Abstract: The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.

Abstract: An image display system includes an improved hinge for a micro-mirror device composed of a conductive-doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor. The image display system further includes signal transmission metal traces formed on areas between the doped semiconductor hinges. The signal transmission metal traces are formed either before or after a high temperature crystallization process is applied to the hinges.

Abstract: The present invention aims at providing a mirror device, comprising a plurality of mirror elements, wherein each of the mirror elements comprises a deflectable mirror, and an elastic member for deflectably supporting the mirror, wherein the mirror allows to be controlled under a first deflection control state in which incident light is reflected toward a first direction, a second deflection control state in which the incident light is reflected toward a second direction, and a third deflection control state in which the mirror oscillates between the first deflection control state and second deflection control state, wherein the mirror device reproduces gradations by combining the first through third deflection control states, and the natural oscillation cycle T of the oscillation system constituted by the mirror and elastic member satisfies: 110 [?sec]>T=2?*?(I/K)>2 [?sec], where “I” is the moment of rotation of the oscillation system and “K” is the spring constant of the elastic member.

Abstract: A display device implemented with a spatial light modulator (SLM) comprising a plurality of pixel elements arranged in array to modulate incident light and display an image, wherein each of the pixel elements comprises a movable electrode and a stationary electrode; a drive circuit connected to the movable electrode and receives image data for applying a voltage applied to control the movable electrode in accordance with image data, and a voltage application circuit for applying and controlling a voltage applied to the stationary electrode to control a moving speed of the movable electrode.

Abstract: A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.

Abstract: The present invention provides a projection apparatus comprising: a light source; a light source control unit for controlling output of the light source; at least one spatial light modulator for modulating illumination light from the light source by a plurality of pixel elements; and an optical system for projecting, to a screen, the illumination light deflected by the spatial light modulator, wherein: the light source control unit modulates output of the illumination light from the light source during a modulation period of the spatial light modulator, and non-linearly controls gray scale of a projected image projected to the screen.

Abstract: A projection apparatus comprising a light source for projecting an illumination light through an illumination optical system to a spatial light modulator (SLM) for modulating the illumination light for generating and transmitting an image projection light to an image projection surface through a projection optical system to display an image. The projection apparatus further includes an image process unit for receiving and analyzing an input image data; and the image process unit applies a conversion process to a signal related to the input image data to generate different control patterns for a plurality of adjacent pixel elements included in the SLM for a predetermined period during at least one frame period to reproduce a gradation of the pixel whereby each of the plurality of adjacent pixel elements has a gradation of approximately a same level.

Abstract: The present invention provides a projection display system, comprising: plural laser light sources; an illumination optical system for illuminating, in different beam axes, light beams emitted from the individual laser light sources; a deflection mirror device, constituted by plural mirror elements, for modulating the light beams illuminated by the illumination optical system; and a projection optical system for projecting a reflection light from the deflection mirror device illuminated by the light beams.

Abstract: An image projection system implemented with a spatial light modulator (SLM) comprises a plurality of pixel elements each includes a pixel memory wherein said SLM receives inputted bit data representing an image from an external image source to write the inputted data into said pixel memory wherein said SLM further adjusts a smallest period for displaying image represented by a least significant bit (LSB) of the inputted data.

Abstract: An image display system implemented with a spatial light modulator (SLM) comprising a plurality of pixel elements each comprises a driver circuit. The driver circuit further comprises at least a first and second transistors cascaded with a first capacitor between a high voltage (Vh) and a ground voltage (Vg) wherein each of the first and second transistors having a breakdown voltage less than the high voltage (Vh). The first transistor receives an input signal to turn on the first and second transistors for discharging the first capacitor and pulling down an output voltage to a ground voltage (Vg) and to turn off the first and second transistors to pull up the output voltage to the high voltage (Vh) wherein each of the first and second transistor is biased to approximately half of the high voltage (Vh/2).

Abstract: A spatial light modulator driven with binary pulse-width-modulation requires very high data transfer rate to achieve high grayscale. This invention enables to reduce substantially the data transfer rate using non-sequential order of binary bits, wherein the combination of the sequences of binary bits is selected from the combinations which avoid simultaneous writing of multiple rows. The possible number of such combinations is astronomically large and mathematical programs were developed to find right combinations. These results were proposed.

Abstract: The present invention discloses an image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements further comprises an electrode having a structural body comprising: a first electrically conductive layer; a second electrically conductive layer; and a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer and the semiconductor layer further comprises a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer.

Abstract: The present invention provides an image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate: wherein: each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.

Abstract: The present invention provides an image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising a first conductive layer to wire and function as a bit line; a second conductive layer to wire and function as a word line; and a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.

Abstract: An image projection system comprises a micro-electromechanical system (MEMS) package wherein the MEMS package further includes: a first substrate and a second substrate joined together at a joinder surface applied with a ponder material thereon to provide an internal space to contain and package a MEMS device therein, wherein at least one of the first and second substrate is configured to have a an inclined surface near the joinder surface.

Abstract: The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.

Abstract: This invention discloses a mirror device comprises a mirror array. The mirror array includes multiple mirror elements. Each element comprises a mirror supported on a hinge. The hinge is attached directly to the mirror and is substantially perpendicular to the mirror. The hinge penetrates a bottom surface of the mirror with a hinge-top buried in a layer of the mirror beneath a top surface of the mirror.

Abstract: The present invention provides image projection system implemented with a spatial light modulator, for modulating an illumination light projected from a light source wherein said spatial light modulator comprising an image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator comprising: at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and a fixed electric potential layer electrically connected to a fixed electric potential, wherein the two different conductive layers and fixed electric potential layer overlapping one another and disposed at a location along a light path of the illumination light emitted from the light source to block said illumination light.

Abstract: A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.

Abstract: A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected to the mirror via the elastic hinge, for applying to the mirror an address voltage for independently controlling the deflection of the mirror.