Abstract: In one aspect of the invention is a method to create a vacuum seal with extended lifetime to form a dielectric break in a vacuum chamber. The method includes the use of an elastic dielectric seal to form a high vacuum seal. It also includes the use of different means to protect the vacuum seal from direct exposure to the plasma and to reactive gases present inside the plasma chamber. Furthermore, it includes the use of elements to ensure a proper compression of the elastic seal, and to avoid its expansion or contraction when the pressures on both sides of the seal are different.

Abstract: The invention relates to a method for providing a direct estimation of the power delivered to the plasma in a TCP source. According to one embodiment, an apparatus is described. The apparatus includes a vacuum chamber and an electrical transformer to induce an electromagnetic field within the vacuum chamber. The transformer includes a primary winding, a secondary winding formed by the plasma loop, and a separate secondary winding implemented to measure the voltage along the plasma loop. The apparatus also includes a current transformer to measure the current flow through the plasma loop.

Abstract: According to one embodiment, an apparatus is described. The apparatus includes a metal vacuum chamber with two or more dielectric breaks. It also includes a number of excitation transformers located so as to distribute the total induced voltage in the chamber among the dielectric breaks. Distributing the total induced voltage among the breaks results in lower wall damage and, consequently, longer lifetimes for the plasma chambers.