Abstract: A miniaturised electrochemical sensor for detection of a component in a gas is provided. The sensor comprises a reference electrode, a counter electrode and a structure comprising a plurality of passages delineated by walls extending along the passages. A working electrode covers the walls of the structure and a layer of an ionomer covers at least part of the working electrode along the walls of the structure. The layer of ionomer is in ion conducting contact with the electrodes. The disclosure further relates to a method of fabricating a miniaturised electrochemical sensor and to a device for measuring content of NO in exhaled breath comprising such a miniaturised electrochemical sensor.

Abstract: A micromachined fluid flow regulating device is disclosed comprising a fluid flow channel, at least one flow orifice formed in the channel, defining an inlet portion of the channel upstream of the flow orifice, an outlet portion of the channel downstream of the flow orifice, the fluid having a flow direction from the inlet portion to the outlet portion of the channel. At least one piston is arranged upstream of the flow orifice, movably suspended in the channel by a spring means such that the piston is movable by the fluid in the flow direction of the fluid, towards the flow orifice, to regulate a fluid flow through the flow orifice. The disclosure further relates to the use of a micromachined flow regulating device in a breath analysis device and to a method of fabricating a flow regulating device.

Abstract: A miniaturised electrochemical sensor for detection of a component in a gas is provided. The sensor comprises a reference electrode, a counter electrode and a structure comprising a plurality of passages delineated by walls extending along the passages. A working electrode covers the walls of the structure and a layer of an ionomer covers at least part of the working electrode along the walls of the structure. The layer of ionomer is in ion conducting contact with the electrodes. The disclosure further relates to a method of fabricating a miniaturised electrochemical sensor and to a device for measuring content of NO in exhaled breath comprising such a miniaturised electrochemical sensor.

Abstract: A microfluidic system comprises a first portion and a second portion. The first portion comprises a material which is able to change its volume when activated by an exciting factor, characterized by the fact that the first portion and the second portion define a zone which, when the first portion is not yet activated by the exciting factor, shows a first topography devoid of any fluidic pathway and which, after activation by the exciting factor, shows a second topography which is adapted to contain at least one fluidic pathway. The microfluidic system further comprises a tight cover surface situated above the first portion and the second portion.

Abstract: Microfluidic system (1, 2, 10, 11, 16) comprising a first portion (3, 4, 24, 25) and a second portion (5-7), said first portion (3, 4) comprising a material which is able to change its volume when activated by an exciting factor, characterized by the fact that said first portion (3, 4) and said second portion (5-7) define a zone (3-7) which, when said first portion (3,4) is not yet activated by said exciting factor, shows a first topography devoid of any fluidic pathway and which, after activation by said exciting factor, shows a second topography (9, 14) which is adapted to contain at least one fluidic pathway, said microfluidic system furthermore comprising a tight cover surface (20) situated above said first portion (3, 4) and said second portion (5-7).

Abstract: The present invention discloses a Micro-Electro-Mechanical systems (MEMS) device suitable for use in a range of applications from DC, such as switching electrical signal lines, to RF applications such as tunable capacitors and switches. In an embodiment of the invention, the device comprises a bottom substrate and a top substrate separated at a fixed distance from each other. Disposed between the substrates is a flexible S-shaped membrane having an electrode or an electrically conducting electrode layer with one end attached to the top substrate and the other end in contact with the bottom substrate. An electrically conducting contact block is attached to the underside of the membrane actuator for short circuiting a signal line when the switch is in the closed position.

Abstract: Method of hollow micro-projections having side walls and at least one opening in a side wall, by a molding technique. The hollow micro-projections are defined by a first, negative mold defining the exterior shape of the micro-projections and a second, positive mold defining the hollow interior shape of the micro-projections. The method includes injecting a moldable material into the space between the two molds, in a state where they have been brought together. The positive and negative molds each have an essentially cylindrical geometry. In the process of bringing the molds together, the mold halves are laterally off-set with respect to each other, such that the distance between an inner wall of the negative mold and the positive mold in the area, ranges from zero to a finite distance. Micro-projections and arrays of micro-projections are also disclosed.

Abstract: The present invention discloses a microvalve for providing pneumatic-flow regulation suitable for use in microsystem applications that are operable using highly efficient actuation means for flow obstruction while being space efficient in design in a manner that is suitable for cost effective bullsk microfabrication. In an embodiment of the invention, the microvalve comprises a first substrate layer, a second layer disposed over the first substrate layer cooperating with the first substrate layer to form a channel through which the flow traverses and defines a direction of the flow. An obstruction element or knife gate is micromachined into the second layer such that it is pivotably attached and actuated with a bimorph actuator to displace the gate along a plane that is substantially perpendicular to the direction of the flow in order to controllably regulate the flow.

Abstract: A method of combining components to form an integrated device, wherein at least one first component is provided on a first surface of a sacrificial substrate, and at least one second component is provided on a first surface of a non-sacrificial substrate. At least one support structure is formed on at least one of the first surfaces of the sacrificial substrate, and the non-sacrificial substrate, respectively, such that said at least one support structure is extended outwardly from at least one of the first surfaces. The sacrificial substrate carrying the first component, and the non-sacrificial substrate carrying the second component, respectively, are bonded, so that the first and second surfaces will be facing one another with a distance defined by a thickness of the support structure. At least a part of the sacrificial substrate is removed. The first component and second components are interconnected.

Abstract: A micro-needle according to the invention protrudes from a support member. The needle comprises a needle body portion, a closed pointed tip portion, and an inner lumen extending through said support member and into said protruding needle. The needle body portion has at least one side opening communicating with said inner lumen. The method of making the needle comprises providing a mask on the front side of an etchable wafer such that the vertical projection of said mask at least partially covers the extension of a hole made in the back side. Said mask is isotropically underetched to remove wafer material. An anisotropic etch forms a protruding structure. Optionally a second isotropic etch on said protruding structure exposes the blind hole. Optionally a final anisotropic etch extends the needle without forming side openings.

Abstract: An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 &mgr;m long H-shaped double ended supported force transducing beam (16). The beam is located beneath and at one end attached to a square polysilicon diaphragm (14) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 &mgr;m thick was found to be 5 &mgr;V/V/mmHg.

Abstract: A medical electrode for obtaining biopotentials from the skin of a subject or electrically stimulating the subject's skin and deeper tissue layers. The electrode has a carrier base member from which project a plurality of spikes arranged in an array on one surface of the base member. The spikes are sufficiently long to penetrate through the stratum corneum into the stratum germinativum of the subject's skin. The spikes may be formed by a deep reactive ion etching process on a silicon wafer forming the base member. A fluid container may be formed on another surface of the skin for providing a drug to the surface of the skin through holes in the base member. The action of the spikes on the skin enhances administration of the drug.

Abstract: A method of combining components to form an integrated device, wherein the components are provided on a first sacrificial wafer, and a second non-sacrificial wafer, respectively. The sacrificial wafer carries a first plurality of components and the non-sacrificial wafer carries a second plurality of components. The wafers are bonded together with an intermediate bonding material. Optionally the sacrificial wafer is thinned to a desired level. The components of the sacrificial wafer are electrically interconnected to the component(s) on the non-sacrificial wafer. Finally, optionally the intermediate bonding material is stripped away.

Abstract: An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements are also coupled to the beams to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.

Abstract: A displacement pump with a pump housing containing a pump chamber of varying volume, the limiting walls of which includes a moveable portion or diaphragm, the movement and/or deformation of which varies the pump chamber volume. The pump chamber has a fluid inlet on the suction side of the pump and a fluid outlet on the pressure side. Both the fluid inlet and the fluid outlet, or possibly only one of them, includes a flow controlling element having one diffuser and one diffuser inlet which, for the same flow, has a larger pressure drop in one flow direction (the nozzle direction) than in the opposite flow direction (the diffuser direction). A drive element is coupled to the diaphragm, whereby the diaphragm can be caused to oscillate, so that the fluid volume in the pump chamber is caused to pulsate and thereby produce a net flow of fluid through the pump.

Abstract: Micromachining, etching and bonding techniques are employed to fabricate hermetically sealed gas-filled chambers from silicon and/or glass wafers. The hermetically sealed gas-filled chambers have precise dimensions and are filled with a preselected concentration of gas, thus rendering exceptional performance for use as an optical gas filter. The first step involves etching one or more cavities or holes in one or more glass or silicon wafers. These wafers eventually become part of a chip assembly having one or more hermetically sealed gas-filled chambers after appropriate bonding procedures. Interfaces between aligned silicon wafers are bonded using fusion bonding techniques whereas interfaces between silicon and glass wafers are bonded using anodic bonding techniques.

Abstract: A fluid flow sensor uses lift forces exerted on a plate-like airfoil member to determine the velocity of a fluid flowing past the sensor. The member has a pair of spaced, low aspect ratio airfoil elements. A central portion of the airfoil member is coupled to a frame that positions the airfoil member in the fluid flow with an angle of attack with respect to the fluid flow direction. The flowing fluid generates velocity related lift forces on the airfoil member, the magnitude of which decrease along the airfoil member from the upstream end to the downstream end. The lift forces so applied deflect the upstream airfoil element to a greater extent than the downstream airfoil element. Strain gauges are coupled to the airfoil elements to detect their deflection. The strain gauges are connected in a bridge configuration to provide a signal indicative of fluid velocity.