Patents by Inventor Gregory S. Horner

Gregory S. Horner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contactless total charge measurement with corona
    Patent number: 6448804
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer, and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Grant
    Filed: September 27, 2001
    Date of Patent: September 10, 2002
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Contactless total charge measurement with corona
    Publication number: 20020008536
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Application
    Filed: September 27, 2001
    Publication date: January 24, 2002
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge
    Patent number: 6335630
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Grant
    Filed: December 26, 2000
    Date of Patent: January 1, 2002
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Contactless total charge measurement with corona
    Publication number: 20010000651
    Type: Application
    Filed: December 26, 2000
    Publication date: May 3, 2001
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Non-contact electrical conduction measurement for insulating films
    Patent number: 6202029
    Abstract: A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.
    Type: Grant
    Filed: June 20, 2000
    Date of Patent: March 13, 2001
    Inventors: Roger L. Verkuil, Gregory S. Horner, Tom G. Miller
  • Contactless method for measuring total charge of an insulating layer on a substrate using corona charge
    Patent number: 6191605
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Grant
    Filed: August 18, 1997
    Date of Patent: February 20, 2001
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Method and apparatus for establishing electrical contact between a wafer and a chuck
    Patent number: 6121783
    Abstract: A needle is pressed into the backside oxide of a semiconductor wafer and a voltage applied to the wafer greater than the breakdown voltage of the oxide in order to make an electrical contact with the bulk material of the wafer. A capacitor plate is provided proximate to a wafer on a chuck and a Kelvin probe is provided proximate to the wafer. A varying voltage is applied between the chuck and the capacitor plate and a voltage is monitored between the Kelvin probe and the chuck. The monitored voltage remaining constant indicates electrical contact between the chuck and the wafer.
    Type: Grant
    Filed: April 22, 1997
    Date of Patent: September 19, 2000
    Inventors: Gregory S. Horner, Meindert J. Kleefstra, Roger L. Verkuil, Robert A. Miles
  • Non-contact tunnelling field measurement for a semiconductor oxide layer
    Patent number: 6097196
    Abstract: A corona source is used to repetitively apply charge to an oxide layer on a semiconductor. A Kelvin probe is used to measure the resulting voltage across the layer. The tunneling field is determined based on the value of voltage at which the voltage measurement saturates.
    Type: Grant
    Filed: April 23, 1997
    Date of Patent: August 1, 2000
    Inventors: Roger L. Verkuil, Gregory S. Horner, Tom G. Miller
  • Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
    Patent number: 6060709
    Abstract: A conductive slit screen is placed between a corona gun and the surface of a semiconductor wafer. The charge deposited on the wafer by the gun is controlled by a potential applied to the screen. A chuck orients the wafer in close proximity to the screen. A desired charge is applied to the wafer by depositing alternating polarity corona charge until the potential of the wafer equals the potential of the screen.
    Type: Grant
    Filed: December 31, 1997
    Date of Patent: May 9, 2000
    Inventors: Roger L. Verkuil, Gregory S. Horner, Tom G. Miller
  • Apparatus and method for depositing charge on a semiconductor wafer
    Patent number: 5594247
    Abstract: A conductive screen is placed between a corona gun and the surface of a semiconductor wafer. The charge deposited on the wafer by the gun is controlled by a potential applied to the screen. A chuck orients the wafer in close proximity to the screen. A desired charge is applied to the wafer by first applying a surplus of one charge to the wafer and then depositing an opposite polarity charge until the potential of the wafer equals the potential of the screen.
    Type: Grant
    Filed: July 7, 1995
    Date of Patent: January 14, 1997
    Assignee: Keithley Instruments, Inc.
    Inventors: Roger L. Verkuil, Gregory S. Horner, Thomas G. Miller