Abstract: There is provided an analysis device comprising a gas phase and a liquid phase and at least one sensor, said sensor having at least one point where an analyte is detected, said at least point being in contact with the liquid phase, characterized in that the device comprises a membrane with a first and a second side, which membrane is in contact with the gas phase on at least a part of one side of the membrane and which membrane is in contact with the liquid phase on at least a part of the other side of the membrane, wherein the membrane comprises openings, and wherein the largest possible distance between any two openings in the membrane is larger than the distance between the membrane and the point where an analyte is detected, moreover there is provided a method for analyzing an analyte in a gas phase.

Abstract: A micromachined fluid flow regulating device is disclosed comprising a fluid flow channel, at least one flow orifice formed in the channel, defining an inlet portion of the channel upstream of the flow orifice, an outlet portion of the channel downstream of the flow orifice, the fluid having a flow direction from the inlet portion to the outlet portion of the channel. At least one piston is arranged upstream of the flow orifice, movably suspended in the channel by a spring means such that the piston is movable by the fluid in the flow direction of the fluid, towards the flow orifice, to regulate a fluid flow through the flow orifice. The disclosure further relates to the use of a micromachined flow regulating device in a breath analysis device and to a method of fabricating a flow regulating device.

Abstract: A miniaturised electrochemical sensor for detection of a component in a gas is provided. The sensor comprises a reference electrode, a counter electrode and a structure comprising a plurality of passages delineated by walls extending along the passages. A working electrode covers the walls of the structure and a layer of an ionomer covers at least part of the working electrode along the walls of the structure. The layer of ionomer is in ion conducting contact with the electrodes. The disclosure further relates to a method of fabricating a miniaturised electrochemical sensor and to a device for measuring content of NO in exhaled breath comprising such a miniaturised electrochemical sensor.

Abstract: A method is disclosed for forming conductive vias in a substrate by filling preformed via holes, preferably through via holes, with conductive material. The method includes providing a plurality of preformed objects at least partly including ferromagnetic material on a surface of the substrate; providing a magnetic source on an opposite side of the substrate with respect to the plurality of preformed objects, thereby at least partly aligning at least a portion of the preformed objects with a magnetic field associated with the magnetic source; and moving the magnetic source relative the substrate, or vice versa, thereby moving the at least portion of the preformed objects into at least a portion of the via holes.

Abstract: A microfluidic system comprises a first portion and a second portion. The first portion comprises a material which is able to change its volume when activated by an exciting factor, characterized by the fact that the first portion and the second portion define a zone which, when the first portion is not yet activated by the exciting factor, shows a first topography devoid of any fluidic pathway and which, after activation by the exciting factor, shows a second topography which is adapted to contain at least one fluidic pathway. The microfluidic system further comprises a tight cover surface situated above the first portion and the second portion.

Abstract: A method for at least partially inserting a plug into a hole, said method comprising the steps of a) providing a at least one substrate with at least one hole wherein said at least one hole has a largest dimension of from 1 ?m to 300 ?m, b) providing a piece of material, wherein said piece of material has a larger dimension than said at least one hole, c) pressing said piece of material against the hole with a tool so that a plug is formed, wherein at least a part of said piece of material is pressed into said hole, d) removing the tool from the piece of material. There is further disclosed a plugged hole manufactured with the method. One advantage of an embodiment is that an industrially available wire bonding technology can be used to seal various cavities. The existing wire bonding technology makes the plugging fast and cheap.

Abstract: Method of hollow micro-projections having side walls and at least one opening in a side wall, by a molding technique. The hollow micro-projections are defined by a first, negative mold defining the exterior shape of the micro-projections and a second, positive mold defining the hollow interior shape of the micro-projections. The method includes injecting a moldable material into the space between the two molds, in a state where they have been brought together. The positive and negative molds each have an essentially cylindrical geometry. In the process of bringing the molds together, the mold halves are laterally off-set with respect to each other, such that the distance between an inner wall of the negative mold and the positive mold in the area, ranges from zero to a finite distance. Micro-projections and arrays of micro-projections are also disclosed.

Abstract: A hollow out-of-wafer-plane micro-needle protruding from a support member, the micro-needle includes a body portion having a longitudinal central axis, an inner lumen within the body portion and extending through the support member and into the protruding micro-needle, a closed pointed tip portion closing off the inner lumen in the tip region, the central axis extending through the tip portion, and at least one side opening in the body portion having an axis that intersects the central axis, the at least one side opening communicating with the inner lumen.

Abstract: There is provided an analysis device comprising a gas phase and a liquid phase and at least one sensor, said sensor having at least one point where an analyte is detected, said at least point being in contact with the liquid phase, characterised in that the device comprises a membrane with a first and a second side, which membrane is in contact with the gas phase on at least a part of one side of the membrane and which membrane is in contact with the liquid phase on at least a part of the other side of the membrane, wherein the membrane comprises openings, and wherein the largest possible distance between any two openings in the membrane is larger than the distance between the membrane and the point where an analyte is detected, moreover there is provided a method for analysing an analyte in a gas phase.

Abstract: Microfluidic system (1, 2, 10, 11, 16) comprising a first portion (3, 4, 24, 25) and a second portion (5-7), said first portion (3, 4) comprising a material which is able to change its volume when activated by an exciting factor, characterized by the fact that said first portion (3, 4) and said second portion (5-7) define a zone (3-7) which, when said first portion (3,4) is not yet activated by said exciting factor, shows a first topography devoid of any fluidic pathway and which, after activation by said exciting factor, shows a second topography (9, 14) which is adapted to contain at least one fluidic pathway, said microfluidic system furthermore comprising a tight cover surface (20) situated above said first portion (3, 4) and said second portion (5-7).

Abstract: The present invention discloses a Micro-Electro-Mechanical systems (MEMS) device suitable for use in a range of applications from DC, such as switching electrical signal lines, to RF applications such as tunable capacitors and switches. In an embodiment of the invention, the device comprises a bottom substrate and a top substrate separated at a fixed distance from each other. Disposed between the substrates is a flexible S-shaped membrane having an electrode or an electrically conducting electrode layer with one end attached to the top substrate and the other end in contact with the bottom substrate. An electrically conducting contact block is attached to the underside of the membrane actuator for short circuiting a signal line when the switch is in the closed position.

Abstract: Method of hollow micro-projections having side walls and at least one opening in a side wall, by a molding technique. The hollow micro-projections are defined by a first, negative mold defining the exterior shape of the micro-projections and a second, positive mold defining the hollow interior shape of the micro-projections. The method includes injecting a moldable material into the space between the two molds, in a state where they have been brought together. The positive and negative molds each have an essentially cylindrical geometry. In the process of bringing the molds together, the mold halves are laterally off-set with respect to each other, such that the distance between an inner wall of the negative mold and the positive mold in the area, ranges from zero to a finite distance. Micro-projections and arrays of micro-projections are also disclosed.

Abstract: A micro-needle protrudes from a support member. The needle has a needle body portion, a closed pointed tip portion, and an inner lumen extending through the support member and into the protruding needle. The needle body portion has at least one side opening communicating with the inner lumen. The method of making the needle comprises providing a mask on the front side of an etchable wafer such that the vertical projection of the mask at least partially covers the extension of a hole made in the back side. The mask is isotropically underetched to remove wafer material. An anisotropic etch forms a protruding structure. Optionally a second isotropic etch on the protruding structure exposes the blind hole. Optionally a final anisotropic etch extends the needle without forming side openings.

Abstract: The present invention discloses a microvalve for providing pneumatic-flow regulation suitable for use in microsystem applications that are operable using highly efficient actuation means for flow obstruction while being space efficient in design in a manner that is suitable for cost effective bullsk microfabrication. In an embodiment of the invention, the microvalve comprises a first substrate layer, a second layer disposed over the first substrate layer cooperating with the first substrate layer to form a channel through which the flow traverses and defines a direction of the flow. An obstruction element or knife gate is micromachined into the second layer such that it is pivotably attached and actuated with a bimorph actuator to displace the gate along a plane that is substantially perpendicular to the direction of the flow in order to controllably regulate the flow.

Abstract: A method of combining components to form an integrated device, wherein the components are provided on a first sacrificial wafer, and a second non-sacrificial wafer, respectively. The sacrificial wafer carries a first plurality of components and the non-sacrificial wafer carries a second plurality of components. The wafers are bonded together with an intermediate bonding material. Optionally the sacrificial wafer is thinned to a desired level. The components of the sacrificial wafer are electrically interconnected to the component(s) on the non-sacrificial wafer. Finally, optionally the intermediate bonding material is stripped away.

Abstract: A method of combining components to form an integrated device, wherein at least one first component is provided on a first surface of a sacrificial substrate, and at least one second component is provided on a first surface of a non-sacrificial substrate. At least one support structure is formed on at least one of the first surfaces of the sacrificial substrate, and the non-sacrificial substrate, respectively, such that said at least one support structure is extended outwardly from at least one of the first surfaces. The sacrificial substrate carrying the first component, and the non-sacrificial substrate carrying the second component, respectively, are bonded, so that the first and second surfaces will be facing one another with a distance defined by a thickness of the support structure. At least a part of the sacrificial substrate is removed. The first component and second components are interconnected.

Abstract: An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 ?m long H-shaped double ended supported force transducing beam (16). The beam is located beneath and at one end attached to a square polysilicon diaphragm (14) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 ?m thick was found to be 5 ?V/V/mmHg.

Abstract: A method of combining components to form an integrated device, wherein at least one first component is provided on a first surface of a sacrificial substrate, and at least one second component is provided on a first surface of a non-sacrificial substrate. At least one support structure is formed on at least one of the first surfaces of the sacrificial substrate, and the non-sacrificial substrate, respectively, such that said at least one support structure is extended outwardly from at least one of the first surfaces. The sacrificial substrate carrying the first component, and the non-sacrificial substrate carrying the second component, respectively, are bonded, so that the first and second surfaces will be facing one another with a distance defined by a thickness of the support structure. At least a part of the sacrificial substrate is removed. The first component and second components are interconnected.

Abstract: A micro-needle according to the invention protrudes from a support member. The needle comprises a needle body portion, a closed pointed tip portion, and an inner lumen extending through said support member and into said protruding needle. The needle body portion has at least one side opening communicating with said inner lumen. The method of making the needle comprises providing a mask on the front side of an etchable wafer such that the vertical projection of said mask at least partially covers the extension of a hole made in the back side. Said mask is isotropically underetched to remove wafer material. An anisotropic etch forms a protruding structure. Optionally a second isotropic etch on said protruding structure exposes the blind hole. Optionally a final anisotropic etch extends the needle without forming side openings.

Abstract: An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 &mgr;m long H-shaped double ended supported force transducing beam (16). The beam is located beneath and at one end attached to a square polysilicon diaphragm (14) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 &mgr;m thick was found to be 5 &mgr;V/V/mmHg.