Abstract: A substrate transport system includes a hand, a main positioning member permanently mounted on a base, where the main positioning member is engageable with the hand at a position offset by a first distance in the first axis direction and offset by a second distance in the second axis direction from a substrate transfer position, and a control unit that stores a position coordinate in the first axis direction and a position coordinate in the second axis direction of the hand in a state where the hand is positioned by being engaged with the main positioning member.

Abstract: To detach a substrate from a table without damaging the substrate. According to Embodiment 1, provided is a substrate processing apparatus including a table to hold a substrate, a plurality of lift pins that are arranged at periphery of the table and configured to arrange or separate the substrate on or from the table and to be movable in a direction perpendicular to a surface of the table, a drive mechanism that includes a motor to move the lift pins in the direction perpendicular to the surface of the table, and a control device that is configured to control the drive mechanism. The control device is configured to be capable of moving the lift pins at a first speed and at a second speed different from the first speed.

Abstract: A cleaning apparatus includes: a cleaning chamber configured to clean a substrate; a transfer chamber positioned adjacent to the cleaning chamber and configured to transfer the substrate; a partition wall partitioning the cleaning chamber and the transfer chamber; a gutter fixed to the partition wall; and a discharge pipe connected to a bottom portion of the gutter. A first pass hole and a second pass hole positioned below the first pass hole are formed in the partition wall. The gutter is positioned between the first pass hole and the second pass hole, and extends from one side end to the other side end of the partition wall.

Abstract: The present teaching, which includes methods, systems and computer-readable media, relates to providing a representation of a relationship between entities related to online content interaction. The disclosed techniques may include receiving data related to online content interactions between a set of first entities and a set of second entities, and based on the received data, determining, for each one of the set of first entities, a set of first interaction frequency values each corresponding to one of the set of second entities, and determining, for each one of the set of second entities, a second interaction frequency value. Further, for each one of the set of first entities, a set of relation values may be determined based on the set of first interaction frequency values for that first entity and the second interaction frequency values, each relation value indicating an interaction relationship between that first entity and one second entity.

Abstract: The present teaching, which includes methods, systems and computer-readable media, relates to detecting online coalition fraud. The disclosed techniques may include grouping visitors that interact with online content into clusters, obtaining traffic features for each visitor, wherein the traffic features are based at least on data representing the corresponding visitor's interaction with the online content; determining, for each cluster, cluster metrics based on (one or more statistical values of) the traffic features of the visitors in that cluster; and determining whether a cluster is fraudulent based on the cluster metrics of the first cluster. For example, determining whether a cluster is fraudulent may include determining whether a first statistical value of the traffic features related to the first cluster is greater than a first threshold value, and/or determining whether a second statistical value of the traffic features related to the first cluster is lower than a second threshold value.