Abstract: A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.

Abstract: The present invention provides a flip-chip package for MEMS device without time consuming wire-bonding. Bonding a silicon chip to a printed circuit board can be achieved by restricting the heat deformation of printed circuit board with adhered glass substrate which has similar heat expansion coefficient as silicon.

Abstract: The present invention provides a transmissive Spatial Light Modulator with fast response speed and higher brightness using micro-windows having switching transistors on said window so that the fill factor of light transferring area can be maximized. Conventional systems have transistors out of windows which substantially reduce the area to pass incoming light, because transistors are usually opaque and block light transmission. Transmissive Spatial Light Modulator requires simpler and smaller optics than reflective Spatial Light Modulator.

Abstract: A color display device including: at least one spatial light modulation element forming a display picture by modulated light obtained by modulating illumination light, a color sequential light generation device changing in a time series the illumination light or the modulated light into multiple groups of different color lights in one frame of a display period of the display picture, a control device controlling the spatial light modulator, and a color sequential light generation device based on the input picture data. The control device controls the spatial light modulator and the color sequential light generation device to change the ratio of the display time of each color of the reflected light time-shared in the display period of the frame depending on the character and/or the set value of the input picture data.

Abstract: The present invention provides a projection apparatus that includes a mirror element and a drive circuit for driving a laser light source for projecting an illumination light. The projection apparatus further includes mirror device for modulating the illumination light and a projection lens for projecting the modulated light from the mirror element. The mirror device is disposed on a device substrate and packaged in a package substrate made of a transparent silicon material with a metallic thermal transfer path connected to the device substrate and a cover glass covering the package substrate. The distance between the mirror and the bottom surface of the cover glass is larger than the focal length of the projection lens.

Abstract: This invention discloses a MEMS device supported on a substrate formed with electric circuit thereon. The MEMS device includes at least an electrode connected to the circuit and at least a movable element that is controlled by the electrode. The MEMS device further includes a conformal protective layer over the electrode and the circuit wherein the protective layer is semiconductor-based material. In a preferred embodiment, the MEMS device is a micromirror and the semiconductor material is one of a group of materials consisting of Si, SiC, Ge, SiGe, SiNi and SiW.

Abstract: The present invention provides a projection apparatus that includes: at least one spatial light modulator (SLM) and at least one variable light source and at least one control unit controlling said SLM and/or said light source and said SLM has a minimum controllable time period and said control unit controls said SLM providing said minimum controllable time periods of the modulation of said SLM at least twice in a frame period and said control unit controls said light source during said minimum controllable time periods.

Abstract: A video display system includes an image processing unit receives continuously an input video signal including input frame signals for generating an output video signal including output frame signals having a higher frame rate than the input frame signals; and a display unit for displaying a video image in accordance with the output frame signals, wherein each of the input frame signals has 2^M gray scale levels for each pixel, the image processing unit further generates the output frame signals including at least a first output frame signal having 2^N gray scale levels with N<M for each pixel and a second output frame signal having [2^M-2^N] or fewer gray scale levels for each pixel.

Abstract: A projection apparatus comprising a light source for emitting incident light and a mirror device that includes a plurality of mirror elements each guiding the incident light to the ON position towards a projection light path under pulse width modulation (PWM) control corresponding to one frame or sub-frame or to the OFF state so as not to guide the incident light to a projection path. The light source is turned off outside the period in which the mirror element with the maximum brightness is in the ON state.

Abstract: A video display apparatus is provided, comprising: a light source(s) controllable for emitting a plurality of reference colors; a color conversion circuit received an input video signal for generating the color data of at least one correction color for correcting a reference color emitted from a light source; an image processing unit receives the input video signal for generating an output video signal comprising a plurality of sub-frame signals; and a control circuit applies the color data generated by the color conversion circuit for controlling a light source to display color images.

Abstract: The present invention provides an image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising a first conductive layer to wire and function as a bit line; a second conductive layer to wire and function as a word line; and a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.

Abstract: A video display system includes a plurality of primary color light sources; and a spatial light modulator (SLM) for modulating an illumination light emitted from at least one of the plurality of primary light sources. The video display system further includes a display controller for controlling a process to display a sequence of video images within a period of one frame comprising each of a plurality of primary colors and each of a plurality of complementary colors to minimize a number of emissions of each of the plurality of primary color light sources and also displaying the video images of the colors of the plurality of primary colors and the plurality of complementary colors in sequence.

Abstract: This invention discloses a mirror device comprises a mirror array. The mirror array includes multiple mirror elements. Each element comprises a mirror supported on a hinge. The hinge is attached directly to the mirror and is substantially perpendicular to the mirror. The hinge penetrates a bottom surface of the mirror with a hinge-top buried in a layer of the mirror beneath a top surface of the mirror.

Abstract: A projection apparatus using a spatial light modulator (SLM), comprising the following: at least one variable light source, at least one spatial light modulator for modulating the illumination light emitted from the variable light source in accordance with the modulation state of arrayed pixel elements, a variable light source controller for controlling modulation of the variable light source, and a spatial light modulator controller for controlling modulation of each pixel element of the spatial light modulator, wherein the variable light source controller controls the variable light source so as to reduce the period in which the modulation states of the pixel element are in transition on a display image.

Abstract: The present invention discloses a projection apparatus comprising: a light source for emitting illumination light; a mirror device comprising a plurality of mirrors for generating an image by reflecting the illumination light toward a projecting direction by means of a deflecting operation; and a projection optical system which is placed in the optical axis of reflection light in the projecting direction of the illumination light incident to the mirror device and which projects the reflection light, wherein the optical axis of the illumination light incident to the mirror device and the optical axis of the reflection light in the projecting direction forms an angle that is larger than the expansion angle ? of the flux of the illumination light that satisfies NA=n*sin ?, where NA is the numerical aperture of the flux of the illumination light, and n is the reflectance.

Abstract: A projection apparatus comprising a micromirror device for reflecting and modulating a light emitted from a light source to project a display an image on a display screen. The projection apparatus further includes a projection optical system comprises an adjustable aperture for adjusting an aperture ratio to control an amount of output light reflected from the micromirror device to the image display screen.

Abstract: A spatial light modulator driven with binary pulse-width-modulation requires very high data transfer rate to achieve high grayscale. This invention enables to reduce substantially the data transfer rate using non-sequential order of binary bits, wherein the combination of the sequences of binary bits is selected from the combinations which avoid simultaneous writing of multiple rows. The possible number of such combinations is astronomically large and mathematical programs were developed to find right combinations. These results were proposed.

Abstract: An image display apparatus includes: a first spatial light modulator (SLM) and a second modulator for modulating a first and a second illumination lights for displaying images; an SLM control unit for generating first control data and second control data for controlling the first and second SLMs respectively in accordance with the first and second control data, wherein each of the first control data and second control data is generated for each of a plurality of sub-frame periods divided from one frame period for displaying the images, and the start timing of one sub-frame period of the first control data is different from the start timing of one sub-frame period of the second control data.

Abstract: The present invention provides image projection system implemented with a spatial light modulator, for modulating an illumination light projected from a light source wherein said spatial light modulator comprising an image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator comprising: at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and a fixed electric potential layer electrically connected to a fixed electric potential, wherein the two different conductive layers and fixed electric potential layer overlapping one another and disposed at a location along a light path of the illumination light emitted from the light source to block said illumination light.

Abstract: A projection apparatus implemented with a mirror device that includes a first electrode and a second electrode with an elastic hinge disposed between the first electrode part and second electrode. The elastic hinge supports a mirror and the mirror is controlled to deflect when drawn by a Coulomb force generated between the mirror and electrodes by applying a voltage to the electrodes. The projection apparatus further includes a light source for projecting a light to the mirror for modulating the light by deflecting the mirror to different deflection states. The light source suppresses the emission of the illumination light during a period when the mirror performs a series of operations to shift from a non-deflection state, placing the mirror in a stationary and non-deflection state, to a predetermined deflection state.