Abstract: A dual-phase virtual metrology method is disclosed for considering both promptness and accuracy by generating dual-phase virtual metrology (VM) values, wherein a Phase-I conjecture step emphasizes promptness by immediately calculating the Phase-I virtual metrology value (VMI) of a workpiece once the entire process data of the workpiece are completely collected; and a Phase-II conjecture step intensifies accuracy, which does not re-calculate the Phase-II virtual metrology values (VMII) of all the workpieces in the cassette until an actual metrology value (required for tuning or re-training purposes) of a selected workpiece in the same cassette is collected. Besides, the accompanying reliance index (RI) and global similarity index (GSI) of each VMI and VMII are also generated.

Abstract: A method for providing an application cluster service (APCS) with fault-detection and failure-recovery capabilities. This method is composed of the steps of nodes clustering, invoking and detecting applications, fault-recovery of applications, detection of nodes, and node replacement. This method is applicable in a clustered environment to detect if a slave node is failed by sending a heartbeat periodically from a master node; and to detect if the master node still exists by checking if the master node stops sending the heartbeat (i.e. the master node may be failed).

Abstract: A generic service management system is disclosed. The generic service management system comprises a registration scheme; a search-and-execution scheme; and a detection-and-replacement scheme, used for detecting and replacing the invalid service provider, such as a semiconductor equipment manager. The present invention provides a GEV (Generic Evaluator) having the capabilities of error-detecting and data backup, and further combines Jini infrastructure and the programming technology of design by contract. The GEV archives the credit values of all the service providers for letting a client (such as a factory manager) to select a service provider having a higher credit value.

Abstract: Provided are a method and a system for virtual metrology in semiconductor manufacturing. Process data and metrology data are received. Prediction data is generated based on the process data and metrology data using a learning control model. The system for virtual metrology in a fabrication facility comprises a fault detection and classification system operable to receive process data, a statistical process control system operable to perform statistical process control on a history of physical metrology data to form metrology data, and a virtual metrology application operable to generate prediction data based on the process data and the metrology data using a learning control model.

Abstract: A manufacturing management system comprises a plurality of management modules, where each module operable to perform functions associated with a phase of a manufacturing cycle, a plurality of engineering chain agents associated and communicating with each of the plurality of management modules and operable to perform specific functions related to data exchange between the plurality of management modules, and a plurality of web service interface modules enabling the plurality of engineering chain agents to communicate with one another and exchange data across a computer network.

Abstract: A method for evaluating reliance level of a virtual metrology system is disclosed. In this method, a reliance index (RI) and a RI threshold value are calculated by analyzing the process data of production equipment, thereby determining if the virtual metrology result is reliable. Besides, in this method, a global similarity index (GSI) and individual similarity indexes (ISI) are also provided for defining the degree of similarity between the current set of process data and all of the sets of historical process data used for establishing the conjecture model, thereby assisting the RI in gauging the degree of reliance and locating the key parameter(s) that cause major deviation.

Abstract: Provided are a method and a system for virtual metrology in semiconductor manufacturing. Process data and metrology data are received. Prediction data is generated based on the process data and metrology data using a learning control model. The system for virtual metrology in a fabrication facility comprises a fault detection and classification system operable to receive process data, a statistical process control system operable to perform statistical process control on a history of physical metrology data to form metrology data, and a virtual metrology application operable to generate prediction data based on the process data and the metrology data using a learning control model.

Abstract: A generic embedded device (GED) and a mechanism for retrieving and transmitting information of various intelligent-maintenance (IM) applications are disclosed. The GED is an object-oriented and cross-platform device built in an embedded real-time operating system, and can be installed in various kinds of information equipment, and has a generic application interface for the future development of application modules. The present invention enables all kinds of information equipment to retrieve, collect, manage, and analyze equipment data for IM applications; and further to receive/transmit the IM-related equipment information wired or wireless from/to remote clients via communication agents through Internet/Intranet.

Abstract: An autonomous and universal remote control system and scheme is disclosed. The autonomous and universal remote control system comprises at least one generic embedded controller (GEC) respectively installed on at least one controlled target, such as appliances, robots and equipment, etc.; and a generic remote controller (GRC), wherein the at least one GEC matches with the GRC. The autonomous and universal remote control scheme utilizes the GRC to sense the type of the at least one controlled target automatically, and then to download the context of controlled target dynamically, thereby autonomously controlling the controlled targets of various types with one single GRC.

Abstract: An equipment management method for managing semiconductor equipment via an equipment manager. In the equipment management method, production scenario rules and equipment behavior rules are first defined respectively in a production scenario database of a configuration controller and an equipment behavior database of an equipment driver. Them, a command is received from a manufacturing execution system (MES), and is converted into a production process scenario by looking up the corresponding production scenario rule in the production scenario database. Thereafter, the production process scenario is converted into a GEI (generic equipment interface) message with a GEI message specification, and the GEI message is transmitted to the equipment driver. Then, the GEI message is converted into equipment communication messages regulated by an equipment communication protocol by looking up the corresponding equipment behavior rule in the equipment behavior database.

Abstract: A quality prognostics system and a quality prognostics method for predicting the product quality during manufacturing processes are disclosed. The present invention utilizes the current production tool parameters sensed during the manufacturing process and several previous quality data collected from the measurement tool to predict the future product quality. The quality prognostics system is composed of conjecture modeling means and prediction modeling means. The conjecture modeling means itself also can be applied for the purpose of virtual metrology. Further, the quality prognostics method possesses a self-searching means and a self-adjusting means for searching the best combination of various parameters/functions used by the conjecture algorithm or prediction algorithm; and meeting the requirements of new equipment parameters and conjecture/prediction accuracy.

Abstract: A generic embedded device (GED) and a mechanism for retrieving and transmitting information of various intelligent-maintenance (IM) applications are disclosed. The GED is an object-oriented and cross-platform device built in an embedded real-time operating system, and can be installed in various kinds of information equipment, and has a generic application interface for the future development of application modules. The present invention enables all kinds of information equipment to retrieve, collect, manage, and analyze equipment data for IM applications; and further to receive/transmit the IM-related equipment information wired or wireless from/to remote clients via communication agents through Internet/Intranet.

Abstract: A generic software testing system and mechanism is disclosed for use in distributed object-oriented systems. The present invention directly utilizes class diagrams (or interface definitions) and sequence diagrams to automatically generate the execution codes and test template required for testing the software system, wherein the class diagram data, the interface definition data and the sequence diagram data are generated by a software development tool of distributed object-oriented system. The present invention is applicable to the tests of a software system of which the functions and operations can be presented merely with class diagrams (or interface definitions) and sequence diagrams generated by the tools used during software development, wherein the software system can be as small as an individual unit (component) or module, or as large as an entire distributed object-oriented system.

Abstract: An autonomous and universal remote control system and scheme is disclosed. The autonomous and universal remote control system comprises at least one generic embedded controller (GEC) respectively installed on at least one controlled target, such as appliances, robots and equipment, etc.; and a generic remote controller (GRC), wherein the at least one GEC matches with the GRC. The autonomous and universal remote control scheme utilizes the GRC to sense the type of the at least one controlled target automatically, and then to download the context of controlled target dynamically, thereby autonomously controlling the controlled targets of various types with one single GRC.

Abstract: An equipment management method for managing the semiconductor equipment through an equipment manager that includes a configuration controller, an equipment driver, and a generic equipment interface for communication between the configuration controller and the equipment driver is disclosed. The method includes the steps of providing a production scenario to be written into the production scenario database of the configuration controller, transmitting the production scenario into the equipment behavior database of the equipment driver via the generic equipment interface messages, and transforming the production scenario into equipment rules and SECS II messages via transformation rules set in the database of the equipment driver so as to send these SECS II messages to the equipment for management purposes.

Abstract: A generic service management system is disclosed. The generic service management system comprises a registration scheme; a search-and-execution scheme; and a detection-and-replacement scheme, used for detecting and replacing the invalid service provider, such as a semiconductor equipment manager. The present invention provides a GEV (Generic Evaluator) having the capabilities of error-detecting and data backup, and further combines Jini infrastructure and the programming technology of design by contract. The GEV archives the credit values of all the service providers for letting a client (such as a factory manager) to select a service provider having a higher credit value.