Patents by Inventor Franz Hirler

Franz Hirler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11876133
    Abstract: A silicon carbide device includes a transistor cell with a source region and a gate electrode. The source region is formed in a silicon carbide body and has a first conductivity type. A first low-resistive ohmic path electrically connects the source region and a doped region of a second conductivity type. The doped region and a floating well of the first conductivity type form a pn junction. A first clamp region having the second conductivity type extends into the floating well. A second low-resistive ohmic path electrically connects the first clamp region and the gate electrode.
    Type: Grant
    Filed: September 29, 2021
    Date of Patent: January 16, 2024
    Assignee: Infineon Technologies AG
    Inventors: Joachim Weyers, Franz Hirler, Wolfgang Jantscher, David Kammerlander, Ralf Siemieniec
  • Patent number: 11869966
    Abstract: A method includes forming a trench in a first surface in an edge region of a semiconductor body, forming a plurality of superjunction transistor cells in an inner region of a semiconductor body, and forming an insulation layer on the first surface of the semiconductor body in the edge region and in the inner region, wherein forming the insulation layer includes a thermal oxidation process.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: January 9, 2024
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Christian Fachmann, Franz Hirler, Winfried Kaindl, Markus Rochel
  • Patent number: 11728790
    Abstract: Electronic circuits are disclosed. One electronic circuit includes: a transistor device having a load path and a drive input; a first drive circuit configured to receive a supply voltage and generate a drive signal for the transistor device based on the supply voltage; and a biasing circuit connected in parallel with the load path of the transistor device. The biasing circuit includes a bias voltage circuit configured to receive the supply voltage and generate a bias voltage higher than the supply voltage based on the supply voltage.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: August 15, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Franz Hirler, Matteo-Alessandro Kutschak, Andreas Riegler
  • Patent number: 11699725
    Abstract: A semiconductor device includes a gate structure extending from a first surface of a semiconductor portion into a mesa section between neighboring field electrode structures and an alignment layer formed on the first surface. The alignment layer includes mask pits formed in the alignment layer in a vertical projection of the field electrode structures. Sidewalls of the mask pits have a smaller tilt angle with respect to the first surface than sidewalls of the field electrode structures. The gate structure is in the vertical projection of a gap between neighboring mask pits.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: July 11, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Martin Poelzl, Oliver Blank, Franz Hirler, Maximilian Roesch, Li Juin Yip
  • Patent number: 11682696
    Abstract: A semiconductor device includes a layer stack with first and second semiconductor layers of complementary doping types are arranged alternatingly between first and second surfaces of the layer stack. A first semiconductor region adjoins the first semiconductor layers and has a first end arranged in a first device region and extends from the first end into a second device region. Second semiconductor regions adjoin at least one of the second semiconductor layers. A third semiconductor region adjoins the first semiconductor layers. The first semiconductor region extends from the first device region into the second device region and is spaced apart from the third semiconductor region. The second semiconductor regions are arranged between, and spaced apart from, the third and first semiconductor regions.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: June 20, 2023
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Ahmed Mahmoud, Franz Hirler, Marco Mueller, Rolf Weis
  • Patent number: 11682695
    Abstract: A semiconductor device includes a layer stack with first semiconductor layers and second semiconductor layers of opposite doping types arranged alternatingly. A first semiconductor region of a first semiconductor device adjoins the first semiconductor layers, and has a first end arranged in a first region of the first semiconductor device and extends from the first end into a second region of the first semiconductor device. Second semiconductor regions of the first semiconductor device adjoin at least one of the second semiconductor layers. A third semiconductor region of the first semiconductor device adjoins the first semiconductor layers. The first semiconductor region extends from the first region into the second region and is spaced apart from the third semiconductor region. The second semiconductor regions are arranged between, and spaced apart from, the third and first semiconductor regions.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: June 20, 2023
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Ahmed Mahmoud, Franz Hirler, Marco Mueller, Rolf Weis
  • Patent number: 11652137
    Abstract: A semiconductor device includes transistor cells formed along a first surface at a front side of a semiconductor body and having body regions of a first conductivity type, a drift region of a second conductivity type that is opposite from the first conductivity type and is disposed between the body regions and a second surface of the semiconductor body that is opposite from the first surface, and an emitter layer of the second conductivity type that is disposed between the drift region and a second surface of the semiconductor body, the emitter layer having a higher dopant concentration than the drift region, a metal drain electrode directly adjoining the emitter layer. The metal drain electrode comprises spikes extending into the emitter layer.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: May 16, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Enrique Vecino Vazquez, Franz Hirler, Manfred Pippan, Daniel Pobig, Patrick Schindler
  • Publication number: 20230126534
    Abstract: A transistor device is disclosed.
    Type: Application
    Filed: January 19, 2021
    Publication date: April 27, 2023
    Inventors: Hans Weber, Björn Fischer, Franz Hirler, Matteo-Alessandro Kutschak, Andreas Riegler
  • Publication number: 20230127508
    Abstract: A semiconductor device includes a transistor array and a sense pad. The transistor array includes a plurality of transistor cells electrically connected in parallel between a source electrode and a drain structure. The drain structure is formed in a semiconductor portion based on a single-crystalline wide bandgap material. A sense element formed from the wide bandgap material includes at least one rectifying junction electrically connected between the sense pad and the source electrode.
    Type: Application
    Filed: October 20, 2022
    Publication date: April 27, 2023
    Inventors: Joachim Weyers, Franz Hirler
  • Publication number: 20230075897
    Abstract: An electronic circuit is disclosed. The electronic circuit includes: a half-bridge with a first transistor device (1) and a second transistor device (1a); a first biasing circuit (3) connected in parallel with a load path of the first transistor device (1) and comprising a first electronic switch (31); a second biasing circuit (3a) connected in parallel with a load path of the second transistor device (1a) and comprising a second electronic switch (31a); and a drive circuit arrangement (DRVC). The drive circuit arrangement (DRVC) is configured to receive a first half-bridge input signal (Sin) and a second half-bridge input signal (Sina), drive the first transistor device (1) and the second electronic switch (31a) based on the first half-bridge input signal (Sin), and drive the second transistor device (1a) and the first electronic switch (31) based on the second half-bridge input signal (Sina).
    Type: Application
    Filed: March 5, 2021
    Publication date: March 9, 2023
    Inventors: Hans Weber, Franz Hirler, Matteo-Alessandro Kutschak, Manfred Pippan, Andreas Riegler
  • Publication number: 20230055891
    Abstract: In an embodiment, a transistor device comprises a semiconductor body comprising a plurality of transistor cells comprising a drift region of a first conductivity type, a body region of a second conductivity type forming a first pn junction with the drift region, the second conductivity type opposing the first conductivity type, a source region of the first conductivity type forming a second pn junction with the body region, a columnar field plate trench extending into a major surface of a semiconductor body and comprising a columnar field plate and a gate trench structure extending into the major surface of the semiconductor body and comprising a gate electrode. At least one of the depth and doping level of the body region locally varies within the transistor cell to improve VGSTH homogeneity within the transistor cell.
    Type: Application
    Filed: February 7, 2020
    Publication date: February 23, 2023
    Inventors: Oliver Blank, Cesar Augusto Braz, Yan Gao, Olivier Guillemant, Franz Hirler, David Laforet, Peter Lagger, Cédric Ouvrard, Elias Pree, Li Juin Yip
  • Publication number: 20230006059
    Abstract: A transistor device includes a semiconductor substrate having a first major surface, a cell field, and an edge termination region laterally surrounding the cell field. The cell field includes elongate trenches that extend from the first major surface into the semiconductor substrate and that are positioned substantially parallel to one another such that one or more inner elongate trenches are arranged between two outermost elongate trenches and elongate mesas, each elongate mesa being formed between neighbouring elongate trenches. The elongate mesas include a drift region, a body region on the drift region and a source region on the body region. In a top view, one or both of the outermost elongate trenches has a different contour from the one or more inner elongate trenches.
    Type: Application
    Filed: June 23, 2022
    Publication date: January 5, 2023
    Inventors: Stefan Tegen, Alessandro Ferrara, Franz Hirler, Andrei Josiek, Matthias Kroenke
  • Patent number: 11527608
    Abstract: A method for forming a superjunction transistor device includes: forming a plurality of semiconductor layers one on top of the other; implanting dopant atoms of a first doping type into each semiconductor layer to form first implanted regions in each semiconductor layer; implanting dopant atoms of a second doping type into each semiconductor layer to form second implanted regions in each semiconductor layer. Each of implanting the dopant atoms of the first and second doping types into each semiconductor layer includes forming a respective implantation mask on a respective surface of each semiconductor layer, and at least one of forming the first implanted regions and the second implanted regions in at least one of the semiconductor layers includes a tilted implantation process which uses an implantation vector that is tilted by a tilt angle relative to a normal of the respective horizontal surface of the respective semiconductor layer.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: December 13, 2022
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Franz Hirler, Wolfgang Jantscher, Yann Ruet, Armin Willmeroth
  • Publication number: 20220384567
    Abstract: A transistor arrangement is disclosed. The transistor arrangement includes a first transistor device and a second transistor device. The first transistor device and the second transistor device are connected in series and integrated in a common semiconductor body. The first transistor device is a lateral superjunction transistor device and is integrated in a first device region of the semiconductor body. The second transistor device is a lateral transistor device and is integrated in at least one second device region of the semiconductor body. The at least one second device region is spaced apart from the first device region.
    Type: Application
    Filed: May 17, 2022
    Publication date: December 1, 2022
    Inventors: Rolf Weis, Franz Hirler, Katarzyna Kowalik-Seidl, Marco Mueller, Anthony Sanders
  • Patent number: 11515414
    Abstract: A semiconductor device includes an electrical device and has an output capacitance characteristic with at least one output capacitance maximum located at a voltage larger than 5% of a breakdown voltage of the semiconductor device. The output capacitance maximum is larger than 1.2 times an output capacitance at an output capacitance minimum located at a voltage between the voltage at the output capacitance maximum and 5% of a breakdown voltage of the semiconductor device.
    Type: Grant
    Filed: August 5, 2020
    Date of Patent: November 29, 2022
    Assignee: Infineon Technologies Austria AG
    Inventor: Franz Hirler
  • Publication number: 20220376062
    Abstract: A semiconductor device includes a transistor cell region, and a first termination region devoid of transistor cells. The transistor cell region includes a gate structure, a plurality of needle-shaped first field plate structures, body regions of a second conductivity type, and source regions of a first conductivity type. The first termination region surrounds the transistor cell region and includes needle-shaped second field plate structures. The needle-shaped first field plate structures are arranged in a first pattern and the needle-shaped second field plate structures are arranged in a second pattern.
    Type: Application
    Filed: August 5, 2022
    Publication date: November 24, 2022
    Inventors: Ralf Siemieniec, Oliver Blank, Franz Hirler, Michael Hutzler, David Laforet, Cédric Ouvrard, Li Juin Yip
  • Patent number: 11508841
    Abstract: A semiconductor device includes a semiconductor body having a first surface and second surface opposite to the first surface in a vertical direction, and a plurality of transistor cells at least partly integrated in the semiconductor body. Each transistor cell includes at least two source regions, first and second gate electrodes spaced apart from each other in a first horizontal direction and arranged adjacent to and dielectrically insulated from a continuous body region, a drift region separated from the at least two source regions by the body region, and at least three contact plugs extending from the body region towards a source electrode in the vertical direction. The at least three contact plugs are arranged successively between the first and second gate electrodes. Only the two outermost contact plugs that are arranged closest to the first and second gate electrodes, respectively, directly adjoin at least one of the source regions.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: November 22, 2022
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Franz Hirler, Christian Fachmann, Winfried Kaindl, Hans Weber
  • Patent number: 11462620
    Abstract: A semiconductor device includes a semiconductor substrate, a transistor cell region formed in the semiconductor substrate and an inner termination region formed in the semiconductor substrate and devoid of transistor cells. The transistor cell region includes a gate structure extending from a first surface into the semiconductor substrate, a plurality of needle-shaped first field plate structures extending from the first surface into the semiconductor substrate, body regions of a second conductivity type, and source regions of a first conductivity type formed between the body regions and the first surface. The inner termination region surrounds the transistor cell region and includes needle-shaped second field plate structures extending from the first surface into the semiconductor substrate. The needle-shaped first field plate structures are arranged in a first pattern and the needle-shaped second field plate structures are arranged in a second pattern.
    Type: Grant
    Filed: November 16, 2020
    Date of Patent: October 4, 2022
    Assignee: Infineon Technologies Austria AG
    Inventors: Ralf Siemieniec, Oliver Blank, Franz Hirler, Michael Hutzler, David Laforet, Cédric Ouvrard, Li Juin Yip
  • Patent number: 11424358
    Abstract: A semiconductor device includes a semiconductor body comprising a first surface, a second surface opposite to the first surface, an active region, and an edge region surrounding the active region in a horizontal plane. The semiconductor device further includes a plurality of transistor cells at least partly integrated in the active region. Each transistor cell includes a drift region separated from a source region by a body region, and a gate electrode dielectrically insulated from the body region. The semiconductor device also includes a sensor device having a first sensor region of a first doping type integrated in the edge region. The first sensor region is electrically coupled to a first contact pad and to a second contact pad. Each contact pad is arranged either on the first surface or on the second surface. The sensor device at least partially extends around the active region.
    Type: Grant
    Filed: April 2, 2020
    Date of Patent: August 23, 2022
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Joachim Weyers, Andreas Boehm, Franz Hirler, Enrique Vecino Vazquez
  • Publication number: 20220262946
    Abstract: The disclosure relates to a power device, having a channel region, a gate region formed aside the channel region, for controlling a channel formation, a drift region formed vertically below the channel region, a field electrode formed in a field electrode trench extending vertically into the drift region, wherein the field electrode comprises a first and a second field electrode structure, the first field electrode structure capacitively coupling to a first section of the drift region and the second field electrode structure capacitively coupling to a second section of the drift region, arranged vertically above the first section, the first and the second field electrode structure formed with a vertical overlap and adapted to balance a capacitive coupling between the first and the second field electrode structure and between the field electrode and the drift region.
    Type: Application
    Filed: February 8, 2022
    Publication date: August 18, 2022
    Inventors: Oliver Blank, Adrian Finney, Alessandro Ferrara, Franz Hirler, Stefan Tegen