Abstract: Embodiments of the present invention provide a hybrid system and method for distributed virtual power plants integrated intelligent net zero. In this method, a cyber physical agent (CPA) is utilized to collect a carbon emission information and an energy management information, and then an artificial intelligence (AI) optimization model of an intelligent central dispatch platform is utilized to obtain a power dispatch manner of the distributed virtual power plants based on the carbon emission information and the energy management information, such that the power dispatch manner of the distributed virtual power plants meets the requirements of enterprise economic benefits and net zero carbon emissions at the same time.

Abstract: A hybrid method for green intelligent manufacturing (GiM) combines the carbon reduction and the energy saving into the intelligent manufacturing based Industry 4.1 cloud platform. GiM assists companies to achieve the goal of net zero transition and help them advance to Industry 4.2 as soon as possible by simultaneously taking carbon footprint and energy issues into account. GiM collects large volumes of essential data (including carbon footprint) via cyber physical agents (CPAs), and sends them to two critical services of carbon management and intelligent energy management system (iEMS) deployed on the cloud platform. The two critical services optimize the energy dispatch schedule by strictly following the requirements of energy saving, carbon reduction, and net zero. Then, the state of zero defects of intelligent manufacturing achieved in Industry 4.1 can be upgraded to net zero of GiM in Industry 4.2.

Abstract: A virtual metrology method using a convolutional neural network (CNN) is provided. In this method, a dynamic time warping (DTW) algorithm is used to delete unsimilar sets of process data, and adjust the sets of process data to be of the same length, thereby enabling the CNN to be used for virtual metrology. A virtual metrology model of the embodiments of the present invention includes several CNN models and a conjecture model, in which plural inputs of the CNN model are sets of time sequence data of respective parameters, and plural outputs of the CNN models are inputs to the conjecture model.

Abstract: A virtual metrology method based on convolutional autoencoder and transfer learning includes performing a data alignment operation, a modeling operation and a calculating operation. The data alignment operation includes performing a data-length adjusting operation onto a plurality of sets of process data. The modeling operation includes classifying paired data and unpaired process data; creating a pre-trained model by using the unpaired process data, and then inputting the paired data to the pre-trained model to create a virtual metrology model based on convolutional autoencoder. The virtual metrology model based on convolutional autoencoder includes at least one convolutional neural network model. In addition, the calculating operation includes executing one of a predicting step and a transfer learning step according to whether the actual metrology data is obtained, thereby calculating one of a phase-one virtual metrology value and a phase-two virtual metrology value.

Abstract: Embodiments of the present disclosure provide a method for predicting an occurrence of a tool processing event, thereby determining whether to activate a virtual metrology. In a model-building stage, plural sets of model-building data are used to create at least one classification model in accordance with at least one classification algorithm, in which each classification model includes plural decision trees. Then, probabilities of the decision trees are used to create at least one reliance index model, and the sets of model-building data are used to create at least one similarity index model in accordance with a statistical distance algorithm. In a conjecture stage, a set of processing data of a workpiece is inputted into each classification model, each reliance index model and each similarity index model to determine whether to activate (start) virtual metrology.

Abstract: An additive manufacturing (AM) method is provided. The method includes performing a laser powder bed fusion (L-PBF) process on the powder layer. Then, a first surface roughness value of the powder layer after the L-PBF process is obtained to generate a first surface profile. An absorptivity and a set of re-melting process parameters data are used to perform a heat transfer simulation. A second surface profile of the powder layer after laser re-melting is obtained by using the first surface profile and a low-pass filter. Then, the set of re-melting process parameters data is adjusted iteratively to perform the heat transfer simulation until a second surface roughness value predicted from the second surface profile is smaller than or equal to a surface roughness threshold, thereby obtaining optimal values of re-melting process parameters for performing a re-melting process to reduce a surface roughness of a powder layer after the L-PBF process.

Abstract: An additive manufacturing (AM) method includes using an AM tool to fabricate a plurality of workpiece products; measuring qualities of the first workpiece products respectively; performing a temperature measurement on each of the melt pools on the powder bed during a fabrication of each of the workpiece products; performing photography on each of the melt pools on the powder bed during the fabrication of each of the workpiece products; extracting a length and a width of each of the melt pools; performing a melt-pool feature processing operation; building a conjecture model by using a plurality of sets of first process data and the actual metrology values of the first workpiece products in accordance with a prediction algorithm; and predicting a virtual metrology value of the second workpiece product by using the conjecture model based on a set of second process data.

Abstract: An additive manufacturing (AM) method includes using an AM tool to fabricate a plurality of workpiece products; measuring qualities of the first workpiece products respectively; performing a temperature measurement on each of the melt pools on the powder bed; performing photography on each of the melt pools on the powder bed; extracting a length and a width of each of the melt pools; performing a melt-pool feature processing operation; first converting each of the workspace images to a gray level co-occurrence matrix (GLCM); building a conjecture model by using a plurality of sets of first process data and the actual metrology values of the first workpiece products in accordance with a prediction algorithm; and predicting a virtual metrology value of the second workpiece product by using the conjecture model based on a set of second process data.

Abstract: A golden path search method for manufacturing process provides a two-phase process to search for a golden path. A first phase step of the two-phase process includes preparing a search model based on a search algorithm, and selecting a plurality of key process stages of a plurality of process stages by feeding sets of final inspection values and the production paths of the workpieces into the searching model, and then generating a plurality of key paths according to the key process stages. A second phase step of the two-phase process includes building a plurality of prediction models of the key paths according to the production paths and the sets of final inspection values, and predicting a plurality of yield rates corresponding to the key paths according to the prediction models, and then searching for the golden path of the key paths according to the yield rates.

Abstract: An additive manufacturing (AM) method includes using an AM tool to fabricate a plurality of workpiece products; measuring qualities of the first workpiece products respectively; performing a temperature measurement on each of the melt pools on the powder bed; performing photography on each of the melt pools on the powder bed; extracting a length and a width of each of the melt pools; performing a melt-pool feature processing operation; first converting each of the workspace images to a gray level co-occurrence matrix (GLCM); building a conjecture model by using a plurality of sets of first process data and the actual metrology values of the first workpiece products in accordance with a prediction algorithm; and predicting a virtual metrology value of the second workpiece product by using the conjecture model based on a set of second process data.

Abstract: An additive manufacturing (AM) method includes using an AM tool to fabricate a plurality of workpiece products; measuring qualities of the first workpiece products respectively; performing a temperature measurement on each of the melt pools on the powder bed during a fabrication of each of the workpiece products; performing photography on each of the melt pools on the powder bed during the fabrication of each of the workpiece products; extracting a length and a width of each of the melt pools; performing a melt-pool feature processing operation; building a conjecture model by using a plurality of sets of first process data and the actual metrology values of the first workpiece products in accordance with a prediction algorithm; and predicting a virtual metrology value of the second workpiece product by using the conjecture model based on a set of second process data.

Abstract: Embodiments of the present invention provide a multiple-variable predictive maintenance method for a component of a production tool and a computer program product thereof, in which a multiple-variable time series prediction (TSPMVA) and an information criterion algorithm are adapted to build a best vector autoregression model (VAR), thereby forecasting the complicated future trend of accidental shutdown of the component of the production tool. Therefore, the multiple-variable prediction of the present invention can improve the accuracy of prediction compared with the single-variable prediction.

Abstract: An additive manufacturing (AM) system, an AM method, and an AM feature extraction method are provided. The AM system includes an AM tool, a product metrology system, an in-situ metrology system, a virtual metrology (VM) system, a compensator, a track planner, a controller, a simulator and an augmented reality (AR) device. The simulator is used to find feasible parameter ranges, while the AR device is used to support operations and maintenance of the AM tool. The product metrology system, the in-situ metrology system and the VM system are integrated to estimate the variation of material on a powder bed of the AM tool. The compensator is used for compensating the process variation by adjusting process parameters. The product metrology system is used to measure the quality of products. The in-situ metrology system is used to collect features of melt pools on the powder bed.

Abstract: An additive manufacturing (AM) system, an AM method, and an AM feature extraction method are provided. The AM system includes an AM tool, a product metrology system, an in-situ metrology system, a virtual metrology (VM) system, a compensator, a track planner, a controller, a simulator and an augmented reality (AR) device. The simulator is used to find feasible parameter ranges, while the AR device is used to support operations and maintenance of the AM tool. The product metrology system, the in-situ metrology system and the VM system are integrated to estimate the variation of material on a powder bed of the AM tool. The compensator is used for compensating the process variation by adjusting process parameters. The product metrology system is used to measure the quality of products. The in-situ metrology system is used to collect features of melt pools on the powder bed.

Abstract: Embodiments of the present invention provide a predictive maintenance method for a component of a production tool, in which a time series prediction (TSP) algorithm and an information criterion algorithm are adapted to build a TSP model, thereby forecasting the complicated future trend of accidental shutdown of the component of the production tool. In addition, an alarm scheme is provided for performing maintenance immediately when the component is very likely to enter a dead state, and a death related indicator (DCI) is provided for quantitatively showing the possibility of the component entering the dead state.

Abstract: A virtual metrology method using a convolutional neural network (CNN) is provided. In this method, a dynamic time warping (DTW) algorithm is used to delete unsimilar sets of process data, and adjust the sets of process data to be of the same length, thereby enabling the CNN to be used for virtual metrology. A virtual metrology model of the embodiments of the present invention includes several CNN models and a conjecture model, in which plural inputs of the CNN model are sets of time sequence data of respective parameters, and plural outputs of the CNN models are inputs to the conjecture model.

Abstract: An additive manufacturing (AM) method is provided. The method includes performing a laser powder bed fusion (L-PBF) process on the powder layer. Then, a first surface roughness value of the powder layer after the L-PBF process is obtained to generate a first surface profile. An absorptivity and a set of re-melting process parameters data are used to perform a heat transfer simulation. A second surface profile of the powder layer after laser re-melting is obtained by using the first surface profile and a low-pass filter. Then, the set of re-melting process parameters data is adjusted iteratively to perform the heat transfer simulation until a second surface roughness value predicted from the second surface profile is smaller than or equal to a surface roughness threshold, thereby obtaining optimal values of re-melting process parameters for performing a re-melting process to reduce a surface roughness of a powder layer after the L-PBF process.

Abstract: Embodiments of the present disclosure provide a method for predicting an occurrence of a tool processing event, thereby determining whether to activate a virtual metrology. In a model-building stage, plural sets of model-building data are used to create at least one classification model in accordance with at least one classification algorithm, in which each classification model includes plural decision trees. Then, probabilities of the decision trees are used to create at least one reliance index model, and the sets of model-building data are used to create at least one similarity index model in accordance with a statistical distance algorithm. In a conjecture stage, a set of processing data of a workpiece is inputted into each classification model, each reliance index model and each similarity index model to determine whether to activate (start) virtual metrology.

Abstract: Embodiments of the present disclosure provide a two-phase process for searching root causes of a yield loss in a production line. In a first phase, an interaction between two process tools, that between two parameters, or that between one process tool and one parameter that is likely to cause the yield loss is identified. In a second phase, a threshold of the parameter that is likely to cause the yield loss and is obtained from the first phase is identified. In each phase, two different algorithms can be used to generate a reliance index (RII) for gauging the reliance levels of their search results.

Abstract: Embodiments of the present invention provide a two-phase process for searching the root causes of the yield loss in the production line 100. In a first phase, process tools and their process tool types that are likely to cause the yield loss are identified, and in a second phase, the process parameters that are likely to cause the yield loss within the process tool types found in the first phase are identified. In each phase, two different algorithms can be used to generate a reliance index (RIk) for gauge the reliance levels of their search results.