Patents by Inventor Geert Hellings

Geert Hellings has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9029217
    Abstract: The disclosure is related to a band engineered semiconductor device comprising a substrate and a protruding structure that is formed in a recess in the substrate. The protruding structure extends above the recess and has a buried portion and an extended portion. At least the extended portion comprises a semiconductor material having an inverted ‘V’ band gap profile with a band gap value increasing gradually from a first value at lateral edges of the structure to a second value, higher than the first value, in a center of the structure. The disclosure is also related to the method of manufacturing of such a band engineered semiconductor device.
    Type: Grant
    Filed: January 8, 2015
    Date of Patent: May 12, 2015
    Assignees: IMEC, GlobalFoundries Inc.
    Inventors: Benjamin Vincent, Geert Hellings, David Paul Brunco
  • Publication number: 20150126010
    Abstract: The disclosure is related to a band engineered semiconductor device comprising a substrate and a protruding structure that is formed in a recess in the substrate. The protruding structure extends above the recess and has a buried portion and an extended portion. At least the extended portion comprises a semiconductor material having an inverted ‘V’ band gap profile with a band gap value increasing gradually from a first value at lateral edges of the structure to a second value, higher than the first value, in a center of the structure. The disclosure is also related to the method of manufacturing of such a band engineered semiconductor device.
    Type: Application
    Filed: January 8, 2015
    Publication date: May 7, 2015
    Applicants: GLOBALFOUNDRIES INC., IMEC
    Inventors: Benjamin Vincent, Geert Hellings, David Paul Brunco
  • Patent number: 9006705
    Abstract: The disclosed technology relates to transistors having a strained quantum well for carrier confinement, and a method for manufacturing thereof. In one aspect, a FinFET or a planar FET device comprises a semiconductor substrate, a strain-relaxed buffer layer comprising Ge formed on the semiconductor substrate, a channel layer formed on the strain-relaxed buffer layer, and a strained quantum barrier layer comprising SiGe interposed between and in contact with the strain-relaxed buffer layer and the channel layer. The compositions of the strain-relaxed buffer layer, the strained quantum barrier layer and the channel layer are chosen such that a band offset of the channel layer and a band offset of the strained quantum barrier layer have opposite signs with respect to the strain-relaxed buffer layer.
    Type: Grant
    Filed: June 10, 2013
    Date of Patent: April 14, 2015
    Assignees: IMEC, GLOBALFOUNDRIES Inc.
    Inventors: Geert Eneman, David Brunco, Geert Hellings
  • Patent number: 8963225
    Abstract: The disclosure is related to a band engineered semiconductor device comprising a substrate, a protruding structure that is formed in a recess in the substrate and is extending above the recess having a buried portion and an extended portion, and wherein at least the extended portion comprises a semiconductor material having an inverted ‘V’ band gap profile with a band gap value increasing gradually from a first value at lateral edges of the structure to a second value, higher than the first value, in a center of the structure. The disclosure is also related to the method of manufacturing of such band engineered semiconductor device.
    Type: Grant
    Filed: September 12, 2013
    Date of Patent: February 24, 2015
    Assignees: IMEC, GLOBALFOUNDRIES Inc.
    Inventors: Benjamin Vincent, Geert Hellings, David Paul Brunco
  • Patent number: 8912055
    Abstract: Disclosed are methods for forming hybrid metal-oxide-semiconductor field effect transistors (MOSFETs) and the hybrid MOSFETS thus obtained. In one embodiment, a method is disclosed that includes providing a first substrate comprising a first region and a second region, providing a second substrate comprising a second semiconductor layer and an insulating layer overlaying the second semiconductor layer, and direct substrate bonding the second substrate to the first substrate, thereby contacting the first region and the second region with the insulating layer. The method further includes selectively removing the second semiconductor layer and the insulating layer in the first region, thereby exposing the first semiconductor layer in the first region, forming a first gate stack of a first MOSFET on the exposed first semiconductor layer in the first region, and forming a second gate stack of a second MOSFET on the second semiconductor layer in the second region.
    Type: Grant
    Filed: May 2, 2012
    Date of Patent: December 16, 2014
    Assignee: IMEC
    Inventors: Thomas Y. Hoffman, Matty Caymax, Niamh Waldron, Geert Hellings
  • Publication number: 20140138787
    Abstract: An avalanche photodetector element is disclosed for converting an optical signal to an electrical signal, comprising an input waveguide and a photodetector region, the photodetector region comprising at least one intrinsic region, at least one p-doped region and at least one n-doped region, the doped regions and the at least one intrinsic region forming at least one PIN-junction avalanche photodiode, the input waveguide and the photodetector region being arranged with respect to each other such that the optical signal conducted by the input waveguide is substantially conducted into the photodetector region to the PIN-junction avalanche photodiode, the PIN-junction avalanche photodiode converting the optical signal to an electrical signal, characterized in that the photodetector region comprises more than one p-doped region and/or n-doped region, whereby these p-doped regions and/or n-doped regions are physically arranged as an array.
    Type: Application
    Filed: November 22, 2013
    Publication date: May 22, 2014
    Applicant: IMEC
    Inventors: Geert Hellings, Joris Van Campenhout, Peter Verheyen
  • Publication number: 20140124894
    Abstract: The disclosed technology relates to a semiconductor device comprising a diode junction between two semiconductor regions of different doping types. In one aspect, the diode comprises a junction formed between an upper portion of an active area and a remainder of the active area, where the active area is defined in a substrate between two field dielectric regions. The upper portion is a portion of the active area that has a width smaller than a width of the active area itself. In another aspect, the semiconductor device is an electrostatic discharge protection device (ESD) comprising such a diode. In addition, the active area has a doping profile that exhibits a maximum value at the surface of the active area, and changes to a minimum value at a first depth, where the first depth can be greater in value than half of a depth of the upper portion.
    Type: Application
    Filed: October 29, 2013
    Publication date: May 8, 2014
    Applicant: IMEC
    Inventors: Geert Hellings, Mirko Scholz, Dimitri Linten
  • Patent number: 8698129
    Abstract: An implant free quantum well transistor wherein the doped region comprises an implant region having an increased concentration of dopants with respect to the concentration of dopants of adjacent regions of the substrate, the implant region being substantially positioned at a side of the quantum well region opposing the gate region.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: April 15, 2014
    Assignees: IMEC, Katholieke Universiteit Leuven, KU Leuven R&D
    Inventors: Geert Hellings, Geert Eneman
  • Publication number: 20140077332
    Abstract: The disclosure is related to a band engineered semiconductor device comprising a substrate, a protruding structure that is formed in a recess in the substrate and is extending above the recess having a buried portion and an extended portion, and wherein at least the extended portion comprises a semiconductor material having an inverted ‘V’ band gap profile with a band gap value increasing gradually from a first value at lateral edges of the structure to a second value, higher than the first value, in a center of the structure. The disclosure is also related to the method of manufacturing of such band engineered semiconductor device.
    Type: Application
    Filed: September 12, 2013
    Publication date: March 20, 2014
    Applicants: GLOBALFOUNDRIES Inc., IMEC
    Inventors: Benjamin Vincent, Geert Hellings, David Brunco
  • Publication number: 20140054547
    Abstract: The disclosed technology relates to transistors having a strained quantum well for carrier confinement, and a method for manufacturing thereof. In one aspect, a FinFET or a planar FET device comprises a semiconductor substrate, a strain-relaxed buffer layer comprising Ge formed on the semiconductor substrate, a channel layer formed on the strain-relaxed buffer layer, and a strained quantum barrier layer comprising SiGe interposed between and in contact with the strain-relaxed buffer layer and the channel layer. The compositions of the strain-relaxed buffer layer, the strained quantum barrier layer and the channel layer are chosen such that a band offset of the channel layer and a band offset of the strained quantum barrier layer have opposite signs with respect to the strain-relaxed buffer layer.
    Type: Application
    Filed: June 10, 2013
    Publication date: February 27, 2014
    Inventors: Geert Eneman, David Brunco, Geert Hellings
  • Publication number: 20120280326
    Abstract: Disclosed are methods for forming hybrid metal-oxide-semiconductor field effect transistors (MOSFETs) and the hybrid MOSFETS thus obtained. In one embodiment, a method is disclosed that includes providing a first substrate comprising a first region and a second region, providing a second substrate comprising a second semiconductor layer and an insulating layer overlaying the second semiconductor layer, and direct substrate bonding the second substrate to the first substrate, thereby contacting the first region and the second region with the insulating layer. The method further includes selectively removing the second semiconductor layer and the insulating layer in the first region, thereby exposing the first semiconductor layer in the first region, forming a first gate stack of a first MOSFET on the exposed first semiconductor layer in the first region, and forming a second gate stack of a second MOSFET on the second semiconductor layer in the second region.
    Type: Application
    Filed: May 2, 2012
    Publication date: November 8, 2012
    Applicant: IMEC
    Inventors: Thomas Y. Hoffmann, Matty Caymax, Niamh Waldron, Geert Hellings
  • Patent number: 8119488
    Abstract: A quantum well device and a method for manufacturing the same are disclosed. In one aspect, the device includes a quantum well region overlying a substrate, a gate region overlying a portion of the quantum well region, a source and drain region adjacent to the gate region. The quantum well region includes a buffer structure overlying the substrate and including semiconductor material having a first band gap, a channel structure overlying the buffer structure including a semiconductor material having a second band gap, and a barrier layer overlying the channel structure and including an un-doped semiconductor material having a third band gap. The first and third band gap are wider than the second band gap. Each of the source and drain region is self-aligned to the gate region and includes a semiconductor material having a doped region and a fourth band gap wider than the second band gap.
    Type: Grant
    Filed: February 24, 2011
    Date of Patent: February 21, 2012
    Assignees: IMEC, Katholieke Universiteit Leuven
    Inventors: Geert Hellings, Geert Eneman, Marc Meuris
  • Publication number: 20110140087
    Abstract: A quantum well device and a method for manufacturing the same are disclosed. In one aspect, the device includes a quantum well region overlying a substrate, a gate region overlying a portion of the quantum well region, a source and drain region adjacent to the gate region. The quantum well region includes a buffer structure overlying the substrate and including semiconductor material having a first band gap, a channel structure overlying the buffer structure including a semiconductor material having a second band gap, and a barrier layer overlying the channel structure and including an un-doped semiconductor material having a third band gap. The first and third band gap are wider than the second band gap. Each of the source and drain region is self-aligned to the gate region and includes a semiconductor material having a doped region and a fourth band gap wider than the second band gap.
    Type: Application
    Filed: February 24, 2011
    Publication date: June 16, 2011
    Applicants: IMEC, Katholieke Universiteit Leuven
    Inventors: Geert Hellings, Geert Eneman, Marc Meuris
  • Patent number: 7915608
    Abstract: A quantum well device and a method for manufacturing the same are disclosed. In one aspect, the device includes a quantum well region overlying a substrate, a gate region overlying a portion of the quantum well region, a source and drain region adjacent to the gate region. The quantum well region includes a buffer structure overlying the substrate and including semiconductor material having a first band gap, a channel structure overlying the buffer structure including a semiconductor material having a second band gap, and a barrier layer overlying the channel structure and including an un-doped semiconductor material having a third band gap. The first and third band gap are wider than the second band gap. Each of the source and drain region is self-aligned to the gate region and includes a semiconductor material having a doped region and a fourth band gap wider than the second band gap.
    Type: Grant
    Filed: May 8, 2009
    Date of Patent: March 29, 2011
    Assignees: IMEC, Katholieke Universiteit Leuven
    Inventors: Geert Hellings, Geert Eneman, Marc Meuris
  • Publication number: 20090283756
    Abstract: A quantum well device and a method for manufacturing the same are disclosed. In one aspect, the device includes a quantum well region overlying a substrate, a gate region overlying a portion of the quantum well region, a source and drain region adjacent to the gate region. The quantum well region includes a buffer structure overlying the substrate and including semiconductor material having a first band gap, a channel structure overlying the buffer structure including a semiconductor material having a second band gap, and a barrier layer overlying the channel structure and including an un-doped semiconductor material having a third band gap. The first and third band gap are wider than the second band gap. Each of the source and drain region is self-aligned to the gate region and includes a semiconductor material having a doped region and a fourth band gap wider than the second band gap.
    Type: Application
    Filed: May 8, 2009
    Publication date: November 19, 2009
    Applicants: Interuniversitair Microelektronica Centrum vzw (IMEC), Katholieke Universiteit Leuven
    Inventors: Geert Hellings, Geert Eneman, Marc Meuris