Abstract: A method of platformization of an equipment front end module of a semiconductor production system includes the steps of: establishing a subsystem management module, a communication interface module, a parse module, and a network communication module; directing the command by the communication interface module to the subsystem management module; analyzing the command by the subsystem management module and sending the command to the corresponding subsystem module; sending the command from the corresponding subsystem module to the controller of the equipment front end module through the network communication module; and analyzing message by the parse module, sending a feedback to the corresponding subsystem module, and then sending the feedback to the control system of the semiconductor production system through the communication interface module.

Abstract: A method of achieving wireless sensor network (WSN) communication in a mesh and star topology network (MSTN), including: a) connecting a plurality of nodes in a WSN to form a mesh and star hybrid topology structure; b) based on the topology structure, defining a superframe structure based on IEEE 802.15.4-2006; c) based on the topology structure and superframe structure, defining methods for long period data processing, connectivity assessment, medium access control, channel measurement, frequency hopping, beacon frame formation, and two-stage resource allocation; d) based on the topology structure, superframe structure, and methods, defining a method for network establishment; and e) based on the network establishment method, defining a method for MSTN communications. The method features real-time communication, high reliability, and low energy consumption.

Abstract: A photovoltaic module comprising a first superstrate, a back sheet, a photovoltaic cell or a plurality of photovoltaic cells, each photovoltaic cell encapsulated and positioned between the superstrate and the back sheet, where the back sheet comprises a polyester material.