Patents by Inventor Fu-Shou Tsai
Fu-Shou Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240170299Abstract: A method for manufacturing a semiconductor device includes: providing a wafer-bonding stack structure having a sidewall layer and an exposed first component layer; forming a photoresist layer on the first component layer; performing an edge trimming process to at least remove the sidewall layer; and removing the photoresist layer. In this way, contaminant particles generated from the blade during the edge trimming process may fall on the photoresist layer but not fall on the first component layer, so as to protect the first component layer from being contaminated.Type: ApplicationFiled: January 30, 2024Publication date: May 23, 2024Inventors: KUN-JU LI, ANG CHAN, HSIN-JUNG LIU, WEI-XIN GAO, JHIH-YUAN CHEN, CHUN-HAN CHEN, ZONG-SIAN WU, CHAU-CHUNG HOU, I-MING LAI, FU-SHOU TSAI
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Patent number: 11923205Abstract: A method for manufacturing a semiconductor device includes: providing a wafer-bonding stack structure having a sidewall layer and an exposed first component layer; forming a photoresist layer on the first component layer; performing an edge trimming process to at least remove the sidewall layer; and removing the photoresist layer. In this way, contaminant particles generated from the blade during the edge trimming process may fall on the photoresist layer but not fall on the first component layer, so as to protect the first component layer from being contaminated.Type: GrantFiled: December 17, 2021Date of Patent: March 5, 2024Assignee: UNITED MICROELECTRONICS CORPORATIONInventors: Kun-Ju Li, Ang Chan, Hsin-Jung Liu, Wei-Xin Gao, Jhih-Yuan Chen, Chun-Han Chen, Zong-Sian Wu, Chau-Chung Hou, I-Ming Lai, Fu-Shou Tsai
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Publication number: 20230197467Abstract: A method for manufacturing a semiconductor device includes: providing a wafer-bonding stack structure having a sidewall layer and an exposed first component layer; forming a photoresist layer on the first component layer; performing an edge trimming process to at least remove the sidewall layer; and removing the photoresist layer. In this way, contaminant particles generated from the blade during the edge trimming process may fall on the photoresist layer but not fall on the first component layer, so as to protect the first component layer from being contaminated.Type: ApplicationFiled: December 17, 2021Publication date: June 22, 2023Inventors: KUN-JU LI, Ang Chan, HSIN-JUNG LIU, WEI-XIN GAO, Jhih-Yuan Chen, Chun-Han Chen, Zong-Sian Wu, Chau-Chung Hou, I-MING LAI, FU-SHOU TSAI
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Publication number: 20230051000Abstract: A semiconductor structure includes a first dielectric layer on a substrate, a conductive structure disposed in the first dielectric layer and including a terminal portion and an extending portion connecting the terminal portion and extending away from the terminal portion, a second dielectric layer disposed on the first dielectric layer, a conductive via through the second dielectric layer and directly contacting the extending portion, and a dummy via through the second dielectric layer and directly contacting the terminal portion. In a cross-sectional view, a width of the dummy via is smaller than 50% of a width of the conductive via.Type: ApplicationFiled: October 5, 2021Publication date: February 16, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Ang Chan, Hsin-Jung Liu, Kun-Ju Li, Chau-Chung Hou, Fu-Shou Tsai, Yu-Lung Shih, Jhih-Yuan Chen, Chun-Han Chen, Wei-Xin Gao, Shih-Ming Lin
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Publication number: 20220084878Abstract: A fabricating method of transistors includes providing a substrate with numerous transistors thereon. Each of the transistors includes a gate structure. A gap is disposed between gate structures adjacent to each other. Later, a protective layer and a first dielectric layer are formed in sequence to cover the substrate and the transistors and to fill in the gap. Next, numerous buffering particles are formed to contact the first dielectric layer. The buffering particles do not contact each other. Subsequently, a second dielectric layer is formed to cover the buffering particles. After that, a first planarization process is performed to remove part of the first dielectric layer, part of the second dielectric layer and buffering particles by taking the protective layer as a stop layer, wherein a removing rate of the second dielectric layer is greater than a removing rate of the buffering particles during the first planarization process.Type: ApplicationFiled: September 17, 2020Publication date: March 17, 2022Inventors: Fu-Shou Tsai, Yang-Ju Lu, Yong-Yi Lin, Yu-Lung Shih, Ching-Yang Chuang, Ji-Min Lin, Kun-Ju Li
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Patent number: 11257711Abstract: A fabricating method of transistors includes providing a substrate with numerous transistors thereon. Each of the transistors includes a gate structure. A gap is disposed between gate structures adjacent to each other. Later, a protective layer and a first dielectric layer are formed in sequence to cover the substrate and the transistors and to fill in the gap. Next, numerous buffering particles are formed to contact the first dielectric layer. The buffering particles do not contact each other. Subsequently, a second dielectric layer is formed to cover the buffering particles. After that, a first planarization process is performed to remove part of the first dielectric layer, part of the second dielectric layer and buffering particles by taking the protective layer as a stop layer, wherein a removing rate of the second dielectric layer is greater than a removing rate of the buffering particles during the first planarization process.Type: GrantFiled: September 17, 2020Date of Patent: February 22, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Fu-Shou Tsai, Yang-Ju Lu, Yong-Yi Lin, Yu-Lung Shih, Ching-Yang Chuang, Ji-Min Lin, Kun-Ju Li
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Patent number: 11211471Abstract: The present invention discloses a metal gate process. A sacrificial nitride layer is introduced during the fabrication of metal gates. The gate height can be well controlled by introducing the sacrificial nitride layer. Further, the particle fall-on problem can be effectively solved.Type: GrantFiled: September 10, 2020Date of Patent: December 28, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Fu-Shou Tsai, Yong-Yi Lin, Yang-Ju Lu, Yu-Lung Shih, Ji-Min Lin, Ching-Yang Chuang, Kun-Ju Li
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Publication number: 20210273076Abstract: A method of forming a gate includes the following steps. A gate structure is formed on a substrate. An etch stop layer is formed on the gate structure and the substrate. A dielectric layer is formed to cover the etch stop layer. The dielectric layer is planarized to form a planarized top surface of the dielectric layer and expose a portion of the etch stop layer on the gate structure. An oxygen containing treatment is performed to form an oxygen containing layer on the exposed etch stop layer. A deposition process is performed to form an oxide layer covering the planarized top surface of the dielectric layer and the oxygen containing layer.Type: ApplicationFiled: February 27, 2020Publication date: September 2, 2021Inventors: Yang-Ju Lu, Chun-Yi Wang, Fu-Shou Tsai, Yong-Yi Lin, Ching-Yang Chuang, Wen-Chin Lin, Hsin-Kuo Hsu
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Patent number: 10943910Abstract: A semiconductor IC structure includes a substrate including at least a memory cell region and a peripheral region defined thereon, a plurality of memory cells formed in the memory cell region, at least an active device formed in the peripheral region, a plurality of contact plugs formed in the memory cell region, and at least a bit line formed in the memory cell region. The contact plugs are physically and electrically connected to the bit line. More important, bottom surfaces of the contact plugs are lower a surface of the substrate.Type: GrantFiled: October 3, 2018Date of Patent: March 9, 2021Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Yu-Ting Li, Jen-Chieh Lin, Wen-Chin Lin, Po-Cheng Huang, Fu-Shou Tsai
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Patent number: 10923481Abstract: A semiconductor IC structure includes a substrate including at least a memory cell region and a peripheral region defined thereon, a plurality of memory cells formed in the memory cell region, at least an active device formed in the peripheral region, a plurality of contact plugs formed in the memory cell region, and at least a bit line formed in the memory cell region. The contact plugs are physically and electrically connected to the bit line. More important, bottom surfaces of the contact plugs are lower a surface of the substrate.Type: GrantFiled: October 3, 2018Date of Patent: February 16, 2021Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Yu-Ting Li, Jen-Chieh Lin, Wen-Chin Lin, Po-Cheng Huang, Fu-Shou Tsai
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Patent number: 10734276Abstract: A planarization method is provided and includes the following steps. A substrate having a main surface is provided. A protruding structure is formed on the main surface. An insulating layer is formed conformally covering the main surface and the top surface and the sidewall of the protruding structure. A stop layer is formed on the insulating layer and at least covers the top surface of the protruding structure. A first dielectric layer is formed blanketly covering the substrate and the protruding structure and a chemical mechanical polishing process is then performed to remove a portion of the first dielectric layer until a portion of the stop layer is exposed thereby obtaining an upper surface. A second dielectric layer having a pre-determined thickness is formed covering the upper surface.Type: GrantFiled: January 4, 2018Date of Patent: August 4, 2020Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Po-Cheng Huang, Yu-Ting Li, Fu-Shou Tsai, Wen-Chin Lin, Chun-Liang Liu
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Patent number: 10722998Abstract: The present invention provides a wafer polishing pad, the wafer polishing pad includes a polishing material layer, a plurality of recesses are formed on the top surface of the polishing material layer, and a warning element disposed within the polishing material layer, the warning element and the polishing material layer have different colors. The feature of the invention is that forming a warning element in the polishing material layer, when the visible state of the warning element is changed, for example, when the warning element appears, disappears or changes the shapes, it means that the wafer polishing pad needs to be replaced. In this way, the user can confirm the destroying situation of the wafer polishing pad easily, and also improving the manufacturing process efficiency.Type: GrantFiled: September 28, 2017Date of Patent: July 28, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Li-Chieh Hsu, Fu-Shou Tsai, Kun-Ju Li, Po-Cheng Huang, Chun-Liang Liu
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Publication number: 20190070706Abstract: The present invention provides a wafer polishing pad, the wafer polishing pad includes a polishing material layer, a plurality of recesses are formed on the top surface of the polishing material layer, and a warning element disposed within the polishing material layer, the warning element and the polishing material layer have different colors. The feature of the invention is that forming a warning element in the polishing material layer, when the visible state of the warning element is changed, for example, when the warning element appears, disappears or changes the shapes, it means that the wafer polishing pad needs to be replaced. In this way, the user can confirm the destroying situation of the wafer polishing pad easily, and also improving the manufacturing process efficiency.Type: ApplicationFiled: September 28, 2017Publication date: March 7, 2019Inventors: Li-Chieh Hsu, Fu-Shou Tsai, Kun-Ju Li, Po-Cheng Huang, Chun-Liang Liu
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Publication number: 20190043866Abstract: A semiconductor IC structure includes a substrate including at least a memory cell region and a peripheral region defined thereon, a plurality of memory cells formed in the memory cell region, at least an active device formed in the peripheral region, a plurality of contact plugs formed in the memory cell region, and at least a bit line formed in the memory cell region. The contact plugs are physically and electrically connected to the bit line. More important, bottom surfaces of the contact plugs are lower a surface of the substrate.Type: ApplicationFiled: October 3, 2018Publication date: February 7, 2019Inventors: Yu-Ting Li, Jen-Chieh Lin, Wen-Chin Lin, Po-Cheng Huang, Fu-Shou Tsai
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Publication number: 20190035794Abstract: A semiconductor IC structure includes a substrate including at least a memory cell region and a peripheral region defined thereon, a plurality of memory cells formed in the memory cell region, at least an active device formed in the peripheral region, a plurality of contact plugs formed in the memory cell region, and at least a bit line formed in the memory cell region. The contact plugs are physically and electrically connected to the bit line. More important, bottom surfaces of the contact plugs are lower a surface of the substrate.Type: ApplicationFiled: October 3, 2018Publication date: January 31, 2019Inventors: Yu-Ting Li, Jen-Chieh Lin, Wen-Chin Lin, Po-Cheng Huang, Fu-Shou Tsai
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Patent number: 10192826Abstract: A layout structure including a conductive structure is provided. The layout structure includes a dielectric layer formed on a substrate and a conductive structure formed in the dielectric layer. And the conductive structure further includes a barrier layer, a metal layer formed within the barrier layer, and a high resistive layer sandwiched in between the barrier layer and the metal layer.Type: GrantFiled: December 26, 2017Date of Patent: January 29, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Kun-Ju Li, Kuo-Chin Hung, Min-Chuan Tsai, Wei-Chuan Tsai, Yi-Han Liao, Chun-Tsen Lu, Fu-Shou Tsai, Li-Chieh Hsu
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Patent number: 10128251Abstract: A semiconductor IC structure includes a substrate including at least a memory cell region and a peripheral region defined thereon, a plurality of memory cells formed in the memory cell region, at least an active device formed in the peripheral region, a plurality of contact plugs formed in the memory cell region, and at least a bit line formed in the memory cell region. The contact plugs are physically and electrically connected to the bit line. More important, bottom surfaces of the contact plugs are lower a surface of the substrate.Type: GrantFiled: September 9, 2016Date of Patent: November 13, 2018Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Yu-Ting Li, Jen-Chieh Lin, Wen-Chin Lin, Po-Cheng Huang, Fu-Shou Tsai
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Patent number: 10103034Abstract: A method of planarizing a substrate surface is disclosed. A substrate having a major surface of a material layer is provided. The major surface of the material layer comprises a first region with relatively low removal rate and a second region of relatively high removal rate. A photoresist pattern is formed on the material layer. The photoresist pattern masks the second region, while exposes at least a portion of the first region. At least a portion of the material layer not covered by the photoresist pattern is etched away. A polish stop layer is deposited on the material layer. A cap layer is deposited on the polish stop layer. A chemical mechanical polishing (CMP) process is performed to polish the cap layer.Type: GrantFiled: August 16, 2017Date of Patent: October 16, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Li-Chieh Hsu, Fu-Shou Tsai, Yu-Ting Li, Yi-Liang Liu, Kun-Ju Li
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Patent number: 10049887Abstract: A method of planarizing a substrate surface is disclosed. A substrate having a major surface of a material layer is provided. The major surface of the material layer comprises a first region with relatively low removal rate and a second region of relatively high removal rate. A photoresist pattern is formed on the material layer. The photoresist pattern masks the second region, while exposes at least a portion of the first region. At least a portion of the material layer not covered by the photoresist pattern is etched away. A polish stop layer is deposited on the material layer. A cap layer is deposited on the polish stop layer. A chemical mechanical polishing (CMP) process is performed to polish the cap layer.Type: GrantFiled: August 16, 2017Date of Patent: August 14, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Li-Chieh Hsu, Fu-Shou Tsai, Yu-Ting Li, Yi-Liang Liu, Kun-Ju Li
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Publication number: 20180197749Abstract: A planarization method is provided and includes the following steps. A substrate having a main surface is provided. A protruding structure is formed on the main surface. An insulating layer is formed conformally covering the main surface and the top surface and the sidewall of the protruding structure. A stop layer is formed on the insulating layer and at least covers the top surface of the protruding structure. A first dielectric layer is formed blanketly covering the substrate and the protruding structure and a chemical mechanical polishing process is then performed to remove a portion of the first dielectric layer until a portion of the stop layer is exposed thereby obtaining an upper surface. A second dielectric layer having a pre-determined thickness is formed covering the upper surface.Type: ApplicationFiled: January 4, 2018Publication date: July 12, 2018Inventors: Po-Cheng Huang, Yu-Ting Li, Fu-Shou Tsai, Wen-Chin Lin, Chun-Liang Liu