Patents by Inventor Gerardo A. Brucker
Gerardo A. Brucker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240118158Abstract: A thermal conductivity gauge implements a model of power dissipation to accurately measure gas pressure. An envelope surrounds a gas volume, and a sensor wire is positioned within the gas volume. The controller provides a model of power dissipation from the thermal conductivity gauge, including power loss due to conductive heat loss from sensor wire end contacts, radiative loss from the sensor wire toward the gas envelope, and pressure dependent conductive heat loss from the sensor wire through surrounding gas. The controller then applies a power input to the sensor wire to heat the sensor wire, and measures total power dissipation WT, sensor wire temperature Ts, and envelope temperature Te during the application of the power input. Gas pressure within the envelope is determined based on the measured WT, Ts and Te and the model of power dissipation.Type: ApplicationFiled: October 11, 2022Publication date: April 11, 2024Inventors: Gerardo A. Brucker, Scott C. Heinbuch, Timothy C. Swinney
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Patent number: 11946823Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.Type: GrantFiled: April 19, 2023Date of Patent: April 2, 2024Assignee: MKS Instruments, Inc.Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Publication number: 20240019332Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.Type: ApplicationFiled: September 27, 2023Publication date: January 18, 2024Inventor: Gerardo A. Brucker
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Publication number: 20230366763Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.Type: ApplicationFiled: April 19, 2023Publication date: November 16, 2023Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Patent number: 11808643Abstract: A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.Type: GrantFiled: November 3, 2021Date of Patent: November 7, 2023Assignee: MKS INSTRUMENTS, INC.Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Patent number: 11802806Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.Type: GrantFiled: January 21, 2021Date of Patent: October 31, 2023Assignee: MKS Instruments, Inc.Inventor: Gerardo A. Brucker
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Patent number: 11656139Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.Type: GrantFiled: November 20, 2020Date of Patent: May 23, 2023Assignee: MKS Instruments, Inc.Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Publication number: 20230127693Abstract: Systems and methods for detecting a composition of a binary gas mixture are provided. Such methods and systems include, with a species-dependent mass flow meter, sensing a mass flow rate of a binary gas mixture comprising gases of differing gas correction factors and, with a species-independent pressure sensor, sensing a total pressure of the binary gas mixture. An output representative of a relative concentration of one gas of the binary gas mixture is provided. The relative concentration is determined as a function of the sensed mass flow rate and the sensed total pressure.Type: ApplicationFiled: October 22, 2021Publication date: April 27, 2023Inventors: Chad David Wilson, Gerardo A. Brucker, Junhua Ding
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Publication number: 20220228939Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.Type: ApplicationFiled: January 21, 2021Publication date: July 21, 2022Inventor: Gerardo A. Brucker
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Patent number: 11366036Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.Type: GrantFiled: December 11, 2020Date of Patent: June 21, 2022Assignee: MKS Instruments, Inc.Inventors: Brandon J. Kelly, Clinton L. Percy, Scott C. Heinbuch, Gerardo A. Brucker, Timothy C. Swinney, Timothy R. Piwonka-Corle
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Publication number: 20220155172Abstract: A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.Type: ApplicationFiled: November 3, 2021Publication date: May 19, 2022Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Publication number: 20210208016Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.Type: ApplicationFiled: November 20, 2020Publication date: July 8, 2021Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Patent number: 10969290Abstract: A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.Type: GrantFiled: December 7, 2017Date of Patent: April 6, 2021Assignee: MKS Instruments, Inc.Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Publication number: 20210096035Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.Type: ApplicationFiled: December 11, 2020Publication date: April 1, 2021Inventors: Brandon J. Kelly, Clinton L. Percy, Scott C. Heinbuch, Gerardo A. Brucker, Timothy C. Swinney, Timothy R. Piwonka-Corle
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Patent number: 10948456Abstract: A gas analyzer system uses an ionization source, which can be a hot cathode ionization source. A magnet assembly is positioned to define a magnetic field, which permits separation of ion components based on their mass to charge ratio. An ion beam deflector is used, such as a pair of deflector plates, which can scan ion components across a detector. The ion beam deflector defines a deflection electric field across the magnetic field and across a direction of travel of the ions emitted from the ionization source.Type: GrantFiled: November 27, 2019Date of Patent: March 16, 2021Assignee: MKS Instruments, Inc.Inventors: Gerardo A. Brucker, Timothy C. Swinney, Clinton L. Percy
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Patent number: 10928265Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.Type: GrantFiled: April 29, 2019Date of Patent: February 23, 2021Assignee: MKS Instruments, Inc.Inventors: Gerardo A. Brucker, Timothy C. Swinney, Clinton L. Percy
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Patent number: 10914717Abstract: A partial pressure detector and methods of detecting a partial pressure are provided, in which a thermal conductivity gauge, such as a Pirani gauge, is configured to sense a pressure of a mixture of gases within a vacuum chamber. An input of the partial pressure detector is configured to receive a total pressure reading from a species-independent pressure sensor of the mixture of gases in the vacuum chamber, and a controller configured to provide an output representing an amount of a species of gas in the vacuum chamber as a function of the pressure as sensed by the thermal conductivity gauge and the received total pressure reading. The controller has a resolution, and a range of the resolution is scaled to a range of expected partial pressures of the species. The output can be a partial pressure or a weighted partial pressure of the gas species.Type: GrantFiled: May 9, 2018Date of Patent: February 9, 2021Assignee: MKS Instruments, Inc.Inventor: Gerardo A. Brucker
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Patent number: 10876917Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.Type: GrantFiled: May 17, 2019Date of Patent: December 29, 2020Assignee: MKS Instruments, Inc.Inventors: Brandon J. Kelly, Clinton L. Percy, Scott C. Heinbuch, Gerardo A. Brucker, Timothy C. Swinney, Timothy R. Piwonka-Corle
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Patent number: 10845263Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.Type: GrantFiled: April 17, 2018Date of Patent: November 24, 2020Assignee: MKS INSTRUMENTS, INC.Inventors: Gerardo A. Brucker, Timothy C. Swinney
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Publication number: 20190368959Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.Type: ApplicationFiled: April 29, 2019Publication date: December 5, 2019Inventors: Gerardo A. Brucker, Timothy C. Swinney, Clinton L. Percy