Patents by Inventor George W. Orsula
George W. Orsula has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7776508Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: October 31, 2007Date of Patent: August 17, 2010Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 7704668Abstract: The invention provides positive-acting chemically-amplified photoresist compositions that can provide excellent lithographic performance as well as significantly enhanced storage stability. In one aspect, photoresist compositions are provided that comprise a solvent that is free of hydroxy groups (i.e. non-hydroxylic solvent), a resin binder and a photoactive compound that exhibits enhanced and long-term solubility in the solvent. In a further aspect, resists are provided that are formulated in a hydroxyl-containing solvent such as ethyl lactate and that contains a sulfonium salt photoactive compound that includes a sulfonate counter anion that can provide enhanced storage stability for the resist.Type: GrantFiled: August 4, 1998Date of Patent: April 27, 2010Assignee: Rohm and Haas Electronic Materials LLCInventors: James F. Cameron, James Michael Mori, George W. Orsula, Guangyu Xu, Yoshihiro Yamamoto
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Publication number: 20080248426Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: ApplicationFiled: October 31, 2007Publication date: October 9, 2008Applicant: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 7378222Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: January 9, 2006Date of Patent: May 27, 2008Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 7014982Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: April 26, 2004Date of Patent: March 21, 2006Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Publication number: 20040202959Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: ApplicationFiled: April 26, 2004Publication date: October 14, 2004Applicant: Shipley Company, L.L.CInventors: James W. Thackeray, George W. Orsula
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Patent number: 6803169Abstract: The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size.Type: GrantFiled: February 17, 2001Date of Patent: October 12, 2004Assignee: Shipley Company, L.L.C.Inventors: James F. Cameron, James Michael Mori, George W. Orsula, James W. Thackeray
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Patent number: 6773864Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: December 31, 2002Date of Patent: August 10, 2004Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 6528235Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: June 6, 2002Date of Patent: March 4, 2003Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Publication number: 20020187408Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: ApplicationFiled: June 6, 2002Publication date: December 12, 2002Applicant: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 6472128Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: August 7, 2001Date of Patent: October 29, 2002Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 6451503Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: April 30, 1996Date of Patent: September 17, 2002Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Publication number: 20020009670Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: ApplicationFiled: August 7, 2001Publication date: January 24, 2002Applicant: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Publication number: 20010038970Abstract: The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size.Type: ApplicationFiled: February 17, 2001Publication date: November 8, 2001Applicant: Shipley Company, L.L.C.Inventors: James F. Cameron, James Michael Mori, George W. Orsula, James W. Thackeray
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Patent number: 6203965Abstract: The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size. A specific composition comprises a terpolymer having units of hydroxystyrene, styrene and t-butyl acrylate with the photoacid generators di-(4-tbutylphenyl)iodonium camphorsulfonate and di-(4-t-butylphenyl)iodonium o-trifluoromethylbenzene sulfonate.Type: GrantFiled: April 19, 2000Date of Patent: March 20, 2001Assignees: Shipley Company, L.L.C., IBM CorporationInventors: James F. Cameron, James Michael Mori, George W. Orsula, James W. Thackeray, Wu-Song Huang, Ronald A. DellaGuardia, Kuang-Jung Chen, Hiroshi Ito, Wayne M. Moreau
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Patent number: 6200728Abstract: The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size.Type: GrantFiled: February 20, 1999Date of Patent: March 13, 2001Assignee: Shipley Company, L.L.C.Inventors: James F. Cameron, James Michael Mori, George W. Orsula, James W. Thackeray
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Patent number: 6165697Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: November 15, 1991Date of Patent: December 26, 2000Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 5919597Abstract: Methods are provided to prepare photoresists without isolation of various components, i.e. in a "one-pot" procedure. Preferred one-pot preparation methods of the invention include preparing a photoresist resin binder in a selected photoresist solvent and, without isolation of the resin binder from the solvent, adding a photoactive component and any other desired photoresist materials to the resin binder in solution to thereby provide a liquid photoresist composition in the solvent in which the resin binder was prepared. The invention also provides novel methods for synthesizing resist resin binders, particularly phenolic polymers that contain phenolic OH groups covalently bonded to another moiety such as acid labile groups or inert blocking groups.Type: GrantFiled: October 30, 1997Date of Patent: July 6, 1999Assignees: IBM Corporation of Armonk, Shipley Company, L.L.C. of MarlboroughInventors: Roger F. Sinta, Uday Kumar, George W. Orsula, James I. T. Fahey, William R. Brunsvold, Wu-Song Huang, Ahmad D. Katnani, Ronald W. Nunes, Mahmoud M. Khojasteh
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Patent number: 5851730Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: November 26, 1997Date of Patent: December 22, 1998Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula
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Patent number: 5851738Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.Type: GrantFiled: November 26, 1997Date of Patent: December 22, 1998Assignee: Shipley Company, L.L.C.Inventors: James W. Thackeray, George W. Orsula