Patents by Inventor Feng Shao

Feng Shao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070077676
    Abstract: A method of fabricating a pressure sensor. An SOI wafer having a single crystalline silicon layer, an insulating layer and a silicon substrate is provided. The single crystalline silicon layer has a pressure sensing device. The silicon substrate and the insulating layer corresponding to the pressure sensing device are removed to form a cavity. A bonding substrate is adhered to the silicon substrate with a bonding layer.
    Type: Application
    Filed: March 15, 2006
    Publication date: April 5, 2007
    Inventors: Shih-Feng Shao, Chen-Hsiung Yang
  • Patent number: 7192842
    Abstract: A first wafer is provided, and a photosensitive masking-and-bonding pattern is formed on the surface of the first wafer. Then, an etching process using the photosensitive masking-and-bonding pattern as a hard mask is performed to form a wafer pattern on the surface of the first wafer. Finally, the first wafer is bonded to a second wafer with the photosensitive masking-and-bonding pattern.
    Type: Grant
    Filed: January 20, 2005
    Date of Patent: March 20, 2007
    Assignee: Touch Micro-Systems Technology Inc.
    Inventors: Shih-Feng Shao, Hsin-Ya Peng, Chen-Hsiung Yang
  • Publication number: 20060276006
    Abstract: A method of segmenting a wafer. A device wafer is provided, and a medium layer is formed on the upper surface of the device wafer. Then, a carrier wafer is provided, and the medium layer is mounted on the surface of the carrier wafer. Subsequently, a segment process is performed to form a plurality of dies, and meanwhile these dies are mounted on the medium layer. Thereafter, the carrier wafer is departed from the medium layer, the dies are bonded to an extendable film, and the medium layer is removed.
    Type: Application
    Filed: October 20, 2005
    Publication date: December 7, 2006
    Inventors: Chen-Hsiung Yang, Shih-Feng Shao, Hong-Da Chang
  • Publication number: 20060091044
    Abstract: A process for the inhibition of corrosion caused by naphthenic acid during the elevated temperature processing of crude oil or the high temperature distillates derived therefrom by use of a treatment comprising (I) tetra functional substituted aromatic compounds and (II) esters or anhydrides of trimellitic acid.
    Type: Application
    Filed: November 2, 2004
    Publication date: May 4, 2006
    Applicant: General Electric Company
    Inventors: Scott Lehrer, S. Pruett, Liliana Minevski, James Edmondson, Alan Goliaszewski, Feng Shao
  • Publication number: 20060084238
    Abstract: A first wafer is provided, and a photosensitive masking-and-bonding pattern is formed on the surface of the first wafer. Then, an etching process using the photosensitive masking-and-bonding pattern as a hard mask is performed to form a wafer pattern on the surface of the first wafer. Finally, the first wafer is bonded to a second wafer with the photosensitive masking-and-bonding pattern.
    Type: Application
    Filed: January 20, 2005
    Publication date: April 20, 2006
    Inventors: Shih-Feng Shao, Hsin-Ya Peng, Chen-Hsiung Yang
  • Publication number: 20060057775
    Abstract: A method of forming a wafer backside interconnecting wire includes forming a mask layer on the back surface, the mask layer including at least an opening corresponding to the bonding pad, performing a first etching process from the back surface to remove the wafer unprotected by the mask layer to form a recess, removing the mask layer, and forming an interconnecting wire on the back surface.
    Type: Application
    Filed: November 19, 2004
    Publication date: March 16, 2006
    Inventors: Shih-Feng Shao, Chen-Hsiung Yang, Hsin-Ya Peng
  • Patent number: 7008821
    Abstract: A method of forming a wafer backside interconnecting wire includes forming a mask layer on the back surface, the mask layer including at least an opening corresponding to the bonding pad, performing a first etching process from the back surface to remove the wafer unprotected by the mask layer to form a recess, removing the mask layer, and forming an interconnecting wire on the back surface.
    Type: Grant
    Filed: November 19, 2004
    Date of Patent: March 7, 2006
    Assignee: Touch Micro-System Technology Inc.
    Inventors: Shih-Feng Shao, Chen-Hsiung Yang, Hsin-Ya Peng
  • Publication number: 20060030120
    Abstract: First, a wafer having a first surface and a second surface is provided. Then, a first heat sensitive tape is utilized to bond the second surface of the wafer to a first carrier, and at least a first semiconductor process is performed upon the first surface of the wafer. Subsequently, a second heat sensitive tape is utilized to bond the first surface of the wafer to a second carrier, and the first heat sensitive tape is separated from the second surface of the wafer by heating. Following that, at least a second semiconductor process is performed upon the second surface of the wafer, and the second heat sensitive tape is separated from the first surface of the wafer by heating.
    Type: Application
    Filed: November 24, 2004
    Publication date: February 9, 2006
    Inventors: Shih-Feng Shao, Chih-Ping Kuo
  • Publication number: 20060030130
    Abstract: A wafer supported by a carrier is provided where a bonding layer and an extendable film are disposed in between the carrier and the wafer. Then, a photoresist pattern is formed on a surface of the wafer to define scribe lines of the wafer. Following that, an anisotropic etching process is performed to remove the wafer uncovered by the photoresist pattern to form a plurality of dies. Finally the bonding layer is separated from the carrier.
    Type: Application
    Filed: October 19, 2004
    Publication date: February 9, 2006
    Inventors: Shih-Feng Shao, Chen-Hsiung Yang, Hsin-Ya Peng
  • Publication number: 20050215029
    Abstract: A method for fixing a wafer used in a manufacturing procedure is provided. The method includes steps of a) providing the wafer, a handling carrier, and a thermal release tape, wherein the wafer has a first and a second surfaces; b) adhering the thermal release tape between the first surface and the handling carrier for fixing the wafer on the handling carrier; c) performing the manufacturing procedure on the second surface; and d) separating the thermal release tape, the first surface and the handling carrier from one another above a specific temperature.
    Type: Application
    Filed: October 25, 2004
    Publication date: September 29, 2005
    Inventors: Hsin-Ya Peng, Hsien-Lung Ho, Shih-Feng Shao
  • Publication number: 20040182543
    Abstract: The invention discloses a sectional arrangement of heat dissipating plates for notebook computer. The arrangement consists of a plurality of heat dissipating plates each having at least two holding means. Each holding means has a Y-shaped member having a stem and a pair of arms, and an engaging opening. In assembly, the pairs of arms of all holding means are able to be pressed inwardly through each corresponding engaging opening until each heat dissipating plate is engaged by its neighboring heat dissipating plate.
    Type: Application
    Filed: July 23, 2003
    Publication date: September 23, 2004
    Applicant: KUNSHAN ANLI PRECISE METAL CO., LTD.
    Inventor: Shi-Feng Shao