Patents by Inventor Fei Zhou

Fei Zhou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11205721
    Abstract: A semiconductor device and its fabrication method are provided. The method includes providing a base substrate; forming a first well region and a second well region in the base substrate; forming a gate electrode structure, sidewall spacers, a doped source layer, a doped drain layer and a dielectric layer over the base substrate, where the doped source layer and the doped drain layer are respectively on two sides of the gate electrode structure and the sidewall spacers, and the gate electrode structure and the sidewall spacers are over the first well region and the second well region; removing a portion of the gate electrode structure on the second well region and a portion of the base substrate of the second well region to form a trench in the dielectric layer, where the trench exposes a portion of the sidewall spacers; and forming an isolation layer in the trench.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: December 21, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei Zhou
  • Patent number: 11201139
    Abstract: A first semiconductor die includes first semiconductor devices located over a first substrate, first interconnect-level dielectric material layers embedding first metal interconnect structures and located on the first semiconductor devices, and a first pad-level dielectric layer located on the first interconnect-level dielectric material layers and embedding first bonding pads. Each of the first bonding pads includes a first proximal horizontal surface and at least one first distal horizontal surface that is more distal from the first substrate than the first proximal horizontal surface is from the first substrate and has a lesser total area than a total area of the first proximal horizontal surface. A second semiconductor die including second bonding pads that are embedded in a second pad-level dielectric layer can be bonded to a respective distal surface of the first bonding pads.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: December 14, 2021
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Rahul Sharangpani, Raghuveer S. Makala, Adarsh Rajashekhar, Senaka Kanakamedala, Fei Zhou
  • Publication number: 20210375848
    Abstract: Multiple bonded units are provided, each of which includes a respective front-side die and a backside die. The two dies in each bonded unit may be a memory die and a logic die configured to control operation of memory elements in the memory die. Alternatively, the two dies may be memory dies. The multiple bonded units can be attached such that front-side external bonding pads have physically exposed surfaces that face upward and backside external bonding pads of each bonded unit have physically exposed surfaces that face downward. A first set of bonding wires can connect a respective pair of front-side external bonding pads, and a second set of bonding wires can connect a respective pair of backside external bonding pads.
    Type: Application
    Filed: May 28, 2020
    Publication date: December 2, 2021
    Inventors: Fei ZHOU, Raghuveer S. MAKALA, Rahul SHARANGPANI, Adarsh RAJASHEKHAR
  • Patent number: 11189711
    Abstract: A semiconductor device includes a semiconductor substrate; a plurality of semiconductor fin structures formed on the semiconductor substrate; a plurality of gate structures, each formed on a semiconductor fin structure; a source electrode and a drain electrode formed on two opposite sides of each gate structure, wherein, at least a portion of the source electrode and at least a portion of the drain electrode are formed in the semiconductor fin structure; a covering layer formed on the semiconductor fin structures and also on two side surfaces of each gate structure; and an interlayer dielectric layer formed on the covering layer, wherein the interlayer dielectric layer covers each source electrode and each drain electrode, a trench is formed in the interlayer dielectric layer to expose a portion of each semiconductor fin structure, and a gate structure is formed in each trench.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: November 30, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei Zhou
  • Publication number: 20210358942
    Abstract: A method of forming a three-dimensional memory device includes forming an alternating stack of insulating layers and sacrificial material layers over a substrate, forming a memory opening through the alternating stack, forming lateral recesses at levels of the sacrificial material layers around the memory opening, forming a vertical stack of discrete clam-shaped semiconductor liners in the lateral recesses, replacing the vertical stack of discrete clam-shaped semiconductor liners with a vertical stack of inner clam-shaped metallic liners, forming a vertical stack of discrete charge storage elements on the vertical sack of inner clam-shaped metallic liners, forming a tunneling dielectric layer and a vertical semiconductor channel over the vertical stack of discrete charge storage elements and the vertical stack of inner clam-shaped metallic liners, and replacing each of the sacrificial material layers with an electrically conductive layer.
    Type: Application
    Filed: May 18, 2020
    Publication date: November 18, 2021
    Inventors: Adarsh RAJASHEKHAR, Rahul SHARANGPANI, Raghuveer S. MAKALA, Fei ZHOU, Yanli ZHANG
  • Publication number: 20210358931
    Abstract: A memory opening or a line trench is formed through an alternating stack of insulating layers and sacrificial material layers. A memory opening fill structure or a memory stack assembly is formed, which includes a vertical stack of discrete intermediate metallic electrodes formed on sidewalls of the sacrificial material layers, a gate dielectric layer, and a vertical semiconductor channel. Backside recesses are formed by removing the sacrificial material layers selective to the insulating layers, and a combination of a ferroelectric dielectric layer and an electrically conductive layer within each of the backside recesses. The electrically conductive layer is laterally spaced from a respective one of the discrete intermediate metallic electrodes by the ferroelectric dielectric layer. Ferroelectric-metal-insulator memory elements are formed around the vertical semiconductor channel.
    Type: Application
    Filed: May 18, 2020
    Publication date: November 18, 2021
    Inventors: Raghuveer S. MAKALA, Yanli ZHANG, Fei ZHOU, Rahul SHARANGPANI, Adarsh RAJASHEKHAR, Seung-Yeul YANG
  • Publication number: 20210360340
    Abstract: A speaker comprises a housing having an opening; a waterproof sound-transmission membrane disposed on the housing to cover the opening of the housing; a speaker unit housed in the housing, the speaker unit comprising a speaker having a diaphragm; and an annular polymer membrane disposed between the diaphragm and the waterproof sound-transmission membrane, the annular polymer membrane comprising a through-opening in a radial direction with respect to the annular polymer membrane.
    Type: Application
    Filed: January 17, 2018
    Publication date: November 18, 2021
    Inventor: Peng-Fei Zhou
  • Publication number: 20210358952
    Abstract: A memory opening or a line trench is formed through an alternating stack of insulating layers and sacrificial material layers. A memory opening fill structure or a memory stack assembly is formed, which includes a vertical stack of discrete intermediate metallic electrodes formed on sidewalls of the sacrificial material layers, a gate dielectric layer, and a vertical semiconductor channel. Backside recesses are formed by removing the sacrificial material layers selective to the insulating layers, and a combination of a ferroelectric dielectric layer and an electrically conductive layer within each of the backside recesses. The electrically conductive layer is laterally spaced from a respective one of the discrete intermediate metallic electrodes by the ferroelectric dielectric layer. Ferroelectric-metal-insulator memory elements are formed around the vertical semiconductor channel.
    Type: Application
    Filed: May 18, 2020
    Publication date: November 18, 2021
    Inventors: Raghuveer S. Makala, Yanli ZHANG, Fei ZHOU, Rahul SHARANGPANI, Adarsh RAJASHEKHAR, Seung-Yeul YANG
  • Patent number: 11177280
    Abstract: A method of forming a three-dimensional memory device includes forming an alternating stack of insulating layers and sacrificial material layers over a substrate, forming a memory opening through the alternating stack, forming lateral recesses at levels of the sacrificial material layers around the memory opening, forming a vertical stack of discrete clam-shaped semiconductor liners in the lateral recesses, replacing the vertical stack of discrete clam-shaped semiconductor liners with a vertical stack of inner clam-shaped metallic liners, forming a vertical stack of discrete charge storage elements on the vertical sack of inner clam-shaped metallic liners, forming a tunneling dielectric layer and a vertical semiconductor channel over the vertical stack of discrete charge storage elements and the vertical stack of inner clam-shaped metallic liners, and replacing each of the sacrificial material layers with an electrically conductive layer.
    Type: Grant
    Filed: May 18, 2020
    Date of Patent: November 16, 2021
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Adarsh Rajashekhar, Rahul Sharangpani, Raghuveer S. Makala, Fei Zhou, Yanli Zhang
  • Publication number: 20210349588
    Abstract: A mode setting method and a mode setting device for a monitoring system are provided. The mode setting method includes: selecting one or a plurality of monitoring objects; selecting a corresponding display template from preset display templates for each of the one or the plurality of monitoring objects, and associating and packaging each of the one or the plurality of monitoring objects and the selected display template in a one-to-one correspondence, and generating one or a plurality of single display units; selecting a single display unit from the generated single display units according to a monitoring scene; and placing the selected single display unit into a corresponding block of a monitoring interface layout of the monitoring system, and storing the same.
    Type: Application
    Filed: July 23, 2021
    Publication date: November 11, 2021
    Applicant: OPPLE LIGHTING CO., LTD.
    Inventors: Xiaohua TU, Fei ZHOU, Changfu XUE
  • Patent number: 11171097
    Abstract: A bonded assembly includes a first semiconductor die containing a first substrate, first semiconductor devices, and first bonding pads that are electrically connected to a respective node of the first semiconductor devices, a second semiconductor die containing a second substrate, second semiconductor devices, and second bonding pads that are electrically connected to a respective node of the second semiconductor devices and bonded to a respective one of the first bonding pads, and at least one metal-organic framework (MOF) dielectric layer that laterally surrounds at least one of the first bonding pads and the second bonding pads.
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: November 9, 2021
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Ramy Nashed Bassely Said, Raghuveer S. Makala, Senaka Kanakamedala, Fei Zhou, Yao-Sheng Lee
  • Patent number: 11171144
    Abstract: A semiconductor structure and a method for forming same are provided, the method including: providing a base including a substrate and a fin protruding from the substrate, the substrate including a P-type logic region and a pull up transistor region; forming a gate layer across the fin; forming a mask spacer covering a side wall of a fin in the pull up transistor region and a side wall of a portion of a fin in the P-type logic region; removing a portion of thicknesses of the fins on both sides of the gate layer using the mask spacer as a mask, to form a groove enclosed by the fin and the mask spacer in the P-type logic region and a straight slot penetrating the fin and the mask spacer in the pull up transistor region along a direction perpendicular to the side wall of the fin; and forming a P-type source/drain doped layer in the groove and the straight slot.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: November 9, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei Zhou
  • Patent number: 11164890
    Abstract: A semiconductor structure includes layer stack structures laterally extending along a first horizontal direction and spaced apart from each other along a second horizontal direction by line trenches. Each of the layer stack structures includes at least one instance of a unit layer sequence that includes, from bottom to top or top to bottom, a doped semiconductor source strip, a channel-level insulating strip, and a doped semiconductor drain strip. Line trench fill structures are located within a respective one of the line trenches. Each of the line trench fill structures includes a laterally-alternating sequence of memory pillar structures and dielectric pillar structures. Each of the memory pillar structures includes a gate electrode, at least one pair of ferroelectric dielectric layers, and at least one pair of vertical semiconductor channels located at each level of the channel-level insulating strips.
    Type: Grant
    Filed: January 9, 2020
    Date of Patent: November 2, 2021
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Yanli Zhang, Johann Alsmeier, Fei Zhou
  • Patent number: 11164798
    Abstract: Semiconductor devices and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate having a first device region and a second device region; forming a first doped layer on the semiconductor substrate; forming a first fin layer on the first doped layer in the first device region; forming a second fin layer on the first doped layer in the second device region; forming a first isolation layer on the first doped layer in the first device region and covering sidewall surfaces of the first fin layer; forming a second isolation layer on the second doped layer in the second device region and covering portions of sidewall surfaces of the second fin layer and with a thickness smaller than a thickness of the first isolation layer; and forming a first gate structure on the first isolation layer and a second gate structure on the second isolation layer.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: November 2, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei Zhou
  • Publication number: 20210327889
    Abstract: An alternating stack of insulating layers and spacer material layers can be formed over a substrate. The spacer material layers may be formed as, or may be subsequently replaced with, electrically conductive layers. A memory opening can be formed through the alternating stack, and annular lateral recesses are formed at levels of the insulating layers. Metal portions are formed in the annular lateral recesses, and a semiconductor material layer is deposited over the metal portions. Metal-semiconductor alloy portions are formed by performing an anneal process, and are subsequently removed by performing a selective etch process. Remaining portions of the semiconductor material layer include a vertical stack of semiconductor material portions, which may be optionally converted, partly or fully, into silicon nitride material portions. The semiconductor material portions and/or the silicon nitride material portions can be employed as discrete charge storage elements.
    Type: Application
    Filed: April 15, 2020
    Publication date: October 21, 2021
    Inventors: Raghuveer S. MAKALA, Senaka KANAKAMEDALA, Fei ZHOU, Yao-Sheng LEE
  • Publication number: 20210327767
    Abstract: A semiconductor structure and a method for forming same are provided. One form of the forming method includes: providing a base, the base including: a substrate and a channel stack on the substrate, the channel stack including a first channel layer and a second channel layer located on the first channel layer, the first channel layer and the second channel layer being made of different materials, and a first region and a second region, where the channel stack is located in the first region and the second region; forming an interlayer dielectric layer on the substrate exposed from the channel stack, where a gate opening from which the channel stack is exposed is formed in the interlayer dielectric layer; removing the second channel layer of the first region in the gate opening; removing the first channel layer of the second region in the gate opening; and forming a gate structure surrounding a remainder of the first channel layer and the second channel layer.
    Type: Application
    Filed: March 31, 2021
    Publication date: October 21, 2021
    Applicants: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei ZHOU
  • Publication number: 20210327890
    Abstract: An alternating stack of insulating layers and spacer material layers can be formed over a substrate. The spacer material layers may be formed as, or may be subsequently replaced with, electrically conductive layers. A memory opening can be formed through the alternating stack, and annular lateral recesses are formed at levels of the insulating layers. Metal portions are formed in the annular lateral recesses, and a semiconductor material layer is deposited over the metal portions. Metal-semiconductor alloy portions are formed by performing an anneal process, and are subsequently removed by performing a selective etch process. Remaining portions of the semiconductor material layer include a vertical stack of semiconductor material portions, which may be optionally converted, partly or fully, into silicon nitride material portions. The semiconductor material portions and/or the silicon nitride material portions can be employed as discrete charge storage elements.
    Type: Application
    Filed: April 15, 2020
    Publication date: October 21, 2021
    Inventors: Raghuveer S. MAKALA, Senaka KANAKAMEDALA, Fei ZHOU, Yao-Sheng LEE
  • Patent number: 11152492
    Abstract: Semiconductor devices and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate having a logic region and a peripheral region; forming initial fins on the semiconductor substrate; forming a protective layer on the sidewall surfaces of the initial fin in the peripheral region; removing the initial fin in the peripheral region to form a trench with a bottom surface lower than a top surface of the isolation structure; forming a modified fin made of a single material in the trench; removing the protective layer; forming a first gate structure having a first gate dielectric layer and surrounding the first fin layers in the logic region across the initial fin in the logic region; and forming a second gate structure having a second gate dielectric layer with a thickness greater than a thickness of the first gate dielectric layer across the modified fins.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: October 19, 2021
    Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Fei Zhou
  • Patent number: 11145756
    Abstract: A semiconductor structure and a method for forming a semiconductor structure are disclosed. A forming method may include: providing a base, including a first region used to form a well region and a second region used to form a drift region, where the first region is adjacent to the second region; and patterning the base, to form a substrate and fins protruding out of the substrate, where the fins include first fins located at a junction of the first region and the second region and second fins located on the second region, where the quantity of the second fins is greater than the quantity of the first fins. In some implementations of the present disclosure, the quantity of the second fins is increased to correspondingly increase the length of a flow path in which a current flows from a drain region to a source region, thereby reducing a voltage drop in the current flow path, and further improving a breakdown voltage of an LDMOS, to improve the device performance of the LDMOS.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: October 12, 2021
    Assignees: Semiconductor Manufacturing (Beijing) International Corporation, Semiconductor Manufacturing (Shanghai) International Corporation
    Inventor: Fei Zhou
  • Patent number: 11145736
    Abstract: Semiconductor devices and fabrication methods thereof are provided. An exemplary semiconductor device includes a base substrate; a gate structure group, having a plurality of gate structures, formed over the base substrate; first source/drain doping regions formed in the base substrate between adjacent gate structures; second source/drain doping regions formed in the base substrate at two sides of the gate structure group, respectively; a first conductive layer formed on a surface of each of the first source/drain doping regions. The second source/drain doing regions at one side of the gate structure group are electrically connected with source voltages; and the second source/drain doping regions at other side of the gate structure group are electrically connected with drain voltages.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: October 12, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei Zhou