Patents by Inventor Fen Wan

Fen Wan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11945966
    Abstract: A photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material may comprise at least one first polymerizable monomer having a structure of Formula (1): (R1)x—Ar—(R2)y (1), with Ar being one or more substituted or unsubstituted aromatic rings; R1 being a structure covalently bonded to Ar including at least one acrylate group; x being 1-4; and R2 being —CH?CH2 or —CCH3=CH2 covalently bonded to Ar; y being 1-4.
    Type: Grant
    Filed: December 9, 2021
    Date of Patent: April 2, 2024
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Fen Wan, Weijun Liu
  • Patent number: 11945893
    Abstract: A curable composition can comprise a polymerizable material including a monomer of Formula (1), with R being H or alkyl or alkylaryl, n being 1-4, m being 0-6, X1 being C1-C6 substituted or unsubstituted alkyl, X2 being CH3 or H, After forming a cured layer of the curable composition, the cured layer can have an excellent etch resistance.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: April 2, 2024
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Fen Wan, Weijun Liu, Gary F. Doyle
  • Publication number: 20240069438
    Abstract: An object is to provide a photo-curable composition having high dry etching resistance and high thermal stability. A photo-curable composition includes at least a polymerizable compound and a photopolymerization initiator, and further includes at least one of a flame retarder and a flame-retardant polymerizable compound.
    Type: Application
    Filed: October 27, 2023
    Publication date: February 29, 2024
    Inventors: Toshiki Ito, Fen Wan
  • Publication number: 20240052183
    Abstract: A photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material can comprise at least one multi-functional acrylate monomer in an amount of at least 75 wt % based on the total weight of the polymerizable material and at least one mono-functional monomer in an amount of at least 5 wt % based on the total weight of the polymerizable material. The at least one mono-functional monomer can have a ring parameter of at least 0.5, and a total carbon content of the photocurable composition after curing may be at least 69%. The photocurable composition may have a low thermal shrinkage after curing, a high etch resistance and be suitable for AIP or NIL processing.
    Type: Application
    Filed: August 9, 2022
    Publication date: February 15, 2024
    Inventors: Fei LI, Fen Wan, Timothy Brian STACHOWIAK, Weijun LIU
  • Patent number: 11835858
    Abstract: An object is to provide a photo-curable composition having high dry etching resistance and high thermal stability. A photo-curable composition includes at least a polymerizable compound (A) and a photopolymerization initiator (B), and further includes at least one of a flame retarder (E) and a flame-retardant polymerizable compound (F).
    Type: Grant
    Filed: May 14, 2021
    Date of Patent: December 5, 2023
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Toshiki Ito, Fen Wan
  • Publication number: 20230374167
    Abstract: A photocurable composition can comprise a polymerizable material and at least one photoinitiator, wherein the polymerizable material comprises a multi-functional vinylbenzene monomer in an amount of at least 30 wt % based on the total weight of the polymerizable material and the at least one photoinitiator includes an oxime ester compound. The photocurable composition can be adapted that a UV shrinkage after forming a photo-cured layer at 23° C. is not greater than 4.0%; and that a thermal shrinkage after conducting a baking treatment of the photo-cured layer at 350° C. is not greater than 3.5%.
    Type: Application
    Filed: May 18, 2022
    Publication date: November 23, 2023
    Inventors: Fen Wan, Weijun Liu, Timothy Brian Stachowiak
  • Patent number: 11753497
    Abstract: In one embodiment, a photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material includes an isocyanate group containing compound of formula (1): R1-R2-N?C?O (1), with R1 including a carbon-carbon double bond, and R2 being substituted or unsubstituted alkyl, aryl, or alkylaryl. An amount of 1 wt % to 10 wt % of the isocyanate group containing compound can cause a strong adhesion strength of the photocurable composition to a silicon substrate after curing, and may allow the omission of an adhesion layer between substrate and the photo-cured layer.
    Type: Grant
    Filed: April 29, 2021
    Date of Patent: September 12, 2023
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Fen Wan, Weijun Liu
  • Publication number: 20230257617
    Abstract: A photocurable composition can comprise a polymerizable material, and a photoinitiator, wherein the polymerizable material can comprise at least one polymerizable monomer and at least one reactive polymer. The reactive polymer can have a carbon content of at least 75% based on the total weight of the reactive polymer; a molecular weight of the at least one reactive polymer can be at least 400 g/mol and not greater than 50,000 g/mol; an amount of the reactive polymer may be at least 5 wt %; and a viscosity of the photocurable composition may be not greater than 100 mPa·s. The photocurable composition may have a low linear shrinkage after curing, a high carbon content and high etch resistance and being suitable for AIP or NIL processing.
    Type: Application
    Filed: February 17, 2022
    Publication date: August 17, 2023
    Inventors: Fen WAN, Timothy Brian STACHOWIAK, Weijun LIU
  • Publication number: 20230257496
    Abstract: A photocurable composition can comprise a polymerizable material, at least one non-reactive polymer, and a photoinitiator, wherein the non-reactive polymer can have a carbon content of at least 80% based on the total weight of the non-reactive polymer; a molecular weight of the at least one non-reactive polymer can be at least 750 g/mol and not greater than 20,000 g/mol; an amount of the non-reactive polymer may be at least 10 wt % and not greater than 30 wt %; and a viscosity of the photocurable composition may be not greater than 110 mPa·s. The photocurable composition may have a low linear shrinkage after curing, a high carbon content and high etch resistance and being suitable for AIP or NIL processing.
    Type: Application
    Filed: February 11, 2022
    Publication date: August 17, 2023
    Inventors: Timothy Brian STACHOWIAK, Fen WAN, Weijun LIU
  • Publication number: 20230203210
    Abstract: A photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material can comprise a first polymerizable monomer having a structure of Formula (1) or Formula (2): with X being C1-C4-alkyl or oxygen (O); n being 0 or 1 Y1, Y2 being with R3 or, with R3 being H or methyl, wherein Y1 and Y2 may be the same or different and an amount of Y1 and Y2 per benzene ring being 1, 2, or 3; R1, R2 being substituted or unsubstituted alkyl or aryl, and an amount of each of R1 and R2 per benzene ring being 0, 1, 2, 3, or 4.
    Type: Application
    Filed: December 27, 2021
    Publication date: June 29, 2023
    Inventors: Fen WAN, Weijun LIU
  • Publication number: 20230183492
    Abstract: A photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material may comprise at least one first polymerizable monomer having a structure of Formula (1): (R1)x—Ar—(R2)y (1), with Ar being one or more substituted or unsubstituted aromatic rings; R1 being a structure covalently bonded to Ar including at least one acrylate group; x being 1-4; and R2 being —CH?CH2 or —CCH3=CH2 covalently bonded to Ar; y being 1-4.
    Type: Application
    Filed: December 9, 2021
    Publication date: June 15, 2023
    Inventors: Fen Wan, Weijun Liu
  • Patent number: 11597781
    Abstract: A photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material can comprise at least one acrylate monomer including at least one cyano group (CN-acrylate monomer). The presence of a low amount of the CN-acrylate monomer between 10 wt % and not greater than 30 wt % can lower the contact angle of the composition and may improve the etch resistance of a photo-cured layer made from the photocurable composition.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: March 7, 2023
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Fen Wan, Weijun Liu
  • Publication number: 20230021464
    Abstract: A photocurable composition can comprise a polymerizable material, a fullerene or fullerene derivative in an amount of at least 0.2 wt % and not greater than 5.0 wt %, and a photoinitiator and may be adapted for AIP or NIL processing. A photo-cured layer made from the photocurable composition can have an improved thermal stability in comparison to a photo-cured layer made from the same photocurable composition except not containing a fullerene or fullerene derivative.
    Type: Application
    Filed: July 16, 2021
    Publication date: January 26, 2023
    Inventors: Fen WAN, Weijun LIU
  • Patent number: 11549020
    Abstract: A curable composition comprises at least 10 wt % expanding monomers based on a total weight of the curable composition, at least 25 wt % acrylate monomers based on the total weight of the curable composition, a photoinitiator, and a photosensitizer. The acrylate monomers have a molecular weight of 500 or less. The curable composition has a viscosity of 10 cP or less. A total amount of the expanding monomers and the acrylate monomers are at least 90 wt % based on the total weight of the curable composition.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: January 10, 2023
    Assignee: Canon Kabushiki Kaisha
    Inventors: Fen Wan, Weijun Liu
  • Publication number: 20220363807
    Abstract: In one embodiment, a photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material includes an isocyanate group containing compound of formula (1): R1-R2-N?C?O (1), with R1 including a carbon-carbon double bond, and R2 being substituted or unsubstituted alkyl, aryl, or alkylaryl. An amount of 1 wt % to 10 wt % of the isocyanate group containing compound can cause a strong adhesion strength of the photocurable composition to a silicon substrate after curing, and may allow the omission of an adhesion layer between substrate and the photo-cured layer.
    Type: Application
    Filed: April 29, 2021
    Publication date: November 17, 2022
    Inventors: Fen WAN, Weijun LIU
  • Patent number: 11434312
    Abstract: A photocurable composition can comprise a polymerizable material and a photo-initiator, wherein the polymerizable material can comprise at least one multi-functional vinylbenzene in an amount of 15 wt % to 85 wt % and at least one multi-functional acrylate monomer in an amount of 15 wt % to 85 wt % based on the total weight of the photocurable composition. A photo-cured layer of the photocurable composition can have a high heat stability up to 400° C. and a glass transition temperature of at least 135° C.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: September 6, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Fen Wan, Weijun Liu, Fei Li, Timothy Brian Stachowiak
  • Patent number: 11434313
    Abstract: A curable composition can comprise a polymerizable material and a photo-initiator, wherein the polymerizable material can comprise a first monomer including at least one bismaleimide-monomer and at least one second monomer. The curable composition can have a viscosity of not greater than 30 mPa·s, and a cured layer of the curable composition can have a high thermal stability up to 350° C.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: September 6, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Fei Li, Timothy Brian Stachowiak, Fen Wan, Weijun Liu
  • Publication number: 20220236640
    Abstract: A photocurable composition can comprise a polymerizable material, an organic ionic compound and a photoinitiator, wherein an amount of the organic ionic compound may be not greater than 1.5 wt %, the organic ionic compound comprises an organic cation, and a conductivity of the photocurable composition can be at least 20 ?S/cm. The photocurable composition can have an improved drop spreading and merging of drops in comparison to the same composition but not including the organic ionic compound.
    Type: Application
    Filed: January 28, 2021
    Publication date: July 28, 2022
    Inventors: Fen WAN, Weijun LIU
  • Publication number: 20220204659
    Abstract: A photocurable coraposition can comprise a polyme.aizable material and a photoinitiator, wherein the polymerizahle material can comprise at least one acrylate monomer including at least one cyano group (CN-acrylate monomer). The presence of a low amount of the CN-acrylate monomer between 10 wt% and not greater than 30 wt% can lower the contact angle of the composition and may improve the etch resistance of a photo-cured layer made from the photocurable composition.
    Type: Application
    Filed: December 29, 2020
    Publication date: June 30, 2022
    Inventors: Fen WAN, Weijun LIU
  • Publication number: 20220185915
    Abstract: A curable composition can comprise a polymerizable material and a photo-initiator, wherein the polymerizable material can comprise a first monomer including at least one bismaleimide-monomer and at least one second monomer. The curable composition can have a viscosity of not greater than 30 mPa·s, and a cured layer of the curable composition can have a high thermal stability up to 350° C.
    Type: Application
    Filed: December 16, 2020
    Publication date: June 16, 2022
    Inventors: Fei LI, Timothy Brian STACHOWIAK, Fen Wan, Weijun LIU