Abstract: Methods and apparatus for decreasing oxide stress and increasing reliability of memory transistors are disclosed. Duration and frequency of exposure of memory transistor gates to read signals are significantly reduced. In some embodiments, after a short read cycle, the content of the memory cell is latched and maintained as long as the subsequent read attempts are directed to the same memory cell. In these embodiments the read cycle need only be long enough to latch the memory content of the cell, and as long as the subsequent read attempts target the same memory cell the latched value will be used instead of repeating the read process.

Abstract: Memory cells comprising an SRAM and an OTP memory unit are disclosed that combine the advantages of both technologies and can be fabricated by standard CMOS manufacturing without additional masking. Disclosed concepts and details may be applied to and utilized in other systems requiring memory and/or employing other fabrication technologies. Among other advantages, the SRAM part of disclosed memory cells allows countless programming of the cell, which is useful, for example, during the prototyping. The OTP part is utilized to permanently program the memory cell by either using external data or the data already existing in the SRAM part of the cell. The value held by the OTP unit may also be written directly into the SRAM part of the cell.

Abstract: A method of manufacturing a non-volatile semiconductor memory. The method includes forming a word gate poly layer on a substrate, wherein an upper surface of the substrate defines a plane of the substrate. The method also includes forming a first dielectric layer coupled to the word gate poly layer and patterning the word gate poly layer and the first dielectric layer to form an array of word gate structures. The method further includes forming a poly plug layer and patterning the poly plug layer to form a plurality of poly plugs surrounded in the plane of the substrate on three sides, forming a plurality of control gates, forming a second dielectric layer, planarizing the second dielectric layer using a chemical-mechanical polishing process, and depositing a metal layer to provide electrical contact to the word gate structures.

Abstract: A high selectivity and etch rate with innovative approach of inductively coupled plasma source. Preferably, the invention includes a method using plasma chemistry that is divided into main etch step of (e.g., Cl2+HBr+C4F8) gas combination and over etch step of (e.g., HBr+Ar). The main etch step provides a faster etch rate and selectivity while the over etch step will decrease the etch rate and ensure the stringer and residue removal without attacking the under layer.

Abstract: A high selectivity and etch rate with innovative approach of inductively coupled plasma source. Preferably, the invention includes a method using plasma chemistry that is divided into main etch step of (e.g., Cl2+HBr+C4F8) gas combination and over etch step of (e.g., HBr+Ar). The main etch step provides a faster etch rate and selectivity while the over etch step will decrease the etch rate and ensure the stringer and residue removal without attacking the under layer.