hsu, Chung-Long Chang
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Patent number: 11545484Abstract: A design method of a dummy pattern layout including the following steps is provided. An integrated circuit layout design including resistor elements is obtained via a computer. The locations of dummy conductive structures are configured, wherein the dummy conductive structures are aligned with the resistor elements. The locations of dummy support patterns are configured, wherein each of the dummy support patterns is configured between two adjacent dummy conductive structures, and each of the dummy conductive structures is equidistant from the dummy support patterns on both sides.Type: GrantFiled: January 15, 2021Date of Patent: January 3, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Jui-Fa Lu, Chien-Nan Lin, Ching-Hua Yeh
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Publication number: 20220189928Abstract: A structure includes first and second substrates, first and second stress buffer layers, and a post-passivation interconnect (PPI) structure. The first and second substrates include first and second semiconductor substrates and first and second interconnect structures on the first and second semiconductor substrates, respectively. The second interconnect structure is on a first side of the second semiconductor substrate. The first substrate is bonded to the second substrate at a bonding interface. A via extends at least through the second semiconductor substrate into the second interconnect structure. The first stress buffer layer is on a second side of the second semiconductor substrate opposite from the first side of the second semiconductor substrate. The PPI structure is on the first stress buffer layer and is electrically coupled to the via. The second stress buffer layer is on the PPI structure and the first stress buffer layer.Type: ApplicationFiled: March 7, 2022Publication date: June 16, 2022Inventors: Chen-Fa Lu, Cheng-Yuan Tsai, Yeur-Luen Tu, Chia-Shiung Tsai
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Patent number: 11270978Abstract: A structure includes first and second substrates, first and second stress buffer layers, and a post-passivation interconnect (PPI) structure. The first and second substrates include first and second semiconductor substrates and first and second interconnect structures on the first and second semiconductor substrates, respectively. The second interconnect structure is on a first side of the second semiconductor substrate. The first substrate is bonded to the second substrate at a bonding interface. A via extends at least through the second semiconductor substrate into the second interconnect structure. The first stress buffer layer is on a second side of the second semiconductor substrate opposite from the first side of the second semiconductor substrate. The PPI structure is on the first stress buffer layer and is electrically coupled to the via. The second stress buffer layer is on the PPI structure and the first stress buffer layer.Type: GrantFiled: December 13, 2019Date of Patent: March 8, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Fa Lu, Cheng-Yuan Tsai, Yeur-Luen Tu, Chia-Shiung Tsai
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Publication number: 20210366828Abstract: The present disclosure provides a method for manufacturing a semiconductor structure, including patterning a photo-sensitive polymer layer with a plurality of trenches by a first mask, the first mask having a first line pitch, patterning a photoresist positioning on a mesa between adjacent trenches by a second mask, the second mask having a second line pitch, the first mask and the second mask having substantially identical pattern topography, and the second line pitch being greater than the first line pitch, and selectively plating conductive material in the plurality of trenches.Type: ApplicationFiled: August 3, 2021Publication date: November 25, 2021Inventors: CHEN-FA LU, CHENG-YUAN TSAI, CHING-CHUNG HSU, CHUNG-LONG CHANG
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Patent number: 11114378Abstract: The present disclosure provides a semiconductor structure having an ultra thick metal (UTM). The semiconductor structure includes a substrate, a metal layer over the substrate, and an UTM over the metal layer. An area density of the UTM is greater than 40% and a thickness of the UTM is equal to or greater than 6 micrometer. The present disclosure provides a method for manufacturing a semiconductor structure having a UTM. The method includes patterning a dielectric layer with a plurality of trenches by a first mask, patterning a photoresist positioning on a mesa between adjacent trenches by a second mask, and selectively plating conductive materials in the plurality of trenches.Type: GrantFiled: April 19, 2019Date of Patent: September 7, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chen-Fa Lu, Cheng-Yuan Tsai, Ching-Chung Hsu, Chung-Long Chang
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Publication number: 20210134790Abstract: A design method of a dummy pattern layout including the following steps is provided. An integrated circuit layout design including resistor elements is obtained via a computer. The locations of dummy conductive structures are configured, wherein the dummy conductive structures are aligned with the resistor elements. The locations of dummy support patterns are configured, wherein each of the dummy support patterns is configured between two adjacent dummy conductive structures, and each of the dummy conductive structures is equidistant from the dummy support patterns on both sides.Type: ApplicationFiled: January 15, 2021Publication date: May 6, 2021Applicant: United Microelectronics Corp.Inventors: Jui-Fa Lu, Chien-Nan Lin, Ching-Hua Yeh
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Patent number: 10964689Abstract: A semiconductor structure including a substrate, dummy conductive structures, and resistor elements is provided. The substrate includes a resistor region and has isolation structures and dummy support patterns located in the resistor region. Each of the isolation structures is located between two adjacent dummy support patterns. Each of the dummy conductive structures is disposed on each of the isolation structures and equidistant from the dummy support patterns on both sides. The resistor elements are disposed above the dummy conductive structures and aligned with the dummy conductive structures.Type: GrantFiled: September 14, 2017Date of Patent: March 30, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Jui-Fa Lu, Chien-Nan Lin, Ching-Hua Yeh
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Patent number: 10704651Abstract: A low rotational speed gear module includes a fixed tube member, a rotational sleeve, a first planetary gear set, a sun gear, and a second planetary gear set. The fixed tube member includes a first inner gear. The rotational sleeve includes a second inner gear. The first planetary gear set includes a fixing plate, first planetary gears fixed to one side of the fixing plate, and a driven gear fixed to the other side of the fixing plate. The first planetary gear is engaged at one side with the sun gear and engaged at another side with the first inner gear. The second planetary gear set includes second planetary gears. The second planetary gears is engaged at one side with the driven gear and engaged at another side with the first inner gear and the second inner gear.Type: GrantFiled: May 10, 2018Date of Patent: July 7, 2020Assignee: SHA YANG YE INDUSTRIAL CO. LTD.Inventors: Feng-Chun Tsai, Ming-Han Tsai, Chin-Fa Lu, Kai-Hsien Wang
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Patent number: 10665456Abstract: A semiconductor structure comprises a substrate comprising an interlayer dielectric (ILD) and a silicon layer disposed over the ILD, wherein the ILD comprises a conductive structure disposed therein, a dielectric layer disposed over the silicon layer, and a conductive plug electrically connected with the conductive structure and extended from the dielectric layer through the silicon layer to the ILD, wherein the conductive plug has a length extending from the dielectric layer to the ILD and a width substantially consistent along the length.Type: GrantFiled: November 12, 2018Date of Patent: May 26, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Shih-Pei Chou, Chen-Fa Lu, Jiech-Fun Lu, Yeur-Luen Tu, Chia-Shiung Tsai
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Publication number: 20200118977Abstract: A structure includes first and second substrates, first and second stress buffer layers, and a post-passivation interconnect (PPI) structure. The first and second substrates include first and second semiconductor substrates and first and second interconnect structures on the first and second semiconductor substrates, respectively. The second interconnect structure is on a first side of the second semiconductor substrate. The first substrate is bonded to the second substrate at a bonding interface. A via extends at least through the second semiconductor substrate into the second interconnect structure. The first stress buffer layer is on a second side of the second semiconductor substrate opposite from the first side of the second semiconductor substrate. The PPI structure is on the first stress buffer layer and is electrically coupled to the via. The second stress buffer layer is on the PPI structure and the first stress buffer layer.Type: ApplicationFiled: December 13, 2019Publication date: April 16, 2020Inventors: Chen-Fa Lu, Cheng-Yuan Tsai, Yeur-Luen Tu, Chia-Shiung Tsai
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Patent number: 10534353Abstract: A system for reducing processing defects during processing of a semiconductor wafer prior to back-grinding the wafer includes a table having one or more holes formed therein, wherein the table comprises at least one of a chuck table or a support table, wherein the holes are perpendicular to the surface upon which a pre-back-grinding (PBG) process occurs. The system further includes one or more sensors disposed in said holes for monitoring a parameter during the PBG process. The system further includes a computer-implemented process control tool coupled with the one or more sensors and configured to determine whether the PBG process will continue.Type: GrantFiled: October 3, 2013Date of Patent: January 14, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chen-Fa Lu, Cheng-Ting Chen, James Hu, Chung-Shi Liu
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Patent number: 10510723Abstract: A structure includes first and second substrates, first and second stress buffer layers, and a post-passivation interconnect (PPI) structure. The first and second substrates include first and second semiconductor substrates and first and second interconnect structures on the first and second semiconductor substrates, respectively. The second interconnect structure is on a first side of the second semiconductor substrate. The first substrate is bonded to the second substrate at a bonding interface. A via extends at least through the second semiconductor substrate into the second interconnect structure. The first stress buffer layer is on a second side of the second semiconductor substrate opposite from the first side of the second semiconductor substrate. The PPI structure is on the first stress buffer layer and is electrically coupled to the via. The second stress buffer layer is on the PPI structure and the first stress buffer layer.Type: GrantFiled: October 16, 2017Date of Patent: December 17, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Fa Lu, Cheng-Yuan Tsai, Yeur-Luen Tu, Chia-Shiung Tsai
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Patent number: D1017469Type: GrantFiled: December 30, 2021Date of Patent: March 12, 2024Assignee: GREAT WALL MOTOR COMPANY LIMITEDInventors: Weilong Wang, Kuan Kang, Ming Li, Chunquan Gao, Zihan Zhao, Yunlong Cao, Hongju Gao, Baowang Li, Qiang Guo, Fa Lu