Abstract: An airborne component extraction system includes a source of a positive pressure air stream and a source of a negative pressure air stream. The air streams are directed through conduits to a hood that distributes the positive pressure air stream into a work area, and that draws the negative pressure air stream from the work area to remove airborne components within the work area. Aspects of the hood offer greatly enhanced performance in creating a controlled region for component removal and for drawing and removing the components for the work area.

Abstract: A lift pin holder assembly includes a lift pin holder including a central bore defining a first groove arranged on a radially inner surface of the central bore. The lift pin holder is made of a non-metallic material. A lift pin includes a second groove arranged on a radially outer surface thereof. A spring is at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the lift pin holder.

Abstract: A vaporization system for liquid precursor includes a bubbler portion configured to store liquid precursor and to supply carrier gas into the liquid precursor to vaporize the liquid precursor to generate vaporized precursor. A baffle portion is arranged in fluid communication with the bubbler portion and includes N heated baffles, where N is an integer greater than or equal to one. The vaporized precursor generated by the bubbler portion passes through the N heated baffles before flowing to a substrate processing system.

Abstract: A lift pin holder assembly includes a lift pin holder including a central bore defining a first groove arranged on a radially inner surface of the central bore. The lift pin holder is made of a non-metallic material. A lift pin includes a second groove arranged on a radially outer surface thereof. A spring is at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the lift pin holder.

Abstract: Various embodiments of the present disclosure provide a curtain wall panel bracket leveling system that facilitates leveling a panel bracket mounted to a fixture (such as an embedment or an anchor array) cast in a concrete slab.

Abstract: Various embodiments of the present disclosure provide a curtain wall panel bracket leveling system that facilitates leveling a panel bracket mounted to a fixture (such as an embedment or an anchor array) cast in a concrete slab.

Abstract: A extraction system is designed for metal working and other applications. The system may comprise a cart-type base or may be incorporated into a fixed or semi-fixed installation. A blower delivers a positive pressure airflow to a hood that creates an air region by directing the air through an annular space between inner and outer shrouds, impacting the air against a single generally perpendicular flange. Return air from the operation may be mixed with fresh air, both of which may be filtered, to supply the positive pressure air. Both air streams to and from the hood may be adjusted to optimize operation. Adjustments may be made at the base unit or remotely.

Abstract: Various embodiments of the present disclosure provide a curtain wall panel bracket leveling system that facilitates leveling a panel bracket mounted to a fixture (such as an embedment or an anchor array) cast in a concrete slab.

Abstract: A vaporization system for liquid precursor includes a bubbler portion configured to store liquid precursor and to supply carrier gas into the liquid precursor to vaporize the liquid precursor to generate vaporized precursor. A baffle portion is arranged in fluid communication with the bubbler portion and includes N heated baffles, where N is an integer greater than or equal to one. The vaporized precursor generated by the bubbler portion passes through the N heated baffles before flowing to a substrate processing system.

Abstract: Embodiments include a high temperature electrode connection assembly for a wafer-processing pedestal. The high temperature electrode connection assembly includes an electrode rod having a cup that mounts to a stud embedded in the pedestal and a plate adapter portion. The assembly also includes a floating plate having an outer surface and an aperture for receiving the electrode rod. The floating plate contacts an inner surface of the pedestal to resist lateral movement of the electrode rods. The assembly also includes an anti-rotation retainer ring that frictionally engages the electrode rod and an anti-rotation post extending from the outer surface of the floating plate. The anti-rotation post limits rotation of the electrode rod with respect to the floating plate.

Abstract: Various embodiments of the present disclosure provide a curtain wall panel bracket leveling system that facilitates leveling a panel bracket mounted to a fixture (such as an embedment or an anchor array) cast in a concrete slab.

Abstract: Various embodiments of the present disclosure provide a curtain wall panel bracket leveling system that facilitates leveling a panel bracket mounted to a fixture (such as an embedment or an anchor array) cast in a concrete slab.

Abstract: A component extraction system is designed to remove smoke and airborne components, such as particulate, from a metal working or other application. The system may be compatible with a cart-type base unit or may be incorporated into a fixed or semi-fixed installation that uses a nozzle disposed on a carriage to remove workspace air (e.g., containing smoke and airborne components) away from the metal working application. The carriage may travel along a guide rail disposed adjacent to the metal working application in order to place the nozzle near the source of the metal working components. Further, the carriage may include a positioning system, utilizing sensors, to automatically adjust the location of the nozzle proximate the airborne component source.

Abstract: A heat shield employed in semiconductor processing apparatus comprises a high performance insulation that has low thermal conductivity, such as, below the thermal conductivity of still air over a wide range of temperatures utilized in operation of the apparatus. As an example, the thermal conductivity of the insulation may be in the range of about 0.004 W/m·h to about 0.4 W/m·h over a temperature range of about 0° C. to about 600° C. or more. The deployment of the high performance heat shield reduces the power consumption necessary for the heater by as much as 20% to reach a desired processing temperature as compared to a case of heater power consumption required to reach the same desired temperature without the shield.

Abstract: Various embodiments of the present disclosure provide a curtain wall panel bracket leveling system that facilitates leveling a panel bracket mounted to a fixture (such as an embedment or an anchor array) cast in a concrete slab.

Abstract: Embodiments include a high temperature electrode connection assembly for a wafer-processing pedestal. The high temperature electrode connection assembly includes an electrode rod having a cup that mounts to a stud embedded in the pedestal and a plate adapter portion. The assembly also includes a floating plate having an outer surface and an aperture for receiving the electrode rod. The floating plate contacts an inner surface of the pedestal to resist lateral movement of the electrode rods. The assembly also includes an anti-rotation retainer ring that frictionally engages the electrode rod and an anti-rotation post extending from the outer surface of the floating plate. The anti-rotation post limits rotation of the electrode rod with respect to the floating plate.

Abstract: A extraction system is designed for metal working and other applications. The system may comprise a cart-type base or may be incorporated into a fixed or semi-fixed installation. A blower delivers a positive pressure airflow to a hood that creates an air region by directing the air through an annular space between inner and outer shrouds, impacting the air against a single generally perpendicular flange. Return air from the operation may be mixed with fresh air, both of which may be filtered, to supply the positive pressure air. Both air streams to and from the hood may be adjusted to optimize operation. Adjustments may be made at the base unit or remotely.

Abstract: An airborne component extraction system includes a source of a positive pressure air stream and a source of a negative pressure air stream. The air streams are directed through conduits to a hood that distributes the positive pressure air stream into a work area, and that draws the negative pressure air stream from the work area to remove airborne components within the work area. Aspects of the hood offer greatly enhanced performance in creating a controlled region for component removal and for drawing and removing the components for the work area.

Abstract: The present disclosure relates to a packaging system for compressible goods utilizing pre-punched alignment apertures on wicketed and/or chain-linked open bottom bags. The disclosure relates to a bag transport and indexing system through the form fill compress and seal system. The disclosure further relates to the use of sprocket pins spaced accordingly on either a horizontal linear or rotary machine so that the sprockets correspond to the pre-punched apertures on the wicketed and/or chain-linked open bottom bags.

Abstract: A substrate processing system includes a pedestal including a substrate supporting surface having a diameter that is greater than a diameter of a substrate to be processed by the substrate processing system. A first surface extends a first distance above the substrate supporting surface in a direction substantially perpendicular to the substrate supporting surface. The first distance is greater than or equal to one-half of a thickness of the substrate. A gap is defined between the first surface and an outer diameter of the substrate. A second surface extends a second distance from the first surface at an angle with respect to the first surface. The angle is greater than zero and less than ninety degrees. A third surface extends from the second surface and is substantially parallel to the substrate supporting surface. An etchant source directs etchant onto the substrate to etch the substrate.