Abstract: A pH sensor is provided. The pH sensor comprises a substrate and an ion sensitive field effect transistor (ISFET) die comprising an ion sensing part that responds to pH, wherein the ISFET die is located over the substrate. The pH sensor also comprises a protective layer formed over at least a portion of an outer surface of the ISFET die and at least a portion of the substrate. Further, the pH sensor comprises a cover member mechanically coupled to the protective layer, wherein the cover member houses the ISFET die and the substrate, and wherein the cover member defines an opening proximate to the ion sensing part.

Abstract: System and methods for silicon on insulator MEMS pressure sensors are provided. In one embodiment, a method comprises: applying a doping source to a silicon-on-insulator (SOI) silicon wafer having a sensor layer and an insulating layer comprising SiO2 material; doping the silicon wafer with Boron atoms from the doping source while controlling an injection energy of the doping to achieve a top-heavy ion penetration profile; and applying a heat source to diffuse the Boron atoms throughout the sensor layer of the SOI silicon wafer.

Abstract: A system for predicting fouling and corrosion of a combustion system in an industrial process includes a pipe, a restrictive element, and a fouling and corrosion detector. The pipe contains a fuel. The restrictive element is coupled to the pipe and the fuel passes through the restrictive element. The fouling and corrosion detector is coupled to the pipe and is adapted to detect a characteristic signature of the restrictive element and to generate an alarm if a change in the detected signature exceeds a predetermined limit relative to a baseline signature.

Abstract: A pH sensor is provided. The pH sensor comprises a substrate and an ion sensitive field effect transistor (ISFET) die comprising an ion sensing part that responds to pH, wherein the ISFET die is located over the substrate. The pH sensor also comprises a protective layer formed over at least a portion of an outer surface of the ISFET die and at least a portion of the substrate. Further, the pH sensor comprises a cover member mechanically coupled to the protective layer, wherein the cover member houses the ISFET die and the substrate, and wherein the cover member defines an opening proximate to the ion sensing part.

Abstract: A process device includes a controller and a wireless communications module. The wireless communications module is coupled to the controller. A power generation module is provided to generate electricity for the process device. The power generator module can be disposed within the process device or it can be a separate unit coupled to the process device.

Abstract: A pressure sensor device for a modular pressure sensor package is provided, comprising a substrate having a pressure port that extends through the substrate from a first side of the substrate to a second side of the substrate. A pressure sensor die is attached to the first side of the substrate, forming a seal over the pressure port on the first side of the substrate. A cover is attached to the first side of the substrate over the pressure sensor die, forming a sealed cavity wherein the pressure sensor die is located within the cavity. The device also comprises a plurality of electrical connectors mounted to the substrate external to the cavity, the plurality of electrical connectors electrically coupled to the pressure sensor die. Further, the substrate includes at least one mounting element configured to secure a pressure port interface to the second side of the substrate in a position around the pressure port.

Abstract: A pressure sensor device for a modular pressure sensor package is provided, comprising a substrate having a pressure port that extends through the substrate from a first side of the substrate to a second side of the substrate. A pressure sensor die is attached to the first side of the substrate, forming a seal over the pressure port on the first side of the substrate. A cover is attached to the first side of the substrate over the pressure sensor die, forming a sealed cavity wherein the pressure sensor die is located within the cavity. The device also comprises a plurality of electrical connectors mounted to the substrate external to the cavity, the plurality of electrical connectors electrically coupled to the pressure sensor die. Further, the substrate includes at least one mounting element configured to secure a pressure port interface to the second side of the substrate in a position around the pressure port.

Abstract: A pressure-sensing module includes a housing having a process-fluid port configured to be coupled to a process-fluid-flow circuit. The housing defines a first chamber into which the process fluid can flow through the process-fluid port. An isolator assembly is disposed within the housing and includes a fill port. The isolator assembly is configured to define a second chamber into which pressure-coupling fluid may be injected through the fill port. An electronic circuit is disposed within the second chamber and is configured to be pressure coupled by the coupling fluid and isolator assembly to the flow circuit. A plug having first and second ends occupies the fill port thereby sealing the second chamber. The first end is exposed to the process fluid in the first chamber, and the second end is exposed to the coupling fluid in the second chamber.

Abstract: A leak detection system is described for detecting a leak through a closed valve disposed between an upstream pipe and a downstream pipe of an industrial process. An insertable plate is coupled to the valve in the pipe in-line with the fluid flow. A sensor couples to the flow and provides a signature output. A leak detector is coupled to the sensor and adapted to detect a leak through the valve based upon the signature output.

Abstract: A method for inferring possible or impending corrosion or fouling of process elements from fluid flowing in a pipe of an industrial process is described. A frequency response of a body is measured. The measured frequency response is compared against a stored value. Corrosion or fouling of the process elements is identified based upon the comparison between the measured frequency response and the stored value.

Abstract: A pressure sensing device comprises a substrate having an opening, a pressure sensor die electrically connected to the substrate, and a pedestal having an upper surface that extends through the opening in the substrate, with the upper surface affixed to the sensor die. The pedestal has a pressure port that extends from the upper surface to a bottom surface of the pedestal, with the pressure port containing a hermetic sealing tube therein. A hermetic sealing cover is affixed to the substrate over the sensor die, with the cover and the substrate containing a reference pressure for the sensor die. A media isolation component has a chamber filled with a fluid that transmits a pressure applied to the media isolation component to the pressure sensor die. A capillary tube is affixed within the pressure port of the pedestal and is in communication with the sealing tube. The capillary tube and the sealing tube provide fluid communication between the chamber of the media isolation component and the sensor die.

Abstract: A pressure sensing device comprises a substrate having an opening, a pressure sensor die electrically connected to the substrate, and a pedestal having an upper surface that extends through the opening in the substrate, with the upper surface affixed to the sensor die. The pedestal has a pressure port that extends from the upper surface to a bottom surface of the pedestal, with the pressure port containing a hermetic sealing tube therein. A hermetic sealing cover is affixed to the substrate over the sensor die, with the cover and the substrate containing a reference pressure for the sensor die. A media isolation component has a chamber filled with a fluid that transmits a pressure applied to the media isolation component to the pressure sensor die. A capillary tube is affixed within the pressure port of the pedestal and is in communication with the sealing tube. The capillary tube and the sealing tube provide fluid communication between the chamber of the media isolation component and the sensor die.

Abstract: A sensing apparatus for determining the pressure of a fluid includes first and second support members. The first and second support members are configured to define at least one sealed chamber. A flexible diaphragm is disposed between the first and second support members. The diaphragm includes first and second opposing surfaces. The first opposing surface is in fluid communication with a first fluid-flow circuit, and the second opposing surface is in fluid communication with a second fluid-flow circuit. A first electronic circuit is disposed within the at least one chamber and coupled to the diaphragm for sensing a first differential pressure associated with the first and second flow circuits. The first electronic circuit is configured to produce at least one electrical signal proportional to a magnitude of the first differential pressure.

Abstract: A wireless process device for use in an industrial process control or monitoring system comprising includes a power source configured to power the process device. Diagnostic circuitry is configured to diagnose operation of process device and provides a diagnostic output. Wireless communication circuitry transmits information over a wireless communication link.

Abstract: Electronic steam trap monitoring is disclosed. An electronic steam trap monitor is operably coupled to an outlet of a steam trap and is configured to measure at least one process variable of fluid (liquid or gas) flowing through the trap, when the trap is known to be working normally. The steam trap monitor stores the process variable information obtained during the known operating condition for later comparison. The steam trap monitor obtains a later process variable measurement and compares it to the stored measurement to selectively generate a leakage indication. The steam trap monitor preferably uses a local power source and communicates wirelessly.

Abstract: A leak detection system is described for detecting a leak through a closed valve disposed between an upstream pipe and a downstream pipe of an industrial process. An insertable plate is coupled to the valve in the pipe in-line with the fluid flow. A sensor couples to the flow and provides a signature output. A leak detector is coupled to the sensor and adapted to detect a leak through the valve based upon the signature output.

Abstract: A field mountable dedicated process diagnostic device is used for diagnosing operation of an industrial control or monitoring system. An input is configured to receive at least one process signal related to operation of the industrial process. A memory contains diagnostic program instructions configured to implement a diagnostic algorithm using the process signal. The diagnostic algorithm is specific to the industrial process. A microprocessor performs the diagnostic program instructions and responsively diagnoses operation of the process based upon the process signal.

Abstract: A sensing apparatus for determining the pressure of a fluid includes first and second support members. The first and second support members are configured to define at least one sealed chamber. A flexible diaphragm is disposed between the first and second support members. The diaphragm includes first and second opposing surfaces. The first opposing surface is in fluid communication with a first fluid-flow circuit, and the second opposing surface is in fluid communication with a second fluid-flow circuit. A first electronic circuit is disposed within the at least one chamber and coupled to the diaphragm for sensing a first differential pressure associated with the first and second flow circuits. The first electronic circuit is configured to produce at least one electrical signal proportional to a magnitude of the first differential pressure.

Abstract: A pressure-sensing module includes a housing having a process-fluid port configured to be coupled to a process-fluid-flow circuit. The housing defines a first chamber into which the process fluid can flow through the process-fluid port. An isolator assembly is disposed within the housing and includes a fill port. The isolator assembly is configured to define a second chamber into which pressure-coupling fluid may be injected through the fill port. An electronic circuit is disposed within the second chamber and is configured to be pressure coupled by the coupling fluid and isolator assembly to the flow circuit. A plug having first and second ends occupies the fill port thereby sealing the second chamber. The first end is exposed to the process fluid in the first chamber, and the second end is exposed to the coupling fluid in the second chamber.