Patents by Inventor Harald Schenk

Harald Schenk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080218835
    Abstract: A projection apparatus for scanningly projecting an image onto an image field by means of a radiation beam includes a modulator for modulating an intensity of the radiation beam such that the intensity of the radiation beam changes in a time interval during which a scan point to which the radiation beam is directed sweeps a pixel of the image field.
    Type: Application
    Filed: February 27, 2008
    Publication date: September 11, 2008
    Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    Inventors: Thilo SANDNER, Harald SCHENK, Michael SCHOLLES, Markus SCHWARZENBERG, Alexander WOLTER
  • Publication number: 20080081392
    Abstract: The invention relates to a method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use which should be deflected at a resonant frequency. It is therefore the object of the invention to compensate deviations which occur due to manufacture and which have an influence on the resonant frequency of micromechanical elements in a simple and cost-effective manner. In accordance with the invention, a procedure is followed such that additional trenches and/or recesses are formed at the deflectable element simultaneously with the forming of the trenches by dry etching with which at least one spring element, a deflectable element and optionally also a frame element of micromechanical elements are formed. The trenches and recesses can thereby be formed under the same respective process parameters at the respective micromechanical element or at all micromechanical elements of a batch.
    Type: Application
    Filed: September 5, 2007
    Publication date: April 3, 2008
    Inventors: Thomas Klose, Harald Schenk, Alexander Wolter
  • Publication number: 20080068704
    Abstract: The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminium layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
    Type: Application
    Filed: June 27, 2005
    Publication date: March 20, 2008
    Applicant: Fraunhofer-Gesellschaft zur Forderung Der Angewandten Forschung E.V.
    Inventors: Jan-Uwe Schmidt, Thilo Sandner, Harald Schenk, Alexandre Gatto, Minghong Yang, Jorg Heber, Norbert Kaiser
  • Publication number: 20080022771
    Abstract: The invention relates to micromechanical components whose operating stability is increased with respect to known solutions. It can be a matter of sensors or also actuators in which a deflectable element can be deflected in at least one dimension. It is the object of the invention to provide micromechanical components which achieve an increased operating stability, in particular with increased electrical voltages and other external disturbances. In components in accordance with the invention, a deflectable element having at least one spring is held at a frame part. The deflectable element is electrically separated from the frame part by grooves and an electrical insulation. An electrical voltage can be applied between the deflectable element and the frame part for the deflection. Path limitation elements are moreover present between regions which are at the same electrical voltage potential or where a negligible current flow occurs on a touching contacting of such regions.
    Type: Application
    Filed: July 24, 2007
    Publication date: January 31, 2008
    Inventors: Alexander Wolter, Harald Schenk
  • Patent number: 7301643
    Abstract: An arrangement for building a compact Fourier transform interferometer for optical radiation according to the Michelson principle or a principle derived therefrom. According to the invention, this arrangement is characterized in that the optical modulation of the radiation in at least one of the interferometer arms is produced by the translational displacement of micromechanical translation mirrors that are optically accessible on one side or on both sides, with an effective oscillation amplitude of at least 50 ?m and a usable mirror surface area of at least 1 mm2. In doing so, the micromechanical mirror components according to the invention assume the function of known movable mirrors so that by using an almost massless microcomponent in comparison to conventional systems, a much smaller size and a mirror modulation frequency that is several orders of magnitude higher can be achieved. The arrangement according to the invention is used especially for optical spectroscopy.
    Type: Grant
    Filed: April 25, 2005
    Date of Patent: November 27, 2007
    Assignees: CTR Carinthian Tech Research AG, Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschunge E.V.
    Inventors: Andreas Kenda, Werner Scherf, Marin Kraft, Harald Schenk
  • Patent number: 7301690
    Abstract: The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the optical elements with a reflecting surface are preferred. It is the object of the invention to provide for a changeability of optical parameters, in particular of the focal width with small time constants, in an inexpensive manner and with a small required constructional volume. The micro-optical arrangement according to the invention comprises a plate-like optical element onto which electromagnetic radiation is directed on an optically effective surface. The optical element thereby is fixed or clamped at least at one outer edge point. The optical element is elastically deformed due to mass inertia as a result of a translatory movement at least approximately parallel to the optical axis between two reversal points (?z0, z0).
    Type: Grant
    Filed: April 25, 2006
    Date of Patent: November 27, 2007
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Harald Schenk, Christian Drabe
  • Publication number: 20070165297
    Abstract: The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturised reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.
    Type: Application
    Filed: December 18, 2006
    Publication date: July 19, 2007
    Inventors: Thilo Sandner, Wolfram Pufe, Harald Schenk
  • Publication number: 20060250708
    Abstract: The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the optical elements with a reflecting surface are preferred. It is the object of the invention to provide for a changeability of optical parameters, in particular of the focal width with small time constants, in an inexpensive manner and with a small required constructional volume. The micro-optical arrangement according to the invention comprises a plate-like optical element onto which electromagnetic radiation is directed on an optically effective surface. The optical element thereby is fixed or clamped at least at one outer edge point. The optical element is elastically deformed due to mass inertia as a result of a translatory movement at least approximately parallel to the optical axis between two reversal points (?z0, z0).
    Type: Application
    Filed: April 25, 2006
    Publication date: November 9, 2006
    Inventors: Harald Schenk, Christian Drabe
  • Publication number: 20060209262
    Abstract: The present invention relates to an apparatus for image projecting and/or material processing having a deflection device (3) for variably deflecting a light beam (2) emanating from a light source (1) onto a projection area or a processing area (7), a modulation device (4) for modulating an intensity of the light beam (2) and a control unit (5) which is connected to the modulation device (4) and by means of which the modulation device (4) can be triggered to modulate the intensity of the light beam (2) according to input data.
    Type: Application
    Filed: August 6, 2003
    Publication date: September 21, 2006
    Inventor: Harald Schenk
  • Patent number: 7078778
    Abstract: A micromechanical device comprises a substrate and a member which is moveably attached to the substrate, wherein the member is formed in an electrically conductive layer, wherein a first area of the moveable member forms a first electrode, a second area of the moveable member forms a second electrode, and wherein the first electrode and the second electrode are electrically insulated from each other by an electrically insulating third area which penetrates the conductive layer, and wherein the substrate comprises a third electrode which is at least partially arranged opposed to the first electrode and the second electrode.
    Type: Grant
    Filed: July 26, 2001
    Date of Patent: July 18, 2006
    Assignee: Fraunhofer-Gessellschaft zur Foerderung der angewandten Forschung e.V.
    Inventor: Harald Schenk
  • Patent number: 7059189
    Abstract: An acceleration sensor comprises a mass, which can be deflected in a first direction and a second direction opposite to the first direction, a driver effective to vibrate the mass, a detector for detecting times when the mass passes a predetermined position when an acceleration is applied, and an evaluator which detects the acceleration based on the detected times during acceleration and times when the mass passes the predetermined position when no acceleration is applied. Thereby, it is achieved that the acceleration is detected inexpensively and accurately.
    Type: Grant
    Filed: September 29, 2005
    Date of Patent: June 13, 2006
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Christian Drabe, Harald Schenk
  • Publication number: 20060098204
    Abstract: An arrangement for building a compact Fourier transform interferometer for optical radiation according to the Michelson principle or a principle derived therefrom. According to the invention, this arrangement is characterized in that the optical modulation of the radiation in at least one of the interferometer arms is produced by the translational displacement of micromechanical translation mirrors that are optically accessible on one side or on both sides, with an effective oscillation amplitude of at least 50 ?m and a usable mirror surface area of at least 1 mm2. In doing so, the micromechanical mirror components according to the invention assume the function of known movable mirrors so that by using an almost massless microcomponent in comparison to conventional systems, a much smaller size and a mirror modulation frequency that is several orders of magnitude higher can be achieved. The arrangement according to the invention is used especially for optical spectroscopy.
    Type: Application
    Filed: April 25, 2005
    Publication date: May 11, 2006
    Inventors: Andreas Kenda, Werner Scherf, Marin Kraft, Harald Schenk
  • Patent number: 7034936
    Abstract: The present invention is based on the knowledge that the advantages of a moveable dispersive element with regard to the simple detector element and the adjustability of the measurement range and the resolution can also be used in a miniaturization of a spectrometer, when the dispersive element is operated generally in resonance instead by a quasi-static drive. A proposed spectrometer comprises a vibratably suspended dispersive element for spectrally decomposing a light beam, whose spectral distribution is to be determined, into spectral components, a means for putting the vibratably suspended dispersive element into a vibration with a frequency, which is in such a ratio to the natural frequency of the vibratably suspended dispersive element that a resonance amplification of the voltage of the dispersive element occurs, and a detector for detecting a spectral component of the light beam.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: April 25, 2006
    Assignee: Fraunhofer Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Harald Schenk, Heinrich Grueger
  • Publication number: 20060077554
    Abstract: Described are diffraction gratings for electromagnetic radiation and a method suitable for production. The diffraction gratings can be used, in particular, as microspectrometers which can be used in this case in the form of scanning microgratings. In accordance with the object set, they are to be made available as efficient diffraction gratings in miniaturized form and to be able to be produced cost-effectively and in large piece numbers. In the case of the diffraction gratings, there is constructed on a surface of a substrate a surface structure which is formed from equidistantly arranged linear structural elements aligned parallel to one another. Moreover, the entire surface of the substrate and of the structural elements is coated with at least one further layer, which forms a uniform surface contoured in the shape of a wave and having alternatively arranged wave peaks and wave troughs.
    Type: Application
    Filed: September 30, 2005
    Publication date: April 13, 2006
    Inventor: Harald Schenk
  • Patent number: 7027152
    Abstract: A spectrometer is described which comprises a dispersive element for spectrally decomposing a light beam, whose spectral distribution is to be determined, into spectral components, as well as a suspension for supporting the dispersive element and for biasing the same into a resting position with a biasing force, when the dispersive element is in a deflected position. A control means controls a holding means to vary the deflected position, so that different spectral components become detectable for a detector of the spectrometer having a first and a second detector element. A combining means combines shots made by the detector at different positions of the dispersive element.
    Type: Grant
    Filed: August 13, 2004
    Date of Patent: April 11, 2006
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Harald Schenk, Heinrich Grueger
  • Publication number: 20060071578
    Abstract: A micromechanical element described includes a vibrating system having a vibrating body and an elastic suspension by means of which the vibrating body is suspended to be able to vibrate, and an adjuster for adjusting a resonant frequency of the vibrating system by applying a voltage difference between at least one part of the vibrating body and at least one stationary electrode.
    Type: Application
    Filed: October 12, 2005
    Publication date: April 6, 2006
    Inventors: Christian Drabe, Alexander Wolter, Harald Schenk
  • Publication number: 20060055672
    Abstract: A device for controlling an apparatus depending on a position or movement of an object in a control region includes a light-beam mover for moving a light-beam in the control region depending on a light-beam motion signal to guide the light-beam over the control region, different positions or positional changes of the object or several objects in the control region being associated to different reactions in the apparatus, a light sensor for detecting a reflected light-beam to generate a sensor output signal depending on the reflected light-beam, and a control signal generator which is formed to generate, depending on the light-beam motion signal and the sensor output signal a control signal for the apparatus which is formed to cause a reaction in the apparatus associated to a position or positional change in the control region defined by the light-beam motion signal and the sensor output signal.
    Type: Application
    Filed: September 13, 2005
    Publication date: March 16, 2006
    Inventors: Martin Krocker, Harald Schenk
  • Publication number: 20060048574
    Abstract: An acceleration sensor comprises a mass, which can be deflected in a first direction and a second direction opposite to the first direction, a driving means effective to vibrate the mass, a detection means for detecting times when the mass passes a predetermined position when an acceleration is applied, and an evaluation means which detects the acceleration based on the detected times during acceleration and times when the mass passes the predetermined position when no acceleration is applied. Thereby, it is achieved that the acceleration is detected inexpensively and accurately.
    Type: Application
    Filed: September 29, 2005
    Publication date: March 9, 2006
    Inventors: Christian Drabe, Harald Schenk
  • Publication number: 20050057751
    Abstract: The invention is based on the knowledge that the quasi-static deflection of a dispersive element can also be obtained in a miniaturization, in that a higher degree of insusceptibility against vibration and shock can be obtained when a suspension is used for the dispersive element, which biases the same into a resting position, as well as for the deflection a means for holding the dispersive element in a deflected position, such that an equilibrium of powers is established between the holding force and the biasing force. In that way, after shock and vibration, the dispersive element always returns to the position defined by the holding force. Therefore, an inventive spectrometer comprises a dispersive element for spectrally decomposing a light beam, whose spectral distribution is to be determined, into spectral components, as well as a suspension for supporting the dispersive element and for biasing the same into a resting position with a biasing force, when the dispersive element is in a deflected position.
    Type: Application
    Filed: August 13, 2004
    Publication date: March 17, 2005
    Inventors: Harald Schenk, Heinrich Grueger
  • Publication number: 20050057750
    Abstract: The present invention is based on the knowledge that the advantages of a moveable dispersive element with regard to the simple detector element and the adjustability of the measurement range and the resolution can also be used in a miniaturization of a spectrometer, when the dispersive element is operated generally in resonance instead by a quasistatic drive. A proposed spectrometer comprises a vibratably suspended dispersive element for spectrally decomposing a light beam, whose spectral distribution is to be determined, into spectral components, a means for putting the vibratably suspended dispersive element into a vibration with a frequency, which is in such a ratio to the natural frequency of the vibratably suspended dispersive element that a resonance amplification of the voltage of the dispersive element occurs, and a detector for detecting a spectral component of the light beam.
    Type: Application
    Filed: August 11, 2004
    Publication date: March 17, 2005
    Inventors: Harald Schenk, Heinrich Grueger