Abstract: Provided are a vertical interconnection structure including carbon nanotubes and a method of fabricating the same. The vertical interconnection structure includes a substrate; a lower electrode formed on the substrate; a catalyst layer formed on the lower electrode; an inactivated catalyst layer covering the lower electrode and having a first hole exposing the catalyst layer; an insulating layer which is formed on the inert catalyst layer and has a second hole connected to the first hole; a plurality of carbon nanotubes grown from an exposed area of the catalyst layer by the first hole; an upper electrode on the insulating layer being electrically connected to the carbon nanotubes, the inactivated catalyst layer is formed through a thermal reaction between the catalyst layer covering the lower electrode except for the catalyst layer in the first hole and a passivation layer having a third hole corresponding to the second hole.

Abstract: A novel method of forming catalyst particles, on which carbon nanotubes grow based, on a substrate with increased uniformity, and a method of synthesizing carbon nanotubes having improved uniformity are provided. A catalytic metal precursor solution is applied to a substrate. The applied catalytic metal precursor solution is freeze-dried, and then reduced to catalytic metal. The method of forming catalyst particles can minimize agglomeration and/or recrystallization of catalyst particles when forming the catalyst particles by freeze-drying the catalyst metal precursor solution. The catalyst particles formed by the method has a very uniform particle size and are very uniformly distributed on the substrate.

Abstract: A Field Emission Device (FED) having a ring-shaped emitter and its method of manufacture includes a ring-shaped emitter formed on a cathode exposed through an aperture of a gate electrode, has a shape corresponding to a shape of the aperture of the gate electrode, and has carbon nanotubes on edges thereof. The ring-shaped emitter is formed through an annealing process that controls the diffusion of a catalyst metal and silicon between a catalyst metal layer and a silicon layer.

Abstract: In a method of forming carbon nanotubes (CNTs) and a method of manufacturing a field emission display (FED) device using the CNTs, the method includes preparing a substrate on which a silicon layer is formed, sequentially forming a buffer layer and a catalyst metal layer on the silicon layer, partly forming metal silicide domains by diffusion between the silicon layer, the buffer layer and the catalyst metal layer by annealing the substrate, and growing CNTs on a surface of the catalyst metal layer.

Abstract: In a carbon nanotube (CNT) structure and a method of manufacturing the CNT structure, and in a field emission display (FED) device using the CNT structure and a method of manufacturing the FED device, the CNT structure includes a substrate, a plurality of buffer particles having a predetermined size coated on the substrate, a plurality of catalyst layers formed on surfaces of the buffer particles by annealing a catalyst material deposited on the substrate to a predetermined thickness so as to cover the buffer particles, and a plurality of CNTs grown from the catalyst layers.

Abstract: A carbon nanotube emitter and its fabrication method, a Field Emission Device (FED) using the carbon nanotube emitter and its fabrication method include a carbon nanotube emitter having a plurality of first carbon nanotubes arranged on a substrate and in parallel with the substrate, and a plurality of the second carbon nanotubes arranged on a surface of the first carbon nanotubes.

Abstract: A method of patterning a catalyst layer for synthesis of carbon nanotubes (CNTs) and a method of fabricating a field emission device (FED) using the method, whereby a catalyst layer formed of metal salt having a weak-acid negative ion group is formed on a substrate, a photoresist is formed on the catalyst layer, the photoresist is exposed to a light using a photomask with a predetermined pattern, predetermined regions of the photoresist and the catalyst layer are removed by using a strong base developing solution, and the photoresist which remains on the catalyst layer is removed.

Abstract: Provided are a photoanode including: a conductive substrate; carbon nanotubes and a semiconductor formed on the conductive substrate; and a photosensitizer formed on the carbon nanotubes and the semiconductor, and a solar cell including the photoanode. In the photoanode, the conductive carbon nanotubes can be directly formed on the conductive substrate, thereby promoting electron transfer, unlike in a common photoanode with no carbon nanotubes. In particular, densely formed, branched carbon nanotubes can serve as electron transfer channels between semiconductor particles, thereby enabling an effective application to solar cells, etc.

Abstract: A method of vertically aligning carbon nanotubes, whereby carbon nanotubes are grown on a substrate on which a catalyst metallic layer is formed, the grown carbon nanotubes are separated from the substrate in a bundle shape, the separated carbon nanotube bundles is put in an electrolyte having a charger, the carbon nanotube bundles are mixed with the charger to charge the carbon nanotube bundles, and the charged carbon nanotube bundles are vertically attached onto a surface of an electrode, using electrophoresis.

Abstract: A novel method of forming a catalyst base that can control the growth density of carbon nanotubes and increase the uniformity of the carbon nanotubes and a method of synthesizing carbon nanotubes employing the method of forming the catalyst base are provided. A precursor paste containing a catalytic metal precursor, a solid and a vehicle is applied on a substrate; and the catalytic metal precursor of the precursor paste applied on the substrate is reduced to form catalytic metal particles. According to the present invention, the growth density of carbon nanotubes can be easily controlled and carbon nanotubes with smaller and uniform diameters can be formed.

Abstract: A Field Emission Display (FED) and a method of manufacturing the FED are provided. The FED includes a substrate; a plurality of under-gate electrodes formed parallel to one another on a top surface of a substrate; a plurality of cathode electrodes formed perpendicular to the under-gate electrodes on an upper portion of the under-gate electrode, each of cathode holes being formed in portions of the cathode electrodes that intersect with the under-gate electrodes; a plurality of emitters formed symmetrical with respect to centers of the cathode holes on the cathode electrodes; and a plurality of gate electrodes formed to be electrically connected to the under-gate electrodes in central portions of the cathode holes.

Abstract: A carbon-nano tube (CNT) structure comprises a substrate and a plurality of CNTs, each CNT comprising a plurality of first CNTs grown perpendicular to the substrate and a plurality of second CNTs grown on sidewalls of the first CNTs. A method of manufacturing CNTs includes growing first CNTs on a substrate on which a catalyst material layer is formed, and growing second CNTs on surfaces of the first CNTs from a catalyst material on surfaces of the first CNTs. The second CNTs grown on the sidewalls of the first CNTs emit electrons at a low voltage. In addition, the CNT structure exhibits high electron emission current due to the second CNTs being used as electron emission sources, and exhibits uniform field emission due to the uniform diameter of the first CNTs. A display device incorporates the above-described structure.