Patents by Inventor Frank Holsteyns

Frank Holsteyns has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for removing a liquid from a surface of a substrate
    Publication number: 20040045589
    Abstract: A method and apparatus for removing a first liquid from a surface of a substrate is provided. A second liquid is supplied to at least part of a surface of a substrate having a rotary movement. The rotary movement has a center of rotation and an edge of rotation. The second liquid is directed from the center of rotation to the edge of rotation using a nozzle. A dry zone is created on the substrate as the position of the spray moves from the center of rotation to the edge of rotation. As a result, the first liquid and the second liquid are removed from the surface of the substrate.
    Type: Application
    Filed: May 6, 2003
    Publication date: March 11, 2004
    Applicant: IMEC vzw
    Inventors: Frank Holsteyns, Marc Heyns, Paul W. Mertens