Patents by Inventor Harald Schenk
Harald Schenk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20130034323Abstract: Provided is a concept for variably guiding optical waves by using a layer-stack having an electro-optic core layer of electro-optic material for guiding light and an electrode arrangement with at least a first electrode layer in proximity to the electro-optic core layer, wherein the electrode arrangement is configured to activate an electro-optic effect in a region of the electro-optic core layer by an electric field generated by means of the electrode arrangement, such that a propagation of the light is manipulated in the region of the activated electro-optic effect.Type: ApplicationFiled: August 8, 2012Publication date: February 7, 2013Inventors: Florenta COSTACHE, Martin Blasl, Harald Schenk
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Publication number: 20120188625Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.Type: ApplicationFiled: February 29, 2012Publication date: July 26, 2012Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thilo Sandner, Harald Schenk, Joerg Heber, Thomas Klose, Andreas Bergmann, Christian Gerwig, Thomas Knieling
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Publication number: 20120033214Abstract: The invention relates to electromagnetic radiation microoptical diffraction gratings and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can be used as microspectrometers in the form of scanning microgratings. The microgratings are provided with a surface structure and are able to be manufactured cost effectively and in high volumes. The surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged substantially equidistantly and aligned substantially parallel to one another. At least part of the surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in a wave-shape (sinusoidal) manner and having alternating arranged wave peaks and wave troughs. A reflective layer can additionally be applied to increase the intensity of reflected radiation.Type: ApplicationFiled: August 11, 2011Publication date: February 9, 2012Applicant: HIPERSCAN GMBHInventors: Fabian Zimmer, Alexander Wolter, Harald Schenk
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Patent number: 7977897Abstract: The invention relates to an apparatus and to a method for controlling or regulating the deflection of micromechanically manufactured deflectable elements which, driven electrostatically, are deflected in an oscillating manner. It is the object of the invention to provide a possibility with which a much larger deflection range can be utilized and in so doing the required voltage potential difference for the electrostatic drive of a deflection can be kept small and the occurrence of the pull-in effect can be avoided. In accordance with the invention, a deflectable element is present which is held at a frame element by at least one spring element and which can be deflected using an electrostatic drive. The deflection can be achieved by means of at least one counter-electrode and the deflectable element usable as an electrode.Type: GrantFiled: October 1, 2008Date of Patent: July 12, 2011Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.Inventor: Harald Schenk
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Patent number: 7951635Abstract: The invention relates to a method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use which should be deflected at a resonant frequency. It is therefore the object of the invention to compensate deviations which occur due to manufacture and which have an influence on the resonant frequency of micromechanical elements in a simple and cost-effective manner. In accordance with the invention, a procedure is followed such that additional trenches and/or recesses are formed at the deflectable element simultaneously with the forming of the trenches by dry etching with which at least one spring element, a deflectable element and optionally also a frame element of micromechanical elements are formed. The trenches and recesses can thereby be formed under the same respective process parameters at the respective micromechanical element or at all micromechanical elements of a batch.Type: GrantFiled: September 5, 2007Date of Patent: May 31, 2011Assignee: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Thomas Klose, Harald Schenk, Alexander Wolter
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Patent number: 7940439Abstract: In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.Type: GrantFiled: March 31, 2008Date of Patent: May 10, 2011Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Denis Jung, Christian Drabe, Thilo Sandner, Harald Schenk, Thomas Klose, Alexander Wolter
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Patent number: 7932788Abstract: The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.Type: GrantFiled: April 24, 2006Date of Patent: April 26, 2011Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.v.Inventors: Harald Schenk, Alexander Wolter, Thilo Sandner, Christian Drabe, Thomas Klose
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Patent number: 7847997Abstract: A projection apparatus for scanningly projecting an image onto an image field by means of a radiation beam includes a modulator for modulating an intensity of the radiation beam such that the intensity of the radiation beam changes in a time interval during which a scan point to which the radiation beam is directed sweeps a pixel of the image field.Type: GrantFiled: February 27, 2008Date of Patent: December 7, 2010Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thilo Sandner, Harald Schenk, Michael Scholles, Markus Schwarzenberg, Alexander Wolter
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Patent number: 7760414Abstract: An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.Type: GrantFiled: March 31, 2008Date of Patent: July 20, 2010Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Harald Schenk, Thilo Sandner
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Publication number: 20090302960Abstract: The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.Type: ApplicationFiled: April 24, 2006Publication date: December 10, 2009Applicant: Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V.Inventors: Harald Schenk, Alexander Wolter, Thilo Sandner, Christian Drabe, Thomas Klose
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Publication number: 20090225424Abstract: The invention relates to microoptical diffraction gratings for electromagnetic radiation and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can in particular be utilized for use as microspectrometers which can be used in this connection in the form of scanning microgratings. In accordance with the object set, they should be provided with improved surface topology and should be able to be manufactured cost effectively and in high volumes. With the diffraction gratings in accordance with the invention, a surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged equidistantly and aligned parallel to one another. In addition, the total surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in wave shape and having alternatingly arranged wave peaks and wave troughs.Type: ApplicationFiled: September 30, 2005Publication date: September 10, 2009Inventors: Fabian Zimmer, Harald Schenk
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Patent number: 7573634Abstract: The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.Type: GrantFiled: June 27, 2005Date of Patent: August 11, 2009Assignee: Fraunhofer-Gesellschaft Zür Förderung Der Angewandten Forschung E.V.Inventors: Uwe Jan Schmidt, Thilo Sandner, Harald Schenk, Alexandre Gatto, Minghong Yang, Jörg Heber, Norbert Kaiser
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Publication number: 20090097087Abstract: The invention relates to a micromechanical sensor- or actuator component with an optical function and to a production method. A substrate thereby has electrodes and electrical contactings, an optical, electrically actuated element which can be deflected relative to the substrate. A transparent cover is likewise present. The object of the invention is to produce a micromechanical sensor- or actuator component with an optical function and a method for the production of such components with which to reduce or even avoid reflections which might impair the function of the micromechanical sensor- or actuator component. According to the invention, the optical main axis of the cover is thereby orientated non-perpendicular to the surface of the substrate.Type: ApplicationFiled: October 15, 2008Publication date: April 16, 2009Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Alexander Wolter, Thilo Sander, Harald Schenk
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Patent number: 7518770Abstract: The present invention relates to an apparatus for image projecting and/or material processing having a deflection device (3) for variably deflecting a light beam (2) emanating from a light source (1) onto a projection area or a processing area (7), a modulation device (4) for modulating an intensity of the light beam (2) and a control unit (5) which is connected to the modulation device (4) and by means of which the modulation device (4) can be triggered to modulate the intensity of the light beam (2) according to input data.Type: GrantFiled: August 6, 2003Date of Patent: April 14, 2009Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventor: Harald Schenk
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Publication number: 20090072769Abstract: The invention relates to an apparatus and to a method for controlling or regulating the deflection of micromechanically manufactured deflectable elements which, driven electrostatically, are deflected in an oscillating manner. It is the object of the invention to provide a possibility with which a much larger deflection range can be utilized and in so doing the required voltage potential difference for the electrostatic drive of a deflection can be kept small and the occurrence of the pull-in effect can be avoided. In accordance with the invention, a deflectable element is present which is held at a frame element by at least one spring element and which can be deflected using an electrostatic drive. The deflection can be achieved by means of at least one counter-electrode and the deflectable element usable as an electrode.Type: ApplicationFiled: October 1, 2008Publication date: March 19, 2009Inventor: Harald Schenk
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Patent number: 7490947Abstract: The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturized reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.Type: GrantFiled: December 18, 2006Date of Patent: February 17, 2009Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thilo Sandner, Wolfram Pufe, Harald Schenk
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Patent number: 7466474Abstract: A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.Type: GrantFiled: March 31, 2008Date of Patent: December 16, 2008Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Denis Jung, Christian Drabe, Harald Schenk, Thilo Sandner, Thomas Klose
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Publication number: 20080239531Abstract: An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Harald SCHENK, Thilo SANDNER
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Publication number: 20080239446Abstract: A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: Frauhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Denis Jung, Christian Drabe, Harald Schenk, Thilo Sandner, Thomas Klose
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Publication number: 20080242049Abstract: In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Denis JUNG, Christian DRABE, Thilo SANDNER, Harald SCHENK, Thomas KLOSE, Alexander WOLTER