Abstract: The invention relates to an adjusting device with high position resolution, even in the nano- or subnanometer range and a regulating distance of a few micrometers up to several hundred millimeters, wherein PZT-solid state actuators in a closed-loop control circuit are used for the main control direction, the positions thereof being determined by high resolution sensors and the PZT-solid state actuators are in connection with a platform (2) via joints. For the compensation of position errors occurring perpendicular to the individual position, additional actuators (5) on the basis of piezoelectric single crystals are intended according to the invention. The single crystals are actuated according to stored values in an error table, wherein the respective control value results as a function of the main control axis, however with reversed gradient signs, and the additional actuators are connected to the adjusting device platform by a correcting plate (4).

Abstract: A piezo linear drive including a group of piezo actuator stacks configured to drive a moving member located in a guidance device, and located on a joint substrate in a hybrid arrangement; wherein within a stack extending from the substrate a first stack part is configured as a longitudinal actuator and a second stack part is configured as a shearing actuator, the second stack part is equipped with a wear-resistant end plate which is in at least one of a clamping contact and shearing contact with the moving member, and at least two identical motors are located adjacent to each other in order to perform alternating clamping and advancing movements during a stepping operation.

Abstract: A piezo linear drive including a group of piezo actuator stacks configured to drive a moving member located in a guidance device, and located on a joint substrate in a hybrid arrangement; wherein within a stack extending from the substrate a first stack part is configured as a longitudinal actuator and a second stack part is configured as a shearing actuator, the second stack part is equipped with a wear-resistant end plate which is in at least one of a clamping contact and shearing contact with the moving member, and at least two identical motors are located adjacent to each other in order to perform alternating clamping and advancing movements during a stepping operation.

Abstract: An arrangement for a temperature-compensated multi-dimensional micropositioning of mutually position-defined optical components including a guide unit for housing the optical components and a plurality of piezo actors. The guide unit includes two spaced plates or rings. Also included is three equally spaced solid joints arranged or integrated between the rings or plates, and stack-type piezo actors secured in a neighbouring relationship with the solid joints in such a manner that actuation forces act on the rings or plates. Further, at least the surfaces of the rings or plates accommodating the optical components are coated with a material corresponding to that of the optical components, the guide unit and the optical components are made from materials with essentially the same temperature coefficients, and one stack-type piezo actor is arranged between two solid joints.

Abstract: The invention relates to an arrangement for the temperature-compensated multi-dimensional micropositioning of mutually position-defined optical components, comprising a guide unit for housing the optical components as well as several piezo actors.

Abstract: An adjusting device with a piezo drive is provided with two piezo translators which are brought into functional connection with a driven element by means of a spring element. A transmission of motion occurs corresponding to the change in length of the piezo translators, while resetting of the piezo translators occurs by removing the functional connection through their associated control links. Because of the continuous biasing of the spring element, a secure engagement of the driven element is guaranteed. As a result, the high precision requirements on the control links and their positioning displacements, which would otherwise be necessary for engagement, can be displaced with.

Abstract: The invention relates to a piezoelectric positioning element having a micrometer screw, which is combined with a piezotranslator via an intermediate part that is adjustable in length. The stationary portion and the piezoelectrically adjustable portion of the intermediate part are joined to one another by means of a parallel spring guide. The translator may also be made of an electrostrictive or magnetostrictive material.