Abstract: In a method for determining force applied to an ultrasonic sensor, ultrasonic signals are emitted from an ultrasonic sensor. A plurality of reflected ultrasonic signals from a finger interacting with the ultrasonic sensor is captured. A first data based at least in part on a first reflected ultrasonic signal of the plurality of reflected ultrasonic signals is compared with a second data based at least in part on a second reflected ultrasonic signal of the plurality of reflected ultrasonic signals. A deformation of the finger during interaction with the ultrasonic sensor is determined based on differences between the first data based at least in part on the first reflected ultrasonic signal and the second data based at least in part on the second reflected ultrasonic signal. A force applied by the finger to the ultrasonic sensor is determined based at least in part on the deformation.

Abstract: In a method for determining force applied to an ultrasonic sensor, ultrasonic signals are emitted from an ultrasonic sensor. A plurality of reflected ultrasonic signals from a finger interacting with the ultrasonic sensor is captured. A first data based at least in part on a first reflected ultrasonic signal of the plurality of reflected ultrasonic signals is compared with a second data based at least in part on a second reflected ultrasonic signal of the plurality of reflected ultrasonic signals. A deformation of the finger during interaction with the ultrasonic sensor is determined based on differences between the first data based at least in part on the first reflected ultrasonic signal and the second data based at least in part on the second reflected ultrasonic signal. A force applied by the finger to the ultrasonic sensor is determined based at least in part on the deformation.

Abstract: An apparatus and method for frequency tuning/tracking between an electrical subsystem and a mechanical transducer subsystem is presented. An electromechanical transducer generates acoustic pulses as it is driven by a transmit signal from an electrical subsystem. As the transmit signal goes inactive, the settling behavior of the transducer is registered from which the difference in frequency between the resonance of the electromechanical transducer and the transmit signal frequency is determined and utilized for locking the electrical subsystem to the mechanical transducer subsystem by either tuning operating frequency of the electrical subsystem, or the mechanical transducer, to keep them matched (locked).

Abstract: In a method for detection of defective ultrasonic transducers in an in ultrasonic sensing device, an ultrasonic signal is generated at an ultrasonic sensing device comprising a plurality of ultrasonic transducers. A reflected ultrasonic signal corresponding to the ultrasonic signal is received at at least one ultrasonic transducer of the plurality of ultrasonic transducers. It is determined whether performance the at least one ultrasonic transducer is degraded based at least in part on the reflected ultrasonic signal.

Abstract: An array of piezoelectric ultrasonic transducer elements includes a plurality of superpixel regions. Each superpixel region includes at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region, and at least a second pixel set being disposed in an outer portion of the superpixel region. An electrical coupling may be provided between the array and transceiver electronics. The transceiver electronics may be configured to operate the array in a selectable one of a first mode and a second mode. In the first mode, the array generates a substantially plane ultrasonic wave having a first acoustic pressure. In the second mode, the array generates, from each superpixel region, a focused beam having a second acoustic pressure that is substantially higher than the first acoustic pressure.

Abstract: A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.

Abstract: An apparatus includes an array of pixels, each pixel including in-cell pixel logic and a piezoelectric micromechanical ultrasonic transducer (PMUT) element, each in-cell pixel logic being communicatively coupled with at least one adjacent pixel in the array. Transceiver electronics may operate the array in a selectable one of a first mode and a second mode. In the first mode, the array may generate a substantially plane ultrasonic wave. In the second mode, the array may generate, from at least one superpixel region, a focused beam of relatively high acoustic pressure, each superpixel region including at least one inner pixel disposed in a central portion of the superpixel region and at least a first group of outer pixels disposed in an outer portion of the superpixel region. The transceiver electronics may be configured to operate the array by configuring at least one in-cell pixel logic.

Abstract: In a method for operating a fingerprint sensor comprising a plurality of ultrasonic transducers, a first subset of ultrasonic transducers of the fingerprint sensor are activated, the first subset of ultrasonic transducers for detecting interaction between an object and the fingerprint sensor. Subsequent to detecting interaction between an object and the fingerprint sensor, a second subset of ultrasonic transducers of the fingerprint sensor are activated, the second subset of ultrasonic transducers for determining whether the object is a human finger, wherein the second subset of ultrasonic transducers comprises a greater number of ultrasonic transducers than the first subset of ultrasonic transducers.

Abstract: In a method for determining force applied to an ultrasonic sensor, ultrasonic signals are emitted from an ultrasonic sensor. A plurality of reflected ultrasonic signals from a finger interacting with the ultrasonic sensor is captured. A first data based at least in part on a first reflected ultrasonic signal of the plurality of reflected ultrasonic signals is compared with a second data based at least in part on a second reflected ultrasonic signal of the plurality of reflected ultrasonic signals. A deformation of the finger during interaction with the ultrasonic sensor is determined based on differences between the first data based at least in part on the first reflected ultrasonic signal and the second data based at least in part on the second reflected ultrasonic signal. A force applied by the finger to the ultrasonic sensor is determined based at least in part on the deformation.

Abstract: An ultrasonic sensor pixel includes a substrate, a piezoelectric micromechanical ultrasonic transducer (PMUT) and a sensor pixel circuit. The PMUT includes a piezoelectric layer stack including a piezoelectric layer disposed over a cavity, the cavity being disposed between the piezoelectric layer stack and the substrate, a reference electrode disposed between the piezoelectric layer and the cavity, and one or both of a receive electrode and a transmit electrode disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The sensor pixel circuit is electrically coupled with one or more of the reference electrode, the receive electrode and the transmit electrode and the PMUT and the sensor pixel circuit are integrated with the sensor pixel circuit on the substrate.

Abstract: An apparatus and method for frequency tuning/tracking between an electrical subsystem and a mechanical transducer subsystem is presented. An electromechanical transducer generates acoustic pulses as it is driven by a transmit signal from an electrical subsystem. As the transmit signal goes inactive, the settling behavior of the transducer is registered from which the difference in frequency between the resonance of the electromechanical transducer and the transmit signal frequency is determined and utilized for locking the electrical subsystem to the mechanical transducer subsystem by either tuning operating frequency of the electrical subsystem, or the mechanical transducer, to keep them matched (locked).

Abstract: An ultrasonic imaging apparatus having a Micro-machined Ultrasonic Transducer (MUT), such as a Piezoelectric MUT (PMUT) or Capacitive MUT (CMUT), with a transmitting mode and a receiving mode for generating and sensing acoustic pressure in imaging applications. During transmission in a PMUT the inverse piezoelectric effect on the piezo layer causes transverse stress, which causes a bending moment in the PMUT structure leading to out-of-plane deflection. Different applied signs of voltage generates different signs of stress inside the piezo that in turn cause oscillating motion generating an acoustic pressure wave. During signal reception, incident pressure waves deflect the PMUT creating transverse stress, resulting in a charge determined through measuring voltage between electrodes. The apparatus is particularly well-suited for use in health care, such as measuring fat/muscle thickness, blood-flow, and blood pressure.

Abstract: An array of piezoelectric ultrasonic transducer elements includes a plurality of superpixel regions. Each superpixel region includes at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region, and at least a second pixel set being disposed in an outer portion of the superpixel region. An electrical coupling may be provided between the array and transceiver electronics. The transceiver electronics may be configured to operate the array in a selectable one of a first mode and a second mode. In the first mode, the array generates a substantially plane ultrasonic wave having a first acoustic pressure. In the second mode, the array generates, from each superpixel region, a focused beam having a second acoustic pressure that is substantially higher than the first acoustic pressure.

Abstract: An apparatus includes an array of pixels, each pixel including in-cell pixel logic and a piezoelectric micromechanical ultrasonic transducer (PMUT) element, each in-cell pixel logic being communicatively coupled with at least one adjacent pixel in the array. Transceiver electronics may operate the array in a selectable one of a first mode and a second mode. In the first mode, the array may generate a substantially plane ultrasonic wave. In the second mode, the array may generate, from at least one superpixel region, a focused beam of relatively high acoustic pressure, each superpixel region including at least one inner pixel disposed in a central portion of the superpixel region and at least a first group of outer pixels disposed in an outer portion of the superpixel region. The transceiver electronics may be configured to operate the array by configuring at least one in-cell pixel logic.

Abstract: MEMS ultrasound fingerprint ID systems are provided. Aspects of the systems include the capability of detecting both epidermis and dermis fingerprint patterns in three dimensions. Also provided are methods of making and using the systems, as well as devices that include the systems.

Abstract: A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.