Patents by Inventor Frederick Dean Wilmot

Frederick Dean Wilmot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sonic irradiation during wafer immersion
    Patent number: 7727863
    Abstract: Sonic radiation is applied to a wafer portion of the planar surface of a rotating, tilted wafer as it is being immersed into a liquid treatment bath. The portion includes the leading outer edge region of the wafer. The area of the wafer portion is significantly less than the total surface area of the planar wafer surface. Power density is minimized. As a result, bubbles are removed from the wafer surface and cavitation in the liquid bath is avoided. In some embodiments, the liquid bath is de-gassed to inhibit bubble formation.
    Type: Grant
    Filed: September 29, 2008
    Date of Patent: June 1, 2010
    Assignee: Novellus Systems, Inc.
    Inventors: Bryan L. Buckalew, Jonathan D. Reid, Johanes H. Sukamto, Frederick Dean Wilmot, Richard S. Hill